Abstract: An information processing device includes an image acquisition unit configured to acquire spectroscopic images for a plurality of spectral wavelengths as a captured image of an imaging target, a spectrum calculation unit configured to calculate an optical spectrum in each of pixels, based on the plurality of spectroscopic images, a feature wavelength detection unit configured to detect a feature wavelength of the optical spectrum in each of the pixels, a color set unit configured to calculate a feature angle corresponding to the feature wavelength in each of the pixels and set, as a feature color of a corresponding pixel, a color in the hue circle corresponding to the feature angle, and an image generation unit configured to generate a feature detection image obtained by converting each of the pixels of the captured image into the feature color corresponding to the pixel.

Abstract: An attached substance determination method causes a computer to determine whether or not an attached substance is attached to an inspection target object, in which the computer includes at least one processor, and the at least one processor is configured to (a) acquire, as learning data, a spectroscopic image obtained by imaging a first type sample having the attached substance attached to a base with a spectroscopic camera and a spectroscopic image obtained by imaging a second type sample having no attached substance attached to the base with the spectroscopic camera, in which spectroscopic images of a plurality of kinds of the first type samples having different kinds of the bases and different kinds of the attached substances and spectroscopic images of a plurality of kinds of the second type samples having different kinds of the bases are acquired as the learning data, (b) generate, based on the learning data, a determination model with a spectroscopic image of the inspection target object as an input and

Abstract: An attached substance determination method causes a computer to determine whether or not an attached substance is attached to an inspection target object, in which the computer includes at least one processor, and the at least one processor is configured to (a) acquire, as learning data, a spectroscopic image obtained by imaging a first type sample having the attached substance attached to a base with a spectroscopic camera and a spectroscopic image obtained by imaging a second type sample having no attached substance attached to the base with the spectroscopic camera, in which spectroscopic images of a plurality of kinds of the first type samples having different kinds of the bases and different kinds of the attached substances and spectroscopic images of a plurality of kinds of the second type samples having different kinds of the bases are acquired as the learning data, (b) generate, based on the learning data, a determination model with a spectroscopic image of the inspection target object as an input and

Abstract: A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.

Abstract: A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.

Abstract: A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer includes a drive device, a detection device, a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer, and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.

Abstract: A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.

Abstract: An angular velocity detection circuit includes: an angular velocity signal generation unit that generates an angular velocity signal on the basis of an output signal of a differential amplifier unit that differentially amplifies a signal based on an output signal of a first conversion unit and a signal based on an output signal of a second conversion unit; and a correction signal generation unit that generates a correction signal for reducing an offset of the angular velocity signal which occurs due to leakage signals which are respectively included in the first detection signal and the second detection signal on the basis of a signal based on drive oscillation of the angular velocity detection element. The correction signal is input to a circuit that is located on a first signal path ranging from the first detection electrode of an angular velocity detection element to the differential amplifier unit.

Abstract: A physical quantity sensor includes a substrate, a first detection electrode that includes a first electrode finger, a first spring that supports the first detection electrode in a displaceable manner in a first direction with respect to the substrate, a second detection electrode that includes a second electrode finger which is disposed at a distance from the first electrode finger in the first direction, and a second spring that supports the second detection electrode in a displaceable manner in the first direction with respect to the substrate. A spring constant of the first spring in the first direction is equal to a spring constant of the second spring in the first direction.

Abstract: A vibration device includes a substrate that contains movable ions, an element unit that has a movable portion which is displaceable from the substrate, and a conductor layer that is disposed on a side of the substrate which is opposite to the element unit. When a potential of the movable portion is set to E1 and a potential of the conductor layer is set to E2, |E1?E2|<|E1| is satisfied. In a plan view obtained in a direction where the conductor layer, the substrate, and the element unit are juxtaposed with one another, the conductor layer overlaps at least a portion of the movable portion.

Abstract: A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.

Abstract: A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.

Abstract: A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.

Abstract: A gyro sensor includes a substrate, an oscillation member, fixed driving electrodes and a movable driving electrode that oscillate the oscillation member, fixed detection electrodes and a movable detection electrode that detect a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member, a bias voltage application unit that applies a bias voltage to the oscillation member, and a storage unit, and the bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit.

Abstract: A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer includes a drive device, a detection device, a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer, and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.

Abstract: There is provided a functional element capable of preventing an oblique vibration due to a vibration leakage phenomenon from propagating to degrade the detection accuracy. A gyro element as the functional element includes a support body, a detection section, a drive coupling section having a first part and a second part, and a mass section connected to the drive coupling section, and connected to the support body via the drive coupling section, and the mass section performs the drive vibration in a direction along a third axis parallel to a normal line of a plane including the first axis and the second axis perpendicular to each other.

Abstract: There is provided a functional element capable of preventing an oblique vibration due to a vibration leakage phenomenon from propagating to degrade the detection accuracy. A gyro element as the functional element includes a support body, a detection section, a drive coupling section having a first part and a second part, and a mass section connected to the drive coupling section, and connected to the support body via the drive coupling section, and the mass section performs the drive vibration in a direction along a third axis parallel to a normal line of a plane including the first axis and the second axis perpendicular to each other.

Abstract: An angular velocity detection circuit includes: a first conversion unit that includes a first operational amplifier, and converts a first detection signal, which is output from a first detection electrode and is input to a first input terminal of the first operational amplifier, into a voltage; an angular velocity signal generation unit that generates an angular velocity signal on the basis of an output signal of the first conversion unit; and a first correction signal generation unit that generates a first correction signal for reducing an offset of the angular velocity signal which occurs due to a leakage signal included in the first detection signal on the basis of a signal based on drive oscillation of the angular velocity detection element. The first correction signal is input to the first input terminal or a second input terminal of the first operational amplifier directly or through a resistor.

Abstract: An angular velocity detection circuit includes: an angular velocity signal generation unit that generates an angular velocity signal on the basis of an output signal of a differential amplifier unit that differentially amplifies a signal based on an output signal of a first conversion unit and a signal based on an output signal of a second conversion unit; and a correction signal generation unit that generates a correction signal for reducing an offset of the angular velocity signal which occurs due to leakage signals which are respectively included in the first detection signal and the second detection signal on the basis of a signal based on drive oscillation of the angular velocity detection element. The correction signal is input to a circuit that is located on a first signal path ranging from the first detection electrode of an angular velocity detection element to the differential amplifier unit.

Abstract: A drive circuit includes a first converter that includes a first operational amplifier and a first capacitance, accumulates first signals output from a first electrode of an angular velocity detection element and input to the first operational amplifier in the first capacitance, and then, converts the signals to a voltage, a first phase adjustment portion that adjusts a phase of the drive signal which drives the angular velocity detection element and limits a frequency band of the drive signal based on the output signals from the first converter, and a drive signal generation portion that generates the drive signal based on the output signals from the first phase adjustment portion.