Patents by Inventor Kazuyuki TSUZUKI

Kazuyuki TSUZUKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11359270
    Abstract: Provided is a thermal spraying material capable of forming a thermally sprayed coating film having improved plasma erosion resistance. The invention disclosed here provides a thermal spraying material. This thermal spraying material comprises composite particles in which a plurality of yttrium fluoride microparticles are integrated. In addition, the compressive strength of the composite particles is 5 MPa or more.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: June 14, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Hiroyuki Ibe, Kazuyuki Tsuzuki
  • Patent number: 11299800
    Abstract: Provided is a thermal spraying material capable of forming a thermally sprayed coating film having improved plasma erosion resistance. The invention disclosed here provides a thermal spraying material. This thermal spraying material comprises composite particles in which a plurality of yttrium fluoride microparticles are integrated. In addition, the compressive strength of the composite particles is 5 MPa or more.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: April 12, 2022
    Assignee: FUJIMI INCORPORATED
    Inventors: Hiroyuki Ibe, Kazuyuki Tsuzuki
  • Patent number: 11066734
    Abstract: This invention provides a thermal spray slurry capable of forming a favorable thermal spray coating. The thermal spray slurry comprises a dispersion medium and thermal spray particles formed of at least one material selected from the group consisting of a ceramic, a cermet and a metal. 800 mL of the thermal spray slurry contains A kg of the thermal spray particles; when 800 mL of the thermal spray slurry in which the thermal spray particles are dispersed is supplied at a flow rate of 35 mL/min to a horizontally-placed tube and collected, the collected slurry contains B kg of the thermal spray particles; and the slurry has a supply efficiency index If of 70% or higher, determined by the next equation If (%)=B/A×100.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: July 20, 2021
    Assignee: FUJIMI INCORPORATED
    Inventors: Hiroyuki Ibe, Fumi Shinoda, Kazuyuki Tsuzuki
  • Patent number: 10377905
    Abstract: A thermal spray slurry of the present invention contains ceramic particles having an average particle size of 200 nm or more and 5 ?m or less. Precipitates formed when 700 mL of the thermal spray slurry is placed in a 16.5-cm-high cylindrical vessel having a volume of 1 L and is allowed to stand still at room temperature for 1 week are made to disappear by disposing, at a temperature of 20° C. or higher and 30° C. or lower, the cylindrical vessel so as for the central axis of the cylindrical vessel to be horizontal and by rotating the cylindrical vessel at a rotation speed of 100 rpm for 120 minutes around the central axis of the cylindrical vessel to stir the thermal spray slurry in the cylindrical vessel.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: August 13, 2019
    Assignee: FUJIMI INCORPORATED
    Inventors: Junya Kitamura, Hiroaki Mizuno, Kazuto Sato, Kazuyuki Tsuzuki
  • Publication number: 20190203330
    Abstract: Provided is a thermal spraying material capable of forming a thermally sprayed coating film having improved plasma erosion resistance. The invention disclosed here provides a thermal spraying material. This thermal spraying material comprises composite particles in which a plurality of yttrium fluoride microparticles are integrated. In addition, the compressive strength of the composite particles is 5 MPa or more.
    Type: Application
    Filed: September 15, 2017
    Publication date: July 4, 2019
    Applicant: FUJIMI INCORPORATED
    Inventors: Hiroyuki IBE, Kazuyuki TSUZUKI
  • Patent number: 10196536
    Abstract: A thermal spray slurry of the present invention contains ceramic particles in a content of 10% by mass or more and 85% by mass or less, and has a viscosity of 3,000 mPa·s or less. The ceramic particles have an average particle size of, for example, 1 nm or more and 5 ?m or less. The thermal spray slurry may further contain a dispersant. The thermal spray slurry may further contain a viscosity modifier. The thermal spray slurry may further contain a flocculant.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: February 5, 2019
    Assignee: FUJIMI INCORPORATED
    Inventors: Junya Kitamura, Hiroaki Mizuno, Kazuto Sato, Kazuyuki Tsuzuki
  • Patent number: 10196729
    Abstract: To provide a slurry for thermal spraying. In the slurry, even when spray particles precipitate, the precipitates easily disappear. The present invention provides a slurry for thermal spraying including spray particles and a dispersion medium. The spray particles have an average circularity in a plan view of 0.85 or less. The spray particles preferably have an average circularity of 0.6 or more. The spray particles may include yttrium fluoride and an yttrium oxyfluoride.
    Type: Grant
    Filed: September 7, 2016
    Date of Patent: February 5, 2019
    Assignee: FUJIMI INCORPORATED
    Inventors: Hiroyuki Ibe, Kazuto Sato, Kazuyuki Tsuzuki, Takaya Masuda
  • Patent number: 10138167
    Abstract: This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: November 27, 2018
    Assignees: TOKYO ELECTRON LIMITED, FUJIMI INCORPORATED
    Inventors: Nobuyuki Nagayama, Hiroyuki Ibe, Kazuyuki Tsuzuki
  • Patent number: 10106879
    Abstract: This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE—O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material is characterized by being essentially free of an oxide of the rare earth element.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: October 23, 2018
    Assignees: FUJIMI INCORPORATED, TOKYO ELECTRON LIMITED
    Inventors: Nobuyuki Nagayama, Hiroyuki Ibe, Kazuyuki Tsuzuki
  • Patent number: 10106466
    Abstract: This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material has an X-ray diffraction pattern that shows a main peak intensity IA corresponding to the rare earth element oxyhalide, a main peak intensity IB corresponding to a rare earth element oxide and a main peak intensity IC corresponding to a rare earth element halide, satisfying a relationship [(IB+IC)/IA]<0.02.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: October 23, 2018
    Assignees: TOKYO ELECTRON LIMITED, FUJIMI INCORPORATED
    Inventors: Nobuyuki Nagayama, Hiroyuki Ibe, Kazuyuki Tsuzuki
  • Patent number: 9914993
    Abstract: Provided is a compact thermal spray powder suitable for forming a ceramic thermal spray coating which is compact and excels in durability. The thermal spray powder disclosed herein includes ceramic particles formed of a ceramic material with a melting point equal to or lower than 2000° C. The thermal spray powder is configured such that the peak top of a main peak is in a range of 10 ?m or less in a log differential pore volume distribution obtained by a mercury porosimetry, and when the peak top of a second peak is at a fine pore size less than that of the peak top of the main peak, the ratio (H2/H1) of the height H2 of the second peak to the height H1 of the main peak is 0.05 or less.
    Type: Grant
    Filed: February 23, 2016
    Date of Patent: March 13, 2018
    Assignee: FUJIMI INCORPORATED
    Inventors: Hiroyuki Ibe, Kazuyuki Tsuzuki
  • Publication number: 20170283933
    Abstract: This invention provides a thermal spray slurry capable of forming a favorable thermal spray coating. The thermal spray slurry comprises a dispersion medium and thermal spray particles formed of at least one material selected from the group consisting of a ceramic, a cermet and a metal. 800 mL of the thermal spray slurry contains A kg of the thermal spray particles; when 800 mL of the thermal spray slurry in which the thermal spray particles are dispersed is supplied at a flow rate of 35 mL/min to a horizontally-placed tube and collected, the collected slurry contains B kg of the thermal spray particles; and the slurry has a supply efficiency index If of 70% or higher, determined by the next equation If (%)=B/A×100.
    Type: Application
    Filed: September 3, 2015
    Publication date: October 5, 2017
    Applicant: FUJIMI INCORPORATED
    Inventors: Hiroyuki IBE, Fumi SHINODA, Kazuyuki TSUZUKI
  • Patent number: 9682892
    Abstract: A thermal spray powder of the present invention contains ceramic particles having an average particle size of 1 ?m or more and 20 ?m or less. The ceramic particles have a flowability index value FT of 3 or more measured by using a powder rheometer. The flowability index value FF is determined by measuring the maximum principal stress and the uniaxial collapse stress of the ceramic particles at normal temperature and normal humidity when 9 kPa of shear force is applied to the ceramic particles, and by dividing the measured maximum principal stress by the measured uniaxial collapse stress.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: June 20, 2017
    Assignee: FUJIMI INCORPORATED
    Inventors: Junya Kitamura, Kazuto Sato, Kazuyuki Tsuzuki
  • Publication number: 20170107604
    Abstract: Provided is a thermal spray slurry capable of satisfactorily forming a thermal spray coating with superior plasma erosion resistance. The invention provides a thermal spray slurry comprising thermal spray particles and a dispersion medium. The thermal spray particles comprise a compound containing yttrium (Y) and a halogen element (X) as constituent elements, and be present in an amount of 10% by mass or more and 70% by mass or less. The viscosity of the thermal spray slurry is 300 mPa·s or less.
    Type: Application
    Filed: October 19, 2016
    Publication date: April 20, 2017
    Applicant: FUJIMI INCORPORATED
    Inventors: Hiroyuki IBE, Kazuto SATO, Kazuyuki TSUZUKI, Takaya MASUDA
  • Publication number: 20170088930
    Abstract: To provide a slurry for thermal spraying. In the slurry, even when spray particles precipitate, the precipitates easily disappear. The present invention provides a slurry for thermal spraying including spray particles and a dispersion medium. The spray particles have an average circularity in a plan view of 0.85 or less. The spray particles preferably have an average circularity of 0.6 or more. The spray particles may include yttrium fluoride and an yttrium oxyfluoride.
    Type: Application
    Filed: September 7, 2016
    Publication date: March 30, 2017
    Applicant: FUJIMI INCORPORATED
    Inventors: Hiroyuki IBE, Kazuto SATO, Kazuyuki TSUZUKI, Takaya MASUDA
  • Publication number: 20170088928
    Abstract: To provide a slurry for thermal spraying capable of forming a favorable sprayed coating. The present invention provides a slurry for thermal spraying including spray particles including at least one material selected from the group consisting of ceramics, inorganic compounds, cermets, and metals and a dispersion medium. Here, the spray particles have an average particle size of 0.01 ?m or more and 10 ?m or less and are contained in the slurry for thermal spraying at a proportion of 10% by mass or more and 70% by mass or less. In the slurry for thermal spraying, the spray particles have a zeta potential of ?200 mV or more and 200 mV or less.
    Type: Application
    Filed: September 7, 2016
    Publication date: March 30, 2017
    Applicant: FUJIMI INCORPORATED
    Inventors: Hiroyuki IBE, Kazuyuki TSUZUKI, Takaya MASUDA
  • Publication number: 20160326623
    Abstract: This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE-O-X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents.
    Type: Application
    Filed: April 29, 2016
    Publication date: November 10, 2016
    Applicants: TOKYO ELECTRON LIMITED, FUJIMI INCORPORATED
    Inventors: Nobuyuki NAGAYAMA, Hiroyuki IBE, Kazuyuki TSUZUKI
  • Publication number: 20160326059
    Abstract: This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O-X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material has an X-ray diffraction pattern that shows a main peak intensity IA corresponding to the rare earth element oxyhalide, a main peak intensity IB corresponding to a rare earth element oxide and a main peak intensity IC corresponding to a rare earth element halide, satisfying a relationship [(IB+IC)/IA]<0.02.
    Type: Application
    Filed: April 29, 2016
    Publication date: November 10, 2016
    Applicants: TOKYO ELECTRON LIMITED, FUJIMI INCORPORATED
    Inventors: Nobuyuki NAGAYAMA, Hiroyuki IBE, Kazuyuki TSUZUKI
  • Publication number: 20160326058
    Abstract: This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.
    Type: Application
    Filed: April 29, 2016
    Publication date: November 10, 2016
    Applicants: TOKYO ELECTRON LIMITED, FUJIMI INCORPORATED
    Inventors: Nobuyuki NAGAYAMA, Hiroyuki IBE, Kazuyuki TSUZUKI
  • Publication number: 20160244868
    Abstract: Provided is a compact thermal spray powder suitable for forming a ceramic thermal spray coating which is compact and excels in durability. The thermal spray powder disclosed herein includes ceramic particles formed of a ceramic material with a melting point equal to or lower than 2000° C. The thermal spray powder is configured such that the peak top of a main peak is in a range of 10 ?m or less in a log differential pore volume distribution obtained by a mercury porosimetry, and when the peak top of a second peak is at a fine pore size less than that of the peak top of the main peak, the ratio (H2/H1) of the height H2 of the second peak to the height H1 of the main peak is 0.05 or less.
    Type: Application
    Filed: February 23, 2016
    Publication date: August 25, 2016
    Applicant: FUJIMI INCORPORATED
    Inventors: Hiroyuki IBE, Kazuyuki TSUZUKI