Patents by Inventor Keiichi MAKI

Keiichi MAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11929728
    Abstract: A packaged acoustic wave filter component can include an acoustic wave device including a first piezoelectric layer and an interdigital transducer electrode on the first piezoelectric layer. A support layer may be included over the acoustic wave device, and the packaged hybrid filter component can also include a bulk acoustic wave resonator over the support layer. A cap layer may extend over and encapsulate the bulk acoustic wave resonator. One or more external vias may extend through the support layer and the underlying layers of the acoustic wave device to provide electrical communication with the packaged bulk acoustic wave generator.
    Type: Grant
    Filed: November 18, 2020
    Date of Patent: March 12, 2024
    Assignee: Skyworks Solutions, Inc.
    Inventors: Keiichi Maki, Hironori Fukuhara, Rei Goto
  • Patent number: 11923823
    Abstract: An acoustic wave device includes a piezoelectric substrate, interdigital transducer electrodes including a predetermined number of electrode fingers disposed on an upper surface of the substrate, and a dielectric material layer having a first portion and a second portion. The first portion is disposed on the upper surface of the substrate and between the interdigital transducer electrode fingers. The second portion is disposed above the interdigital transducer electrode fingers. The acoustic wave device further includes at least one thermally conductive bridge disposed within the dielectric material layer and contacting upper surfaces of at least two adjacent interdigital transducer electrode fingers to dissipate heat therefrom.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: March 5, 2024
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Hironori Fukuhara, Keiichi Maki, Rei Goto
  • Patent number: 11923822
    Abstract: An acoustic wave filter component can include a surface acoustic wave device including a first piezoelectric layer, an interdigital transducer electrode on the first piezoelectric layer, and an additional layer, such as a temperature compensation layer, over the interdigital transducer electrode. The acoustic wave filter component can also include a bulk acoustic wave resonator supported by the additional layer. The additional layer may be a layer on which a surface acoustic wave of the surface acoustic wave device will propagate. The bulk acoustic wave resonator may include an air cavity, where a shape of the air cavity is defined in part by the additional layer.
    Type: Grant
    Filed: November 18, 2020
    Date of Patent: March 5, 2024
    Assignee: Skyworks Solutions, Inc.
    Inventors: Keiichi Maki, Hironori Fukuhara, Rei Goto
  • Patent number: 11894828
    Abstract: Aspects of this disclosure relate to an acoustic wave device that includes high velocity layers on opposing sides of a piezoelectric layer. A temperature compensation layer can be positioned between one of the high velocity layers and the piezoelectric layer. The acoustic wave device can be arranged to generate a boundary acoustic wave having a higher velocity than a respective acoustic velocity of each of the high velocity layers.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: February 6, 2024
    Assignee: Skyworks Solutions, Inc.
    Inventors: Hiroyuki Nakamura, Rei Goto, Keiichi Maki
  • Patent number: 11876501
    Abstract: An acoustic wave device is disclosed. The acoustic wave device includes a support layer, a ceramic layer positioned over the support layer, a piezoelectric layer positioned over the ceramic layer, and an interdigital transducer electrode positioned over the piezoelectric layer. The support layer has a higher thermal conductivity than the ceramic layer. The ceramic layer can be a polycrystalline spinel layer. The acoustic wave device can be a surface acoustic wave device configured to generate a surface acoustic wave.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: January 16, 2024
    Assignee: Skyworks Solutions, Inc.
    Inventors: Hironori Fukuhara, Rei Goto, Keiichi Maki
  • Publication number: 20230396235
    Abstract: In some embodiments, a surface acoustic wave device can include a piezoelectric substrate and an interdigital transducer electrode embedded in a surface of the piezoelectric substrate to support a high-order mode of a surface acoustic wave having a wavelength ? and a phase velocity greater than 8,000 m/s. Such a high-order mode can include a third-order mode, and the phase velocity can be at least 9,000 m/s. In some embodiments, such a surface acoustic wave device can be implemented in products such as a radio-frequency filter, a radio-frequency module and a wireless device.
    Type: Application
    Filed: May 30, 2023
    Publication date: December 7, 2023
    Inventors: Hiroyuki NAKAMURA, Rei GOTO, Keiichi MAKI, Michio KADOTA, Shuji TANAKA
  • Publication number: 20230396233
    Abstract: In some embodiments, a surface acoustic wave device can include a piezoelectric substrate and an interdigital transducer electrode implemented on a surface of the piezoelectric substrate, such that the surface acoustic device supports a surface acoustic wave having a wavelength ? and a phase velocity less than 3,000 m/s with an electromechanical coupling coefficient of at least 9.0. In some embodiments, the phase velocity less than 2,000 m/s, and the surface acoustic wave can include a lowest asymmetry (A0) mode. In some embodiments, such a surface acoustic wave device can be implemented in products such as a radio-frequency filter, a radio-frequency module and a wireless device.
    Type: Application
    Filed: May 30, 2023
    Publication date: December 7, 2023
    Inventors: Hiroyuki NAKAMURA, Rei GOTO, Keiichi MAKI, Michio KADOTA, Shuji TANAKA
  • Publication number: 20230378930
    Abstract: Surface acoustic wave resonators are disclosed. In certain embodiments, a surface acoustic wave resonator can include a high impedance layer, a piezoelectric layer over the high impedance layer, an interdigital transducer electrode over the piezoelectric layer, and a low impedance layer between the high impedance layer and the piezoelectric layer. An acoustic impedance of the high impedance layer is greater than an acoustic impedance of the piezoelectric layer. An acoustic impedance of the low impedance layer is lower than the acoustic impedance of the high impedance layer. The piezoelectric layer can have a cut angle in a range from 115° to 135°. The surface acoustic wave resonator is configured to generate a Rayleigh mode surface acoustic wave having a wavelength of ?.
    Type: Application
    Filed: April 28, 2023
    Publication date: November 23, 2023
    Inventors: Rei Goto, Keiichi Maki
  • Patent number: 11824515
    Abstract: An acoustic wave device that includes a spinel layer, a piezoelectric layer and an interdigital transducer electrode on the piezoelectric layer is disclosed. The piezoelectric layer is disposed between the interdigital transducer electrode and the spinel layer. The acoustic wave device is configured to generate an acoustic wave having a wavelength of ?. The piezoelectric layer can have a thickness than is less than ?. In some embodiments, the acoustic wave device can include a temperature compensating layer that is disposed between the piezoelectric layer and the spinel layer.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: November 21, 2023
    Assignee: Skyworks Solutions, Inc.
    Inventors: Gong Bin Tang, Rei Goto, Hiroyuki Nakamura, Keiichi Maki
  • Publication number: 20230370044
    Abstract: An acoustic wave device is disclosed. The acoustic wave device can include a piezoelectric layer positioned over a substrate. The acoustic wave device can also include an interdigital transducer electrode positioned over the piezoelectric layer. The acoustic wave device can also include a grounding structure positioned over the piezoelectric layer. The acoustic wave device can also include a conductive layer positioned under the substrate such that the substrate is positioned between the conductive layer and the grounding structure. The acoustic wave device can further include an electrical pathway that electrically connects the conductive layer to the grounding structure.
    Type: Application
    Filed: April 19, 2023
    Publication date: November 16, 2023
    Inventors: Rei Goto, Keiichi Maki
  • Publication number: 20230361753
    Abstract: An acoustic wave device is disclosed. The acoustic wave device can include a substrate, an interdigital transducer electrode disposed on the substrate, and a temperature compensation layer over the interdigital transducer electrode. The IDT electrode includes a lower layer, an upper layer, and a buffer layer disposed between the lower layer and the upper layer. A modulus of elasticity of the buffer layer is less than a modulus of elasticity of the upper layer. The buffer layer is configured to release stress between the lower layer and the upper layer caused due to a difference between a coefficient of thermal expansion of the lower layer and a coefficient of thermal expansion of the upper layer.
    Type: Application
    Filed: March 1, 2023
    Publication date: November 9, 2023
    Inventors: Takanori Yasuda, Keiichi Maki, Yumi Torazawa, Rei Goto, Michael David Hill
  • Patent number: 11804822
    Abstract: Aspects of this disclosure relate to a surface acoustic wave resonator. The surface acoustic wave resonator includes a piezoelectric substrate, interdigital transducer electrodes formed on an upper surface of the piezoelectric substrate, a dielectric temperature compensation layer formed on the piezoelectric substrate to cover the interdigital transducer electrodes, and a dielectric passivation layer over the temperature compensation layer. The passivation layer may include an oxide layer configured to have a sound velocity greater than that of the temperature compensation layer to suppress a transverse signal transmission.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: October 31, 2023
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Hironori Fukuhara, Keiichi Maki, Yuya Hiramatsu
  • Publication number: 20230345182
    Abstract: An integrated device package is disclosed. The integrated device package can include a printed circuit board and a microelectronicmechanical systems die that is at least partially disposed within the printed circuit board and electrically coupled to the printed circuit board. The integrated device package can include a filler material that is at least partially disposed between the microelectronicmechanical systems die and the printed circuit board. The integrated device package can include a lid that is coupled to the printed circuit board. The lid and the microelectronicmechanical systems die are spaced by a gap defining a back volume.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 26, 2023
    Inventors: Takanori Yasuda, Siarhei Dmitrievich Barsukou, Keiichi Maki, Hiroyuki Nakamura
  • Publication number: 20230343659
    Abstract: An integrated device package is disclosed. The integrated device package can include a carrier that has an opening extending at least partially through a thickness of the carrier. The integrated device package can include a microelectronicmechanical systems die that is at least partially disposed in the opening and mechanically and electrically coupled to the carrier. The integrated device package can include a lid that is coupled to the carrier. The lid and the microelectronicmechanical systems die are spaced by a gap defining a back volume.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 26, 2023
    Inventors: Takanori Yasuda, Siarhei Dmitrievich Barsukou, Keiichi Maki, Hiroyuki Nakamura
  • Publication number: 20230345648
    Abstract: An integrated device package is disclosed. The integrated device package can include a carrier that has a multilayer structure having a first layer and a second layer. The first layer at least partially defines a lower side of the carrier. An electrical resistance of the second layer is greater than an electrical resistance of the first layer. The integrated device package can include a microelectronicmechanical systems die that is mounted on an upper side of the carrier opposite the lower side. The integrated device package can include a lid that is coupled to the carrier. The lid and the microelectronicmechanical systems die are spaced by a gap defining a back volume.
    Type: Application
    Filed: March 27, 2023
    Publication date: October 26, 2023
    Inventors: Takanori Yasuda, Siarhei Dmitrievich Barsukou, Keiichi Maki, Hiroyuki Nakamura
  • Publication number: 20230336159
    Abstract: A surface acoustic wave (SAW) filter package comprises a substrate, one or more trenches formed in the substrate, a SAW filter formed in each trench of the one or more trenches, and a cavity forming layer extending horizontally across the substrate and each trench.
    Type: Application
    Filed: April 7, 2023
    Publication date: October 19, 2023
    Applicant: SKYWORKS SOLUTIONS, INC.
    Inventors: Yuya Hiramatsu, Hiroyuki Nakamura, Keiichi Maki, Kyohei Kobayashi
  • Patent number: 11784290
    Abstract: A light-emitting device includes a pair of light-transmissive insulator sheets disposed opposite to each other and two types of light-transmissive electroconductive layers disposed on a common one of or separately on one and the other of the pair of light-transmissive insulator sheets, and at least one light-emitting semiconductor each provided with a cathode and an anode which are individually and electrically connected to the two types of the light-transmissive electroconductive layers. The electrical connection and mechanical bonding between the members are improved by a light-transmissive elastomer which is between the pair of light-transmissive insulator sheets. A method in which a light-emitting semiconductor element and a light-transmissive electroconductive member are subjected to vacuum hot-pressing.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: October 10, 2023
    Assignee: NICHIA CORPORATION
    Inventor: Keiichi Maki
  • Publication number: 20230318566
    Abstract: A temperature compensated surface acoustic wave device is disclosed. The temperature compensated surface acoustic wave device can include a piezoelectric layer, an interdigital transducer electrode over the piezoelectric layer, and a temperature compensation layer over the interdigital transducer electrode. The interdigital transducer electrode includes a first layer, a second layer over the first layer, and a buffer layer between the first layer and the second layer. A thermal conductivity of the second layer is greater than a thermal conductivity of the buffer layer. The buffer layer can be a titanium layer. A thickness of the buffer layer can be in a range of 20 nm to 200 nm, or in a range of 5% to 30% of a thickness of the interdigital transducer electrode.
    Type: Application
    Filed: March 1, 2023
    Publication date: October 5, 2023
    Inventors: Takanori Yasuda, Keiichi Maki, Yumi Torazawa, Rei Goto, Michael David Hill
  • Publication number: 20230283255
    Abstract: Aspects of this disclosure relate to acoustic wave devices on stacked die. A first die can include first acoustic wave device configured to generate a boundary acoustic wave. A second die can include a second acoustic wave device configured to generate a second boundary acoustic wave, in which the second die is stacked with the first die. The first acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode on the piezoelectric layer, and high acoustic velocity layers on opposing sides of the piezoelectric layer. The high acoustic velocity layers can each have an acoustic velocity that is greater than a velocity of the boundary acoustic wave.
    Type: Application
    Filed: February 24, 2023
    Publication date: September 7, 2023
    Inventors: Hiroyuki Nakamura, Rei Goto, Keiichi Maki
  • Patent number: 11750172
    Abstract: A surface acoustic wave (SAW) resonator comprises a plurality of interdigital transducer electrodes disposed on a multilayer piezoelectric substrate (MPS) including a layer of piezoelectric material having a lower surface bonded to an upper surface of a layer of a second material different from the piezoelectric material that improves the temperature stability and reliability of the SAW resonator, and a layer of dielectric material disposed on an upper surface of the interdigital transducer electrodes and MPS.
    Type: Grant
    Filed: August 14, 2020
    Date of Patent: September 5, 2023
    Assignee: SKYWORKS SOLUTIONS, INC.
    Inventors: Rei Goto, Keiichi Maki, Gong Bin Tang