Patents by Inventor Kazuya Koyama

Kazuya Koyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210335621
    Abstract: An etching method includes a first etching step, a processing step, and a second etching step. The first etching step is performed to etch a substrate on which a silicon oxide film and a silicon nitride film are formed with an etching liquid. The processing step is performed to process a pattern in the silicon oxide film on the substrate with a pattern shape processing liquid after the first etching step. The second etching step is performed to etch the substrate with the etching liquid after the processing step.
    Type: Application
    Filed: July 6, 2021
    Publication date: October 28, 2021
    Inventors: Tsukasa Hirayama, Takao Inada, Hironobu Hyakutake, Kazuya Koyama, Hisashi Kawano
  • Patent number: 11157778
    Abstract: A monitor target shooting information generation means (81) extracts, from each of a plurality of images, as information to be used for estimating the identify of a monitor target, monitor target identification information that is identification information of the monitor target, and the monitor target shooting information generation means (81) then generates multiple pieces of monitor target shooting information each including both the extracted monitor target identification information and a shooting time at which the monitor target was shot. An appearance history generation means (82) generates, from the generated multiple pieces of monitor target shooting information, an appearance history of the monitor target that has been estimated to be identical. A determination means (83) determines the monitor target the appearance history of which matches a specified rule.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: October 26, 2021
    Assignee: NEC CORPORATION
    Inventor: Kazuya Koyama
  • Patent number: 11138443
    Abstract: A guidance processing apparatus (100) includes an information acquisition unit (101) that acquires a plurality of different pieces of guidance information on the basis of states of a plurality of people within one or more images, and a control unit (102) that performs control of a plurality of target devices present in different spaces or time division control of a target device so as to set a plurality of different states corresponding to the plurality of pieces of guidance information.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: October 5, 2021
    Assignee: NEC CORPORATION
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Patent number: 11087992
    Abstract: An etching method includes a first etching step, a processing step, and a second etching step. The first etching step is performed to etch a substrate on which a silicon oxide film and a silicon nitride film are formed with an etching liquid. The processing step is performed to process a pattern in the silicon oxide film on the substrate with a pattern shape processing liquid after the first etching step. The second etching step is performed to etch the substrate with the etching liquid after the processing step.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: August 10, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Tsukasa Hirayama, Takao Inada, Hironobu Hyakutake, Kazuya Koyama, Hisashi Kawano
  • Patent number: 10998198
    Abstract: There is provided a substrate processing method for performing an etching processing by immersing a substrate in a processing liquid containing a chemical liquid and silicon, the substrate processing method including: a preparation step of setting a supply flow rate of the chemical liquid based on a replenishment amount of the chemical liquid and a replenishment amount of the silicon; and a replenishment step of supplying the chemical liquid at the set supply flow rate of the chemical liquid and dissolving a set replenishment amount of the silicon in the processing liquid.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: May 4, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Kazuya Koyama
  • Publication number: 20210104053
    Abstract: Provided is an image processing apparatus (2000) including an index value calculation unit (2020) and a presentation unit (2040). The index value calculation unit (2020) acquires a plurality of images captured by a camera (3000) (captured images), and calculates an index value indicating the degree of change in the state of a monitoring target in the captured image, using the acquired captured image. The presentation unit (2040) presents an indication based on the index value calculated by the index value calculation unit (2020) on the captured image captured by the camera (3000).
    Type: Application
    Filed: December 14, 2020
    Publication date: April 8, 2021
    Inventors: Ryoma OAMI, Hiroyoshi MIYANO, Yusuke TAKAHASHI, Hiroo IKEDA, Yukie EBIYAMA, Ryo KAWAI, Takuya OGAWA, Kazuya KOYAMA, Hiroshi Yamada
  • Patent number: 10909697
    Abstract: Provided is an image processing apparatus (2000) including an index value calculation unit (2020) and a presentation unit (2040). The index value calculation unit (2020) acquires a plurality of images captured by a camera (3000) (captured images), and calculates an index value indicating the degree of change in the state of a monitoring target in the captured image, using the acquired captured image. The presentation unit (2040) presents an indication based on the index value calculated by the index value calculation unit (2020) on the captured image captured by the camera (3000).
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: February 2, 2021
    Assignee: NEC Corporation
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Patent number: 10878252
    Abstract: A guidance processing apparatus (100) includes an information acquisition unit (101) that acquires a plurality of different pieces of guidance information on the basis of states of a plurality of people within one or more images, and a control unit (102) that performs control of a plurality of target devices present in different spaces or time division control of a target device so as to set a plurality of different states corresponding to the plurality of pieces of guidance information.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: December 29, 2020
    Assignee: NEC Corporation
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Publication number: 20200356784
    Abstract: A state acquisition unit (2020) acquires a state of a monitoring target in a captured image captured by a camera (3040). A monitoring point acquisition unit (2040) acquires, from a monitoring point information storage unit (3020), a monitoring point corresponding to the state of the monitoring target acquired by the state acquisition unit (2020). The monitoring point indicates a position to be monitored in the captured image. A presentation unit (2060) presents the monitoring point on the captured image.
    Type: Application
    Filed: May 20, 2020
    Publication date: November 12, 2020
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Publication number: 20200286751
    Abstract: A substrate processing apparatus includes a liquid processing tank, a movement mechanism, an ejector, and a controller. The liquid processing tank stores a processing liquid. The movement mechanism moves a plurality of substrates immersed in the liquid processing tank to above the liquid surface of the processing liquid. The ejector ejects a vapor of an organic solvent toward portions of the plurality of substrates exposed from the liquid surfaces. The controller moves up the ejection position of the vapor of the organic solvent by the ejection unit as the plurality of substrates are moved up.
    Type: Application
    Filed: February 28, 2020
    Publication date: September 10, 2020
    Inventors: Kazuya Koyama, Kotaro Tsurusaki, Koji Yamashita
  • Publication number: 20200286754
    Abstract: A substrate processing apparatus includes a liquid processing tank, a movement mechanism, an ejector, and a controller. The liquid processing tank stores a processing liquid. The movement mechanism moves a plurality of substrates immersed in the liquid processing tank to a position above the liquid surface of the processing liquid. The ejector ejects a vapor of an organic solvent toward portions of the plurality of substrates that are exposed from the liquid surface. The controller changes an ejection flow rate of the vapor ejected by the ejector as the plurality of substrates are moved up.
    Type: Application
    Filed: March 2, 2020
    Publication date: September 10, 2020
    Inventors: Kotaro Tsurusaki, Koji Yamashita, Kazuya Koyama, Kouzou Kanagawa
  • Publication number: 20200251343
    Abstract: An etching method includes a first etching step, a processing step, and a second etching step. The first etching step is performed to etch a substrate on which a silicon oxide film and a silicon nitride film are formed with an etching liquid. The processing step is performed to process a pattern in the silicon oxide film on the substrate with a pattern shape processing liquid after the first etching step. The second etching step is performed to etch the substrate with the etching liquid after the processing step.
    Type: Application
    Filed: January 31, 2020
    Publication date: August 6, 2020
    Inventors: Tsukasa Hirayama, Takao Inada, Hironobu Hyakutake, Kazuya Koyama, Hisashi Kawano
  • Publication number: 20200211865
    Abstract: A substrate processing apparatus includes: a processing tank that stores a processing liquid for performing a liquid processing on a plurality of substrates; a substrate support that supports the plurality of substrates such that main surfaces of each of the plurality of substrates follow a vertical direction in the processing tank; a processing liquid ejection unit provided below the plurality of substrates supported by the substrate support, and generates an ascending flow of the processing liquid in the processing tank; and a rectifying section that adjusts flow of the processing liquid in a side space formed between a first side wall of the processing tank and a first substrate having a main surface facing the first side wall of the processing tank among the plurality of substrates.
    Type: Application
    Filed: December 26, 2019
    Publication date: July 2, 2020
    Inventors: Takahiko Otsu, Kazuya Koyama, Takao Inada
  • Patent number: 10699130
    Abstract: A state acquisition unit (2020) acquires a state of a monitoring target in a captured image captured by a camera (3040). A monitoring point acquisition unit (2040) acquires, from a monitoring point information storage unit (3020), a monitoring point corresponding to the state of the monitoring target acquired by the state acquisition unit (2020). The monitoring point indicates a position to be monitored in the captured image. A presentation unit (2060) presents the monitoring point on the captured image.
    Type: Grant
    Filed: June 1, 2015
    Date of Patent: June 30, 2020
    Assignee: NEC Corporation
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Patent number: 10628684
    Abstract: A state acquisition unit (2020) acquires a state of a monitoring target in a captured image captured by a camera (3040). A monitoring point acquisition unit (2040) acquires, from a monitoring point information storage unit (3020), a monitoring point corresponding to the state of the monitoring target acquired by the state acquisition unit (2020). The monitoring point indicates a position to be monitored in the captured image. A presentation unit (2060) presents the monitoring point on the captured image.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: April 21, 2020
    Assignee: NEC Corporation
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Patent number: 10628685
    Abstract: A state acquisition unit (2020) acquires a state of a monitoring target in a captured image captured by a camera (3040). A monitoring point acquisition unit (2040) acquires, from a monitoring point information storage unit (3020), a monitoring point corresponding to the state of the monitoring target acquired by the state acquisition unit (2020). The monitoring point indicates a position to be monitored in the captured image. A presentation unit (2060) presents the monitoring point on the captured image.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: April 21, 2020
    Assignee: NEC Corporation
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Patent number: 10614317
    Abstract: A state acquisition unit (2020) acquires a state of a monitoring target in a captured image captured by a camera (3040). A monitoring point acquisition unit (2040) acquires, from a monitoring point information storage unit (3020), a monitoring point corresponding to the state of the monitoring target acquired by the state acquisition unit (2020). The monitoring point indicates a position to be monitored in the captured image. A presentation unit (2060) presents the monitoring point on the captured image.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: April 7, 2020
    Assignee: NEC Corporation
    Inventors: Ryoma Oami, Hiroyoshi Miyano, Yusuke Takahashi, Hiroo Ikeda, Yukie Ebiyama, Ryo Kawai, Takuya Ogawa, Kazuya Koyama, Hiroshi Yamada
  • Patent number: 10552713
    Abstract: A monitor target shooting information generation unit extracts, from each of a plurality of images, as information to be used for estimating the identify of a monitor target, monitor target identification information that is identification information of the monitor target, and the monitor target shooting information generation unit then generates multiple pieces of monitor target shooting information each including both the extracted monitor target identification information and a shooting time at which the monitor target was shot. An appearance history generation unit generates, from the generated multiple pieces of monitor target shooting information, an appearance history of the monitor target that has been estimated to be identical. A determination unit determines the monitor target the appearance history of which matches a specified rule.
    Type: Grant
    Filed: February 5, 2015
    Date of Patent: February 4, 2020
    Assignee: NEC Corporation
    Inventor: Kazuya Koyama
  • Publication number: 20200012878
    Abstract: Provided is an image recognition system that can easily perform image recognition on a side face of an item. An image recognition system according to one example embodiment of the present invention includes: a placement stage used for placing an item below an image capture device provided so as to perform capturing of a downward direction; a support structure configured to support the item at a predetermined angle relative to a top face of the placement stage; and an image recognition apparatus that identifies the item by performing image recognition on an image of the item acquired by the image capture device.
    Type: Application
    Filed: February 8, 2018
    Publication date: January 9, 2020
    Applicant: NEC CORPORATION
    Inventors: Ryoma IIO, Kota IWAMOTO, Hideo YOKOI, Ryo TAKATA, Kazuya KOYAMA
  • Publication number: 20190347528
    Abstract: A monitor target shooting information generation means (81) extracts, from each of a plurality of images, as information to be used for estimating the identify of a monitor target, monitor target identification information that is identification information of the monitor target, and the monitor target shooting information generation means (81) then generates multiple pieces of monitor target shooting information each including both the extracted monitor target identification information and a shooting time at which the monitor target was shot. An appearance history generation means (82) generates, from the generated multiple pieces of monitor target shooting information, an appearance history of the monitor target that has been estimated to be identical. A determination means (83) determines the monitor target the appearance history of which matches a specified rule.
    Type: Application
    Filed: July 26, 2019
    Publication date: November 14, 2019
    Inventor: Kazuya KOYAMA