Patents by Inventor Kazuyoshi Haino

Kazuyoshi Haino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Graphite electrode for steelmaking
    Publication number: 20060193364
    Abstract: The present invention provides a graphite electrode for an electric arc furnace used for steelmaking which can effectively suppress oxidation and consumption of the graphite electrode used for an electric steelmaking furnace during the operation and reduce the electrode consumption rate. The graphite electrode is used for an electric steelmaking furnace which is operated while cooling the graphite electrode which protrudes upward from the furnace roof by spraying a cooling liquid onto the surface of the graphite electrode, wherein an uneven surface structure is formed on the surface of the graphite electrode.
    Type: Application
    Filed: April 30, 2003
    Publication date: August 31, 2006
    Inventors: Chizuhiro Shiraishi, Kazuyoshi Haino, Masakatsu Tsuchiya
  • Inner wall protection member for chamber and plasma procressing apparatus
    Publication number: 20030015287
    Abstract: An inner wall protection member used to protect the inner wall of a chamber of a plasma treatment apparatus which can be used stably for a long period of time by specifying properties of glass-like carbon materials, and a plasma treatment apparatus provided with the protection member. The hollow protection member for protecting the inner wall of a plasma processing chamber is integrally formed of glass-like carbon materials with a volume resistivity of 1×10−2 &OHgr;·cm or less and a thermal conductivity of 5W/m·K or more The protection member preferably has a thickness of 4 mm or more and the average surface roughness (Ra) of the inside of the hollow structure is preferably 2.0 &mgr;m or less.
    Type: Application
    Filed: March 7, 2002
    Publication date: January 23, 2003
    Applicant: TOKAI CARBON COMPANY, LTD.
    Inventors: Kazuyoshi Haino, Koichi Kazama
  • Protective member for inner surface of chamber and plasma processing apparatus
    Patent number: 6383333
    Abstract: An inner wall protection member used to protect the inner wall of a chamber of a plasma treatment apparatus which can be used stably for a long period of time by specifying properties of glass-like carbon materials, and a plasma treatment apparatus provided with the protection member. The hollow protection member for protecting the inner wall of a plasma processing chamber is integrally formed of glass-like carbon materials with a volume resistivity of 1×10−2 &OHgr;·cm or less and a thermal conductivity of 5 W/m·K or more. The protection member preferably has a thickness of 4 mm or more and the average surface roughness (Ra) of the inside of the hollow structure is preferably 2.0 &mgr;m or less.
    Type: Grant
    Filed: October 23, 2000
    Date of Patent: May 7, 2002
    Assignees: Tokai Carbon Company, Ltd., Tokyo Electron Ltd.
    Inventors: Kazuyoshi Haino, Koichi Kazama