Patents by Inventor Kei Isozaki

Kei Isozaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5922275
    Abstract: An aluminum-chromium alloy having an atomic ratio of aluminum to chromium of from 0.2 to 10.9 and a resistivity at room temperature of at most 1 .OMEGA..multidot.cm after heat treatment in air at a temperature of 900.degree. C. for 200 hours.
    Type: Grant
    Filed: May 5, 1997
    Date of Patent: July 13, 1999
    Assignee: Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Toshiyuki Kageyama, Yasuo Imamura, Kei Isozaki
  • Patent number: 5698035
    Abstract: A heat-resistive electrode material substantially consisting of 40 to 60 wt % of at least one of ZrB.sub.2 and TiB.sub.2, 20 to 50 wt % of BN, and not more than 30 wt % of AlN is disclosed. This heat-resistive electrode material is used in at least portions of electrodes of an apparatus having a plasma generating unit, e.g., an ion source, a plasma etching apparatus, or a plasma CVD apparatus, that contacts a plasma.
    Type: Grant
    Filed: January 13, 1997
    Date of Patent: December 16, 1997
    Assignees: Tokyo Electron Limited, Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Masahiko Matsudo, Akira Koshiishi, Kei Isozaki, Yutaka Hirashima
  • Patent number: 4952532
    Abstract: A sintered body containing ZrB.sub.2 is obtained by sintering a starting powder material containing not less than 50% by weight of a starting powder mixture consisting essentially of Cr.sub.3 C.sub.2 and a boride represented by the formula (XB.sub.2).sub.n wherein n represents an integer of 1 or 2 and when n is 1, X represents a zirconium atom and when n is 2, X represents a zirconium atom and a titanium atom, respectively and B represents a boron atom. The weight ratio of the Cr.sub.3 C.sub.2 : the boride is 50 to 0.5:50 to 99.5.
    Type: Grant
    Filed: October 3, 1988
    Date of Patent: August 28, 1990
    Assignee: Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Kei Isozaki, Hirotsugu Matsunaga, Yasuo Imamura
  • Patent number: 4927791
    Abstract: A chromium carbide sintered body having high toughness contains 99.5 to 50% by weight of chromium carbide and 0.5 to 50% by weight of AlN. The sintered body contains acicular crystals of chromium carbide.
    Type: Grant
    Filed: October 3, 1988
    Date of Patent: May 22, 1990
    Assignee: Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Kei Isozaki, Yutaka Hirashima, Yasuo Imamura
  • Patent number: RE33905
    Abstract: A chromium carbide sintered body having high toughness contains 99.5 to 50% by weight of chromium carbide and 0.5 to 50% by weight of AlN. The sintered body contains acicular crystals of chromium carbide.
    Type: Grant
    Filed: March 27, 1991
    Date of Patent: April 28, 1992
    Assignee: Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Kei Isozaki, Yutaka Hirashima, Yasuo Imamura