Patents by Inventor Kazuyuki Ogawa
Kazuyuki Ogawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20090253353Abstract: It is an object of the invention to provide a polishing pad capable of high precision optical detection of an endpoint during polishing in progress and prevention of slurry leakage from between a polishing region and a light-transmitting region during the use thereof even after the polishing pad has been used for a long period. It is a second object of the invention to provide a polishing pad capable of suppression of deterioration of polishing characteristics (such as in-plane uniformity) and generation of scratches due to a difference in behavior of a polishing region and a light-transmitting region during polishing. It is a third object of the invention to provide a polishing pad having a polishing region and a light-transmitting region with a concentration of a specific metal equal to or lower than a specific value (threshold value).Type: ApplicationFiled: December 8, 2005Publication date: October 8, 2009Applicant: TOYO TIRE & RUBBER CO., LTDInventors: Kazuyuki Ogawa, Tetsuo Shimomura, Atsushi Kazuno, Yoshiyuki Nakai, Masahiro Watanabe, Takatoshi Yamada, Masahiko Nakamori
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Publication number: 20090104850Abstract: An object of the present invention is to provide a polishing pad excellent in polishing rate and superior in longevity without generating center slow. Another object of the present invention is to provide a method of manufacturing a semiconductor device with the polishing pad. Disclosed is a polishing pad having a polishing layer consisting of a polyurethane foam having fine cells, wherein a high-molecular-weight polyol component that is a starting component of the polyurethane foam contains a hydrophobic high-molecular-weight polyol A having a number-average molecular weight of 550 to 800 and a hydrophobic high-molecular-weight polyol B having a number-average molecular weight of 950 to 1300 in an A/B ratio of from 10/90 to 50/50 by weight.Type: ApplicationFiled: August 22, 2006Publication date: April 23, 2009Applicant: TOYO TIRE & RUBBER CO., LTD.Inventors: Kazuyuki Ogawa, Tetsuo Shimomura, Yoshiyuki Nakai, Masahiko Nakamori, Takatoshi Yamada
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Publication number: 20090093201Abstract: An object of the invention is to provide a polishing pad which hardly generates a scratch on a surface of a polishing object, and is excellent in planarization property. In addition, an object of the invention is to provide a polishing pad which has a high polishing rate and is excellent in planarization property. In addition, an object of the invention is to provide a polishing pad in which a groove is scarcely clogged with abrasive grains or polishing swarf during polishing and, even when continuously used for a long period of time, a polishing rate is scarcely reduced.Type: ApplicationFiled: May 10, 2006Publication date: April 9, 2009Inventors: Atsushi Kazuno, Kazuyuki Ogawa, Masahiko Nakamori, Takatoshi Yamada, Tetsuo Shimomura
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Patent number: 7488236Abstract: The invention provides a polishing pad by which optical materials such as lenses, reflecting mirrors etc., or materials requiring a high degree of surface planarity, as in the polishing of silicone wafers, glass substrates or aluminum substrates for hard disks, or general metal polishing, can be flattened with stability and high polishing efficiency. The invention also provides a polishing pad for semiconductor wafers, which is superior in planarizing characteristic, is free from scratches and can be produced at low cost. There is provided a polishing pad which is free from dechucking error so that neither damage to wafers nor decrease in operating efficiency occurs. There is provided a polishing pad which is satisfactory in planarity, within wafer uniformity, and polishing rate and produces less change in polishing rate. There is provided a polishing pad which can make planarity improvement and scratch decrease compatible.Type: GrantFiled: August 24, 2006Date of Patent: February 10, 2009Assignee: Toyo Tire & Rubber Co., Ltd.Inventors: Tetsuo Shimomura, Masahiko Nakamori, Takatoshi Yamada, Shigeru Komai, Koichi Ono, Kazuyuki Ogawa, Atsushi Kazuno, Tsuyoshi Kimura
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Patent number: 7470170Abstract: The present invention provides a polishing pad which imparts excellent planarity and uniformity thereof to a material to be polished, such as a semiconductor wafer, without forming scratches. The present invention relates to a semiconductor wafer polishing pad comprising a polishing layer and a cushion layer, wherein the polishing layer is formed from foamed polyurethane, has a flexural modulus of 250 to 350 MPa, the cushion layer is formed from closed-cell foam and has a thickness of 0.5 to 1.0 mm and a strain constant of 0.01 to 0.08 ?m/(gf/cm2).Type: GrantFiled: February 22, 2005Date of Patent: December 30, 2008Assignee: Toyo Tire & Rubber Co., Ltd.Inventors: Tetsuo Shimomura, Atsushi Kazuno, Kazuyuki Ogawa, Yoshiyuki Nakai, Masahiko Nakamori, Takatoshi Yamada
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Patent number: 7378454Abstract: A polyurethane composition containing solid beads dispersed therein, is formed of a microcellular polyurethane foam, and the composition has a storage modulus of elasticity at 40° C. of 270 MPa or more as measured by means of a dynamic elasticity measuring device. Another polyurethane composition of this invention contains solid beads dispersed therein, that are capable of swelling with or are soluble in an aqueous medium. The former composition has excellent flattening capability, and the latter composition can provide a polished surface which combines good flatness and good uniformity and can also reduce scratches on the surface.Type: GrantFiled: April 4, 2002Date of Patent: May 27, 2008Assignee: Toyo Tire & Rubber Co., Ltd.Inventors: Takashi Masui, Masahiko Nakamori, Takatoshi Yamada, Koichi Ono, Kazuyuki Ogawa, Atsushi Kazuno, Hiroshi Seyanagi
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Publication number: 20080085943Abstract: A method for manufacturing a polishing pad made from a polyurethane resin foam having very uniform, fine cells therein and a polishing pad obtained by that method provides a polishing pad having better polishing characteristics (especially, in planarization) while providing improved dressability while maintaining the planarization characteristics and polishing speed of a conventional polishing pad. The polyurethane resin foam is a cured product obtained by reacting an isocyanate-terminated prepolymer with an aromatic polyamine chain extender having a melting point of 70° C. or lower, for example.Type: ApplicationFiled: February 27, 2006Publication date: April 10, 2008Applicant: Toyo Tire & Rubber Co., Ltd.Inventors: Masato Doura, Takeshi Fukuda, Kazuyuki Ogawa, Atsushi Kazuno, Hiroshi Seyanagi, Masahiko Nakamori, Takatoshi Yamada, Tetsuo Shimomura
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Patent number: 7263274Abstract: A recording medium cartridge includes a memory circuit for storing information concerning signals recorded on the recording medium within the cartridge. The information is stored in the memory circuit in the form of a hierarchic data structure which includes a plurality of data packets having a predetermined form and length. Each data packet includes a code indicative of a level in the data structure to which the data packet belongs. At least some of the data packets include data indicative of starting and ending positions on the recording medium of recorded signals which the data packet represents. The hierarchic (or “tree”) data structure facilitates rapid retrieval and reproduction of the signals recorded on the recording medium, particularly when the recording medium is a magnetic tape. The tree structure also facilitates storage of information in connection with recording of additional signals on the recording medium.Type: GrantFiled: March 30, 2005Date of Patent: August 28, 2007Assignee: Sony CorporationInventors: Teruhiko Kori, Harumi Kawamura, Hisato Shima, Kazuyuki Ogawa
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Patent number: 7263273Abstract: A recording medium cartridge includes a memory circuit for storing information concerning signals recorded on the recording medium within the cartridge. The information is stored in the memory circuit in the form of a hierarchic data structure which includes a plurality of data packets having a predetermined form and length. Each data packet includes a code indicative of a level in the data structure to which the data packet belongs. At least some of the data packets include data indicative of starting and ending positions on the recording medium of recorded signals which the data packet represents. The hierarchic (or “tree”) data structure facilitates rapid retrieval and reproduction of the signals recorded on the recording medium, particularly when the recording medium is a magnetic tape. The tree structure also facilitates storage of information in connection with recording of additional signals on the recording medium.Type: GrantFiled: March 29, 2005Date of Patent: August 28, 2007Assignee: Sony CorporationInventors: Teruhiko Kori, Harumi Kawamura, Hisato Shima, Kazuyuki Ogawa
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Patent number: 7259782Abstract: Communicating apparatus to be provided between an intermediate line and transmission lines to establish data communications, the intermediate line and the transmission lines having in combination data pass therethrough, the transmission lines including first line and second line 1 and 2, is designed to select the transmission line from among the first and second lines 1 and 2 based on detecting the data passing through each of the first and second lines 1 and 2 so as to transmit data without collision.Type: GrantFiled: November 29, 2001Date of Patent: August 21, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuyuki Ogawa, Masahiro Muramatsu
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Publication number: 20070190905Abstract: The object of the invention is to provide a polishing pad capable of maintaining high-precision end-point optical detection over a long period from the start of use to the end of use even if polishing is performed with an alkaline or acid slurry, as well as a method of manufacturing a semiconductor device with this polishing pad. The polishing pad of the invention is used in chemical mechanical polishing and has a polishing region and a light-transmitting region, wherein the light-transmitting region satisfies that the difference ?T (?T=T0?T1) (%) between T0 and T1 is within 10(%) over the whole range of measurement wavelengths of from 400 to 700 nm, wherein T1 is the light transmittance (%) of the light-transmitting region measured at the measurement wavelength ? after dipping for 24 hours in a KOH aqueous solution at pH 11 or an H2O2 aqueous solution at pH 4 and T0 is the light-transmittance (%) measured at the measurement wavelength ? before the dipping.Type: ApplicationFiled: October 20, 2004Publication date: August 16, 2007Inventors: Tetsuo Shimomura, Masahiko Nakamori, Takatoshi Yamada, Kazuyuki Ogawa, Atsushi Kazuno, Masahiro Watanabe
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Publication number: 20070178812Abstract: The present invention provides a polishing pad which imparts excellent planarity and uniformity thereof to a material to be polished, such as a semiconductor wafer, without forming scratches. The present invention relates to a semiconductor wafer polishing pad comprising a polishing layer and a cushion layer, wherein the polishing layer is formed from foamed polyurethane, has a flexural modulus of 250 to 350 MPa, the cushion layer is formed from closed-cell foam and has a thickness of 0.5 to 1.0 mm and a strain constant of 0.01 to 0.08 ?m/(gf/cm2).Type: ApplicationFiled: February 22, 2005Publication date: August 2, 2007Applicant: TOYO TIRE & RUBBER CO., LTD.Inventors: Tetsuo Shimomura, Atsushi Kazuno, Kazuyuki Ogawa, Yoshiyukii Nakai, Masahiko Nakamori, Takatoshi Yamada
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Publication number: 20070085858Abstract: An information processing apparatus and method and program allows a user to efficiently and quickly select predetermined content such as content to play and content to purchase. When it is instructed to turn on power, key information and additional information stored in a key/additional information storing unit is read. The read key information and additional information is transmitted to an Internet server and a home server, and it is requested to perform a content search based on the key information and additional information. Information representing search results is acquired by a display data generating unit, and a screen based on display data generated from the search results is displayed on a display. A user selects predetermined content from a list displayed on the display to view it. The present invention is applicable to an information processing apparatus such as a personal computer and various home electronic appliances capable of playing content.Type: ApplicationFiled: February 5, 2004Publication date: April 19, 2007Inventors: Yuuji Takimoto, Kazuyuki Ogawa
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Publication number: 20060280929Abstract: The invention provides a polishing pad by which optical materials such as lenses, reflecting mirrors etc., or materials requiring a high degree of surface planarity, as in the polishing of silicone wafers, glass substrates or aluminum substrates for hard disks, or general metal polishing, can be flattened with stability and high polishing efficiency. The invention also provides a polishing pad for semiconductor wafers, which is superior in planarizing characteristic, is free from scratches and can be produced at low cost. There is provided a polishing pad which is free from dechucking error so that neither damage to wafers nor decrease in operating efficiency occurs. There is provided a polishing pad which is satisfactory in planarity, within wafer uniformity, and polishing rate and produces less change in polishing rate. There is provided a polishing pad which can make planarity improvement and scratch decrease compatible.Type: ApplicationFiled: August 24, 2006Publication date: December 14, 2006Inventors: Tetsuo SHIMOMURA, Masahiko NAKAMORI, Takatoshi YAMADA, Takashi MASUI, Shigeru KOMAI, Koichi ONO, Kazuyuki OGAWA, Atsushi KAZUNO, Tsuyoshi KIMURA, Hiroshi SEYANAGI
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Publication number: 20060280930Abstract: The invention provides a polishing pad by which optical materials such as lenses, reflecting mirrors etc., or materials requiring a high degree of surface planarity, as in the polishing of silicone wafers, glass substrates or aluminum substrates for hard disks, or general metal polishing, can be flattened with stability and high polishing efficiency. The invention also provides a polishing pad for semiconductor wafers, which is superior in planarizing characteristic, is free from scratches and can be produced at low cost. There is provided a polishing pad which is free from dechucking error so that neither damage to wafers nor decrease in operating efficiency occurs. There is provided a polishing pad which is satisfactory in planarity, within wafer uniformity, and polishing rate and produces less change in polishing rate. There is provided a polishing pad which can make planarity improvement and scratch decrease compatible.Type: ApplicationFiled: August 24, 2006Publication date: December 14, 2006Inventors: Tetsuo SHIMOMURA, Masahiko NAKAMORI, Takatoshi YAMADA, Takashi Masui, Shigeru KOMAI, Koichi ONO, Kazuyuki OGAWA, Atsushi KAZUNO, Tsuyoshi KIMURA, Hiroshi Seyanagi
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Patent number: 7098255Abstract: A process for producing a finely cellular polyurethane foam by mixing a first ingredient comprising an isocyanate compound and a second ingredient comprising a compound containing an active hydrogen group, characterized by comprising adding a nonionic silicone surfactant containing no hydroxyl group to at least one of the first ingredient and the second ingredient in an amount of 0.1 to 5 wt %, excluding 5 wt %, based on the total amount of the first ingredient and the second ingredient, subsequently agitating the surfactant containing ingredient together with an unreactive gas, which has no reactivity to isocyanate group or active hydrogen group, to disperse the unreactive gas as fine bubbles to prepare a bubble dispersion and then mixing the bubble dispersion with the remaining ingredient to cure the resultant mixture and forming finely cellular structure into the resultant polyurethane foam by the fine bubbles of the bubble dispersion.Type: GrantFiled: June 30, 2004Date of Patent: August 29, 2006Assignee: Toyo Tire & Rubber Co., Ltd.Inventors: Hiroshi Seyanagi, Kaoru Inoue, Kazuyuki Ogawa, Takashi Masui, Koichi Ono
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Publication number: 20060161742Abstract: A communications system and method, an information processing apparatus and method, an information management apparatus and method, a recording medium and a program make it possible to efficiently and comfortably make use of contents, which are stored in one server, from a plurality of devices connected via a network. In a case in which the playing of content is stopped, bookmark information including a time stamp representing the stopped position of the content is stored in association with predetermined identification information. The bookmark information is available for various apparatuses transmitting the identification information. When playing the content from a position designated by the information from a predetermined apparatus, the time stamp included in the bookmark information is referred to and the playing of the content from the stopped position is started.Type: ApplicationFiled: December 8, 2003Publication date: July 20, 2006Applicant: SOny CorporationInventors: Kayo Sugimoto, Kazuyuki Ogawa, Yuji Takimoto, Makoto Sato
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Publication number: 20060037699Abstract: A polishing pad enabling a highly precise optical endpoint sensing during the polishing process and thus having excellent polishing characteristics (such as surface uniformity and in-plane uniformity) is disclosed. A polishing pad enabling to obtain the polishing profile of a large area of a wafer is also disclosed. A polishing pad of a first invention comprises a light-transmitting region having a transmittance of not less than 50% over the wavelength range of 400 to 700 nm. A polishing pad of a second invention comprises a light-transmitting region having a thickness of 0.5 to 4 mm and a transmittance of not less than 80% over the wavelength range of 600 to 700 nm. A polishing pad of a third invention comprises a light-transmitting region arranged between the central portion and the peripheral portion of the polishing pad and having a length (D) in the diametrical direction which is three times or more longer than the length (L) in the circumferential direction.Type: ApplicationFiled: November 27, 2003Publication date: February 23, 2006Inventors: Masahiko Nakamori, Tetsuo Shimomura, Takatoshi Yamada, Kazuyuki Ogawa, Atsushi Kazuno, Kimihiro Watanabe
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Publication number: 20050236077Abstract: The present invention provides a thermomechanical treatment means for a Fe—Mn—Si-based shape memory alloy having specified components with Nb, C addition with simple deformation prior to aging. Such deformation treatment prior to aging is carried out in the inventions of the prior applications in a temperature range of from 500° C. to 800° C. According to the present invention, however, the deformation treatment prior to the aging treatment can be successfully carried out not at high temperature but at room temperature, if the deformation ratio is in a specified range. The technical meaning of the present invention must be clearly understood as compared to the prior art and the inventions of the prior applications because the present invention allows the treatment at room temperature while the others require troublesome treatment at high temperature so that there is significant difference therebetween.Type: ApplicationFiled: December 17, 2003Publication date: October 27, 2005Applicant: National Institute for Materials ScienceInventors: Takehiko Kikuchi, Setsuo Kajiwara, Alberto Baruj, Kazuyuki Ogawa, Norio Shinya
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Publication number: 20050239699Abstract: According to the present invention, there is provided a remedy for infections containing 15K granulysin as an active ingredient, which has no perceived side effect, and is effective.Type: ApplicationFiled: August 17, 2004Publication date: October 27, 2005Inventors: Masaji Okada, Yasushi Takamori, Kazuyuki Ogawa, Kinya Nagata