Abstract: According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image including the partition, which is generated by emitting electromagnetic waves from the first surface side of the base or a second surface side opposed to the first surface of the base, analyzing the acquired first image, and measuring an amount of protrusion at which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.

Abstract: An apparatus and a method for surface treatment of substrates whereby the quality of substrates can be maintained by preventing excessive plasma treatment of substrates. In carrying out the plasma treatment on a surface of the substrate in a reaction chamber, there are provided an emission spectroscopic analysis device or a mass analyzer, and a controller, so that the energy of ions in plasma is controlled to decrease when, e.g., bromine included in the substrate is detected, and the surface treatment to the substrate is controlled to stop when the removal of impurities of the substrate is detected to end. The bromine once separated from the substrate is prevented from adhering again to the substrate and corroding the substrate. Moreover, ions are prevented from being excessively irradiated to the substrate when the removal of impurities ends, thereby reducing damage to the substrate.

Abstract: In a board cleaning method for dry cleaning of connection sites on resin-based boards, one or more gases selected from a group consisting of gas that contains a hydrogen element and gas that contains a fluorine element are supplied at least to the connection sites, plasma is generated from the supplied gas, and the boards are cleaned by radicals and ions that are produced by the generated plasma.

Abstract: An apparatus and a method for surface treatment of substrates whereby the quality of substrates can be maintained by preventing excessive plasma treatment of substrates. In carrying out the plasma treatment on a surface of the substrate in a reaction chamber, there are provided an emission spectroscopic analysis device or a mass analyzer, and a controller, so that the energy of ions in plasma is controlled to decrease when, e.g., bromine included in the substrate is detected, and the surface treatment to the substrate is controlled to stop when the removal of impurities of the substrate is detected to end. The bromine once separated from the substrate is prevented from adhering again to the substrate and corroding the substrate. Moreover, ions are prevented from being excessively irradiated to the substrate when the removal of impurities ends, thereby reducing damage to the substrate.

Abstract: In a board cleaning method for dry cleaning of connection sites on resin-based boards, one or more gases selected from a group consisting of gas that contains hydrogen element and gas that contains fluorine element are supplied at least to the connection sites, plasma is generated in the supplied gas, and the boards are cleaned by radicals and ions that are produced by the generated plasma.

Abstract: An oxygen absorbent composition absorbing water vapor mixed a liquid mixed (A) an aliphatic compound(s) with an unsaturated group(s) and (B) a transition metal salt(s) with (C) at least one solid selected from the group consisting of calcium oxide, calcium chloride and magnesium chloride.

Abstract: The present invention provides an apparatus and a method for surface treatment to substrates whereby the quality of substrates can be maintained by preventing an excessive plasma treatment to substrates. In carrying out the plasma treatment to a surface of the substrate in a reaction chamber, there are provided an emission spectroscopic analysis device or a mass analyzer, and a controller, so that an energy of ions in plasma is controlled to decrease when, e.g., bromine included in the substrate is detected, and the surface treatment to the substrate is controlled to stop when removing impurities of the substrate is detected to end. The bromine once separated from the substrate is prevented from adhering again to the substrate to corrode the substrate. Moreover, ions are prevented from being excessively irradiated to the substrate when the removal of impurities ends, thereby reducing damages to the substrate. The substrate quality is maintained accordingly.

Abstract: An oxygen absorbent composition absorbing water vapor mixed a liquid mixed (A) an aliphatic compound(s) with an unsaturated group(s) and (B) a transition metal salt(s) with (C) at least one solid selected from the group consisting of calcium oxide, calcium chloride and magnesium chloride.

Abstract: An oxygen absorbent comprising an aliphatic hydrocarbon(s) with an unsaturated group(s) and/or an unsaturated fatty acid compound(s) and a catalyst containing both a transition metal salt(s) and a non-transition metal salt(s) is provided, whereby an oxygen absorbing velocity is remarkedly promoted.

Abstract: The present invention is directed to a benzoic acid derivative methyl 3-formyl-4-methanesulfonyl-2-methylbenzoate. The compound is useful as a starting material for herbicide manufacture.

Abstract: An on-vehicle data processing system is provided which can cause the vehicle information to be displayed on a display device 10. The on-vehicle data processing system has a mode setting unit 32 for setting the running and stop modes and a data processing unit 34 for computing the mode images. The data processing unit 34 computes the running mode images representing the running states of the vehicle in real time while in the running mode and the stop mode images representing the details of the vehicle information while in the stop mode. Thus, the running mode images, more easily viewed by the driver, can be displayed on the display device in the running mode while the stop mode images, preferentially displaying the contents of the vehicle information, can be displayed on the display device in the stop mode.

Abstract: A dry etching apparatus is provided with parallel electrodes confronting each other, and a high frequency voltage is impressed between the electrodes. The electrode for holding a base material has a recess in its surface and the surface of the electrode is covered with an insulating layer so that part of the structure constituted by the insulating layer and electrode is not in contact with the base material.

Abstract: The magnetron dry-etching apparatus has, behind its anode electrode (1) facing an object to be etched positioned on a cathode electrode (2), a rotatable magnet assembly comprising at least one pair of rotatable permanent magnets (12) of narrow-pie-shape, fixed on a common yoke (14) so that different polarity magnetic poles (N and S) are disposed side by side; whereby a uniform magnetic field is formed on a wafer (8) on the cathode (2) upon rotation of said magnet assembly, thereby assuring uniform etching even upon change of gas pressure of other etching conditions.

Abstract: A magnet filter for removing magnetic metal powder mixed with oil in an oil reservoir or the like which is easily mounted to and dismounted from the oil reservoir. The magnet filter includes a recess formed on a top surface of a screw head having a screw rod studded on its bottom surface and a permanent magnet piece is fitted in the recess.

Abstract: The known magnet filter in which a permanent magnet piece is wrapped up by a magnetically permeable plate except for at least one magnetic pole surface, is improved. The improvement exists in that the magnetically permeable plate wrapping up a permanent magnet piece is formed in a bag shape with one end opened to the outside, and the permanent magnet is fitted in a deep portion within the bag-shaped magnetically permeable plate so that a space portion may be preserved between an unwrapped surface of the permanent magnet piece and the open end of the magnetically permeable plate for firmly holding adsorbed magnetic metal powder.

Abstract: A magnetic filter consisting of a screw plug having a recess formed at the tip end of its screw rod portion and directed in the axial direction thereof, a rod-shaped permanent magnet piece fitted in the recess, and a non-magnetic member interposed between the permanent magnet piece and an inner circumferential surface of the screw rod portion defining the recess. The rod-shaped permanent magnet piece is magnetized so that magnetic poles may appear on its circumferential surface at diametrically opposite ends of its transverse cross-section, and the rod-shaped permanent magnet piece is axially projected from the tip end surface of the screw rod portion.

Abstract: A dry-etching method for etching materials of the silicon group comprises: providing the material to be etched in a reaction chamber; supplying a mixed gas as the etching gas comprising carbon fluoride, oxygen and another gas wherein the other gas is a partially halogenated hydrocarbon; and thereafter subjecting the etching gas to high frequency electric current so as to make the mixed gas into a plasma whereby the material is etched.