Abstract: A resonator device includes a base including a fixed section and a movable section connected to the fixed section, a resonator element including a first base section, a second base section, and a vibration arm, one end of which is connected to the first base section and the other end of which is connected to the second base section, the first base section being fixed to the fixed section and the second base section being fixed to the movable section, a weight section connected onto the movable section, and a stress relaxing section provided between a connection region of the weight section and the vibration arm.

Abstract: A physical quantity detection device includes: a base portion; a movable portion supported by the base portion via a joint and shifting in accordance with a change of a physical quantity; a physical quantity detection element extending over the base portion and the movable portion; a first support member extending from the base portion and having a first fixing portion; and a second support member extending from the base portion and having a second fixing portion. The distance between the first fixing portion and the second fixing portion is shorter than the distance between the root of the first support member at the junction with the base portion and the root of the second support member at the junction with the base portion.

Abstract: A resonator device includes a base including a fixed section and a movable section connected to the fixed section, a resonator element including a first base section, a second base section, and a vibration arm, one end of which is connected to the first base section and the other end of which is connected to the second base section, the first base section being fixed to the fixed section and the second base section being fixed to the movable section, a weight section connected onto the movable section, and a stress relaxing section provided between a connection region of the weight section and the vibration arm.

Abstract: A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Abstract: An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Abstract: A physical quantity detecting device includes a metal block (a holding section) having six surfaces, inclination detectors (physical quantity detectors) respectively arranged on selected three surfaces among the six surfaces, an electronic component electrically connected to the inclination detectors, and a heat insulating material (a heat-conduction reducing section) present between the metal block and the electronic component and having thermal conductivity smaller than the thermal conductivity of the metal block.

Abstract: An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.

Abstract: An acceleration detector includes: a plate-like flexible portion which has piezoelectricity and can flex by an inertial force (base portion, joint portion, moving portion); an acceleration detection element loaded on a main surface of the base portion and the moving portion; an electrically conductive mass portion loaded on the moving portion; and a package accommodating the base portion, the joint portion, the moving portion, the acceleration detection element and the mass portion. The acceleration detection element is provided with wirings through which detected acceleration is taken out as an electrical signal, and the mass portion can be maintained at a desired electric potential.

Abstract: A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Abstract: An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Abstract: An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.

Abstract: An acceleration sensor includes a piezoelectric sensor and a support plate including a first support surface and a second support surface for supporting the piezoelectric sensor, wherein the support plate includes a first plate piece, a second plate piece, and a hinge portion connecting opposite side edges of the first plate piece and the second plate piece, wherein the piezoelectric sensor element has a longitudinal shape extending in a direction perpendicular to the sensing axis direction and is separated from the support surfaces in the longitudinal direction of the hinge portion so that the center of the sensor element in the lateral direction is located within the width of the hinge portion in the lateral direction.

Abstract: A wavelength splitting element for splitting a multiplexed light beam into separate wavelength bands and emitting the beams from separate emission ports including a first filter for splitting the multiplexed light beam into light beams in wavelength band ?1, which passes in a first direction, and wavelength bands ?2 and ?3, which reflects; a second filter, for splitting the reflected light into light beams in wavelength band ?3, which passes in a second direction, and wavelength band ?2, which reflects in a third direction; and a third filter, for passing the light beam in the wavelength band ?2. The first filter passes the light beam in the wavelength band ?2 reflected by the second filter and incident to the first filter again based on an incident angle, and the third filter passes only the light beam in the wavelength band ?2 that the first filter passes in the third direction.

Abstract: A wavelength splitting element for splitting a multiplexed light beam in wavelength bands ?1, ?2 and ?3 into light beams in separate wavelength bands and emitting the split light beams from separate emission ports, includes: a first filter for splitting the multiplexed light beam in the wavelength bands ?1, ?2 and ?3 into a light beam in the wavelength band ?1 that the first filter passes in a first direction and into a light beam in the wavelength bands ?2 and ?3 that the first filter reflects; a second filter, which is provided in the direction of the light beam in the wavelength bands ?2 and ?3 that has been reflected by the first filter, for splitting the light beam in wavelength bands ?2 and ?3 that has been reflected by the first filter into a light beam in the wavelength band ?3 that the second filter passes in a second direction and into a light beam in the wavelength band ?2 that the second filter reflects; and a third filter, which is provided in the direction of the light beam that has been reflect