Abstract: A seal structure is provided between an upper end portion (11a) of a main body housing (11) and an outer peripheral surface of an. arm driving shaft (13), an annular mechanical seal (51) which is pressure contacted with the outer peripheral surface of the arm driving shaft, an annular seal holding member (54) which holds the annular mechanical seal (51), and a floating action holding means (55) which is arranged between the upper end portion (11a) of the main body housing and the annular seal holding member (54), holds the annular seal holding member (54) so as to freely float and adjusts an attitude of the annular mechanical seal (51) in accordance with a tilting motion of the arm driving shaft (13).

Abstract: A first arm 2 comprises a movable pulley 18 assembled and fixed in a hand 1, a fixed pulley 16 assembled and fixed in a second arm 3, and a timing belt 22 stretched between the movable pulley 18 and fixed pulley 16. A frame 19 has a plane shape corresponding to a virtual plane region enclosed by the timing belt 22. In the frame 19, a first fixed shaft 21 for rotatably holding the movable pulley 18 and a second fixed shaft 17 extending from the second arm 3 for assembling and fixing the fixed pulley 16 are assembled and fixed. An outer cover 60 is light in weight, and covers the frame 19.

Abstract: In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The apparatus has cassettes, housing a substrate, a robot transferring the substrate, and at least one processing unit. The robot has a vertical swivel arm body swiveling in the vertical direction on a machine bed, and a horizontal swivel arm body having two arm sets swiveling in the horizontal direction on a movable machine bed. The vertical swivel arm body has a first arm and a second arm respectively joined rotatable in the vertical direction and a hand is moved substantially in parallel in the vicinity of the cassettes, or the processing unit, and the horizontal swivel arm body has a first link and a second link and the hand is moved into the cassettes, or the processing unit.

Abstract: There is disclosed a carrier system for carrying a silicon wafer or a cassette accommodating the wafers to arbitrary positions by loading an arm with them.

Abstract: A carrier system which carries electronic parts mounted on an arm to arbitrary positions within a clean room is disclosed.