Abstract: A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.

Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).

Abstract: A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.

Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

Abstract: A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.

Abstract: A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

Abstract: A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.

Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).

Abstract: A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A cleaning liquid discharge nozzle is positioned at the center of the impeller for spraying a cleaning liquid in the impeller. Also, a baffle member is spaced apart from and surrounds the impeller. A mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges on the baffle member. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller so as to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through a cylindrical wall thereof to discharge a cleaning liquid into the impeller.

Abstract: The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).

Abstract: A combustion type waste gas treatment method wherein waste gas discharged from an industrial product manufacturing process is introduced into combustion flames to thermally or oxidatively decompose a combustible component in the waste gas. Hydrogen gas and oxygen gas are generated by electrolysis of water and supplied as a gas for combustion to form the combustion flames. A pipe or a hole through which the combustion flames can be viewed directly is formed in a wall of the burner part upstream of the combustion flames. The combustion flames are detected with a UV sensor through the pipe or the hole.

Abstract: A waste gas treatment system has a primary cooling section provided at a stage subsequent to a decomposition treatment section in which a waste gas is subjected to decomposition treatment at high temperature. The primary cooling section has a liquid spray part for spraying a liquid on the treated gas from the decomposition treatment section. A secondary cooling section cools the treated gas sprayed with the liquid in the primary cooling section to reduce the volume of the treated gas. Further, a particle collecting section injects a liquid into the treated gas cooled in the secondary cooling section to collect fine particles contained in the treated gas.

Abstract: A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.

Abstract: A scrubber comprises a casing having an exhaust gas inlet and an exhaust gas outlet; an impeller mounted in the casing, and which is rotated about its own axis, an exhaust gas introduced into the center of the impeller through the exhaust gas inlet of the casing; a cleaning liquid discharge nozzle positioned at the center of the impeller to spray a cleaning liquid in the impeller; and, a baffle member spaced apart from and surrounding the impeller on which a mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through the cylindrical wall thereof to discharge a cleaning liquid into the impeller.

Abstract: A waste gas treatment system having a burner part and a combustion chamber provided at the downstream side of the burner part, wherein combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.

Abstract: A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous and combustible waste gas under heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion frames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.