Patents by Inventor Kazutaka Mashima

Kazutaka Mashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metal heater
    Publication number: 20060199135
    Abstract: The present invention aims to provide a metal heater that hardly causes dispersion in the temperature of a semiconductor wafer or the like upon heating, and heats it quickly without causing warping and sagging in its metal plate. The present invention provides a metal heater which includes metal plates and a heating element, wherein the number of said metal plates is a plural number, the heating element is sandwiched between the metal plates, and the thickness of a metal plate on a heating face side is the same as or larger than the thickness of a metal plate on a side opposite to said heating face side.
    Type: Application
    Filed: November 25, 2003
    Publication date: September 7, 2006
    Applicant: IBIDEN CO., LTD.
    Inventor: Kazutaka Mashima
  • Metal heater
    Publication number: 20060157472
    Abstract: The object of the present invention is to provide a metal heater capable of quickly heating a semiconductor wafer and the like with slight unevenness of temperature at the time of heating, and causing no warping or sagging in the metal plate employed therein. The metal heater of the present invention comprises a metal plate and a heating element, wherein the metal plate has a thickness of 50 mm or less and a surface flatness of 50 ?m or less, and an outer rim of a region where the heating element is formed is at a position within 25% of the diameter of the metal plate from an outer circumference of the metal plate.
    Type: Application
    Filed: August 20, 2003
    Publication date: July 20, 2006
    Inventors: Kazutaka Mashima, Yasuji Hiramatsu
  • Ceramic heater for semiconductor manufacturing/testing apparatus
    Patent number: 6897414
    Abstract: A ceramic beater for a semiconductor producing/examining device having a resistance heating element superior in adhesion to a substrate. The ceramic heater includes a ceramic substrate and a resistance heating element formed on the surface of the ceramic substrate. Further, irregularities are formed on the side face of the resistance heating element.
    Type: Grant
    Filed: July 3, 2001
    Date of Patent: May 24, 2005
    Assignee: Ibiden Co., Ltd.
    Inventors: Yasutaka Ito, Kazutaka Mashima
  • Ceramic heater for semiconductor manufacturing /testing apparatus
    Publication number: 20020190054
    Abstract: An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device having a resistance heating element superior in adhesion to a substrate, and the ceramic heater for a semiconductor producing/examining device of the present invention is a ceramic heater for a semiconductor producing/examining device including: a ceramic substrate; and a resistance heating element formed on the surface of the ceramic substrate, wherein irregularities are formed on the side face of the resistance heating element.
    Type: Application
    Filed: June 24, 2002
    Publication date: December 19, 2002
    Inventors: Yasutaka Ito, Kazutaka Mashima