Abstract: A shower plate adapted to be installed in a plasma deposition apparatus including a gas inlet port, a shower head, a reaction chamber and an exhaust duct, the shower plate being adapted to be attached to the showerhead and having: a front surface adapted to face the gas inlet port; and a rear surface opposite to the front surface, wherein the shower plate has multiple apertures each extending from the front surface to the rear surface, and wherein the shower plate further has at least one aperture extending from the front surface side of the shower plate to the exhaust duct.

Abstract: A numerical controller that controls a machine based on a program includes a manual program execution instruction unit that gives instructions for advancing and reversing execution of the program in a manual manner, a program manual execution unit that sequentially executes the program, and a block information notification unit that identifies a block in the program the execution of which is about to be started, based on execution status of the program reported from the program manual execution unit, and that makes notification in accordance with an attribute of the identified block.

Abstract: An object is to provide an image-sensing system which can acquire uniform images with a line sensor camera. An image-sensing system includes: a line sensor camera that shoots a workpiece in which a plurality of circumferential surfaces whose radii differ from each other are aligned in a direction of an axis and which is being machined while being rotated about the axis from a direction orthogonal to the axis so as to cover the entire workpiece in the direction of the axis; and a scan rate change unit which changes a scan rate of the line sensor camera to values that respectively correspond to the radii of the circumferential surfaces, and the line sensor camera shoots the workpiece at the scan rates which are changed to the values corresponding to the radii of the circumferential surfaces so as to respectively correspond to the circumferential surfaces.

Abstract: A machine learning device for learning a threshold value of detecting an abnormal load in a machine tool, includes a state observation unit, and a learning unit. The state observation unit observes a state variable obtained based on at least one of information about a tool, main spindle revolution rate, and amount of coolant of the machine tool, material of a workpiece, and moving direction, cutting speed, and cut depth of the tool, and the learning unit learns the threshold value of detecting an abnormal load based on training data created from an output of the state observation unit and data related to detection of an abnormal load in the machine tool and on teacher data.

Abstract: An object is to provide an image-sensing system which can acquire uniform images with a line sensor camera. An image-sensing system includes: a line sensor camera that shoots a workpiece in which a plurality of circumferential surfaces whose radii differ from each other are aligned in a direction of an axis and which is being machined while being rotated about the axis from a direction orthogonal to the axis so as to cover the entire workpiece in the direction of the axis; and a scan rate change unit which changes a scan rate of the line sensor camera to values that respectively correspond to the radii of the circumferential surfaces, and the line sensor camera shoots the workpiece at the scan rates which are changed to the values corresponding to the radii of the circumferential surfaces so as to respectively correspond to the circumferential surfaces.

Abstract: A machining program editing device calculates an editable time for a block of a machining program, makes editable only those of a plurality of blocks in the machining program which have the editable time left remaining, and locally writes only edited portions into a machining program used for control.

Abstract: A numerical controller includes: a program analyzing unit to obtain an end point position of a tool; a first angle calculating unit to calculate an inclination angle of a synthetic feeding direction that maximizes a synthetic torque, based on an upper limit movement torque of the tool in each of the two axis directions; a second angle calculating unit to calculate an inclination angle of a cutting feed direction of the tool based on a start point position and the end point position of the tool; a rotation angle calculating unit to calculate a difference between the inclination angle of the synthetic feeding direction and the inclination angle of the cutting feed direction as a rotation angle of a table; and a servo motor control unit to control rotation of the table based on the rotation angle.

Abstract: A numerical controller includes: a program analyzing unit to obtain a first movement end point position of the tool; a direction calculating unit to calculate a synthetic movement direction that maximizes a synthetic velocity, based on an upper limit movement velocity of the tool in each of the two axis directions; an end point position calculating unit to calculate an intersection position of a circle and the synthetic movement direction as a second movement end point position, wherein the circle has as a radius a distance from a rotation center position of the table to the first movement end point position; a rotation angle calculating unit to calculate a rotation angle of the table based on the first movement end point position and the second movement end point position; and a rotation control unit to control rotation of the table based on the rotation angle.

Abstract: Examples of a substrate processing apparatus includes a chamber, a susceptor provided in the chamber, a flow control ring of an insulator that is mounted on the chamber and surrounds the susceptor, a shower plate opposed to the susceptor, and a metal film that is formed on a lower surface of the flow control ring while exposing an upper surface of the flow control ring, and is in contact with the chamber.

Abstract: A shower plate for a plasma deposition apparatus, the shower plate including: a plurality of apertures each extending from a rear surface of the shower plate to a front surface for passing a carrier gas therethrough in this direction to a chamber, a plurality of first apertures each extending from a first connecting aperture to an inner part of the front surface for passing gas therethrough in this direction to the chamber, and a plurality of second apertures each extending from a second connecting aperture to an outer part of the front surface for passing gas therethrough in this direction to the chamber, wherein the first connecting aperture connects the first apertures to at least one first aperture extending from a sidewall side of the shower plate and the second connecting aperture connects the second apertures to at least one second aperture extending from the sidewall side.

Abstract: A numerical controller that detects occurrence of an abnormality according to a neighborhood method includes a sampling value acquisition unit configured to collect sampling values indicative of a state of a machine or environment, wherein the sampling values are collected during normal machining and during operation; a learning unit configured to generate a set of the sampling values during the normal machining; and an abnormality degree determination unit configured to compute an abnormality degree on the basis of a distance between the sampling value during the operation and the set of the sampling values during the normal machining.

Abstract: A numerical controller determines a consumption factor representing the degree to which a tool included in a machine tool consumes the life in association with machining conditions, and calculates a tool life (accumulated consumption life) consumed before each block based on the determined consumption factor and a tool usage for each block. If a command of a block read from a machining program is a tool change command, a tool having a tool life not ending before the next tool change command is selected among tools based on the accumulated consumption life.

Abstract: A control device includes a machine learning device that learns a state of a spindle during normal machining without a collision of the spindle, and the machine learning device includes a state observation unit that observes spindle estimated load torque data indicating an estimated load torque value for the spindle and spindle acceleration data indicating an acceleration value of the spindle as state variables representing a current state of an environment and a learning unit that learns a correlation between the estimated load torque values for the spindle and the acceleration values of the spindle during the normal machining with use of the state variables.

Abstract: A numerical control apparatus includes an API interface section that accepts invocation of an API function, an API control section that executes the process of the API function based on the invocation of the API function, and processing period estimation means for estimating if the execution of the API function is completed in a predetermined period, and the API control section does not execute but terminates the process of the API function when the processing period estimation means estimates that the execution of the API function will not be completed in the predetermined period.

Abstract: A numerical controller stores, as project data, input data including at least a machining program and a machining condition and output data indicative of the result of operation control of a machine based on the input data. Further, version management of the project data is performed by a data management unit. With respect to a plurality of versions, the data management unit displays, in response to an operator's request, the relationship between the content of modification of the input data between the plurality of versions of the project data and a change of the output data.

Abstract: A numerical controller having a machine abnormality history analysis support function includes drawing unit for generating a tool image based on CNC information in which operation state information of a machine tool at the time of detection of an abnormality by an abnormality detection unit is associated with information about the detected abnormality, and arranging and drawing the tool image in a coordinate space.

Abstract: A numerical control device includes an operation stop block designation unit configured to predict an executing block of a machining program at designated time, predicted to being executed at the designated time, based on machining time of each block of the machining program, and designate a stop block for the machining operation to be safely stopped, by searching from the executing block at the designated time in reverse order to the order to execute blocks of the machining program, and a program operation control unit configured to control to stop the machining operation at the stop block designated by the operation stop block designation unit.