Patents by Inventor Keiichi IOBE

Keiichi IOBE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS, AND PROGRAM OF CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS
    Publication number: 20220199377
    Abstract: A substrate processing apparatus, a method, and a program for controlling temperature of the substrate processing apparatus. A substrate processing apparatus comprising: a mounting table configured to hold a substrate to be processed in a vacuum processing container; a heat transfer gas container placed on a back side of the mounting table with a gap between the mounting table and the heat transfer gas container and configured to be cooled by a refrigerator; and a control device configured to control heating of the refrigerator to the vicinity of a first temperature on the basis of a temperature of a first control point provided near the refrigerator and then switching the heating control for the refrigerator on or off.
    Type: Application
    Filed: December 16, 2021
    Publication date: June 23, 2022
    Inventors: Toshiharu HIRATA, Manabu NAKAGAWASAI, Takashi ISHII, Keiichi IOBE