Abstract: A container for a sheet-like article, comprising a tray member for substantially accommodating therein the article, the tray member having an opening, a cover member for substantially sealingly covering the opening of the tray member, supporting elements provided in the tray member for supporting the article when it is accommodated in the tray member, wherein a portion of the article is protruded out of the container and through the opening of the tray member, when the article is supported by the supporting elements and the cover member is opened.

Abstract: An apparatus includes a plurality of cassettes each for containing a mask or reticle having thereon an integrated circuit pattern, each cassette having a holder for holding the mask or reticle while covering the lower surface thereof, the apparatus further including a carrier for storing therein the cassettes in a layered fashion, a fork for selectively taking out one of the holders from the carrier and an elevator for feeding the take-out holder to a separation station so that the mask or reticle is automatically taken out from, fed from and moved back into the carrier.

Abstract: A device for supplying masks to be used in a chamber having a wall, comprises an opening formed in the wall of the chamber, and a rotatable shelf disposed in the opening and for carrying thereon the masks. The rotatable shelf is coupled, by way of a rotational shaft, to a portion of the wall adjacent to the opening and the rotational shelf has a mask carrying portion which is rotationally movable, about the rotational shaft, through the opening to and from the inside of the chamber and from and to the outside of the chamber.

Abstract: An insert rotary cutter for processing a metal workpiece includes a cutter body of a generally circular cross-section having an axis of rotation therethrough. The cutter includes one or more cutter inserts releasably mounted on a periphery of the cutter body. The insert includes a generally quadrilateral plate defined by a front face, a rear face disposed generally parallel to the front face and four side faces. The insert has a pair of main cutting edges defined by the front face and one pair of the opposite side faces. The pair of opposite side faces serve as respective rake surfaces for the main cutting edges. Each of the rake surfaces is convexly curved in such a manner that the width of the insert between the rake surfaces is larger at a central portion of each main cutting edge than at opposite ends of the main cutting edge.

Abstract: An insert rotary cutter for processing a metal workpiece includes a cutter body having an axis of rotation therethrough. The cutter includes at least one cutter insert releasably mounted on an outer periphery of the body. The insert is of a generally polygonal shape having a curved front face. The front face has a pair of opposed marginal ridges serving as respective main cutting edges. The front face has marginal portions disposed adjacent and extending along the main cutting edges, and the marginal portions serve as respective rake surfaces for the main cutting edges. Each of the rake surface is convexly curved as viewed from a respective one of the main cutting edges and is concavely curved as viewed along a respective one of the main cutting edges.

Abstract: An insert cutter includes a body having at least one generally radially outwardly-opening recess disposed adjacent a forward end face thereof. A cutter insert is received in the recess. The insert is a polygonal shape having a front face, a rear face and side faces. Each corner portion where adjacent side faces intersect each other is removed to provide first and second corner faces. The insert has main cutting edges each defined by the front face and a respective one of the side faces, auxiliary cutting edges each defined by the front face and a respective one of the first corner faces, and corner cutting edges each defined by the front face and a respective one of the second corner faces. Each side face serves as a flank of a respective one of the main cutting edges with a positive clearance angle A. Each first corner face serves as a flank of a respective one of the auxiliary cutting edges with a positive clearance angle B.

Abstract: Between the object plane and the image plane of a projection optical system, a liquid is held by and between a plurality of plate-like solid optical elements formed of a transparent material, and the spacing between these solid optical elements is varied to vary the layer thickness of the liquid, thereby adjusting the focus position of the optical system.

Abstract: A mask aligner for stepping and exposing a wafer in accordance with a shot arrangement, including an input device to which wafer dimension, chip dimension and a chip pattern for one shot are inputted, a selector for selecting a shot arrangement mode from plural shot arrangement modes based on the above input signals, a controller for effecting the shots in accordance with the selected modes to minimize the time required for exposing the one entire wafer or to maximize the number of chips exposed per unit.