Abstract: A substrate processing apparatus includes a chamber having a plasma processing space, a sidewall of the chamber having an opening for transferring a substrate into the plasma processing space; and a shutter disposed at an inner side than the sidewall and configured to open or close the opening, the shutter having a flow path for a temperature-controlled fluid.

Abstract: Herein disclosed is a lubricating oil comprising at least one member selected from the group consisting of esterified products obtained by reacting: (A) a compound selected from the group consisting of alcohols represented by the following general formula (I), alcohols represented by the following general formula (II) and hydrogenated derivatives thereof; with (B) a fatty acid having not less than 6 carbon atoms or a mixture of the fatty acid with a rosin selected from the group consisting of rosin, hydrogenated rosins, disproportionated rosins and polymerized rosins: ##STR1## in the general formulas (I) and (II), X.sub.1 and X.sub.2 each independently represents a hydrogen atom or a methyl group and n is an integer ranging from 0 to 10. The lubricating oil is used as rolling mill oils, hydraulic oils cutting-grinding oils, lubricating oils for metal plastic working and those for internal combustion engines.

Abstract: A cold rolling mill lubricant for steel sheets, contains a monoester oil represented by general formula (A):R.sup.1 COO--(R.sup.2 --O).sub.n --R.sup.3(Wherein R.sup.1 is an alkyl, alkenyl, hydroxyalkyl, or hydroxyalkenyl group having 7 or more carbon atoms, R.sup.2 is an alkylene group, R.sup.3 is an alkyl or phenyl group, and n is an integer of 1 to 5), and/or a diester oil represented by general formula (B): ##STR1## (wherein each R.sup.4 or R.sup.6 is independently an alkyl, alkenyl, hydroxyalkyl or hydroxyalkenyl group having 5 or more carbon atoms, R.sup.5 is an alkylene group having 2 to 4 carbon atoms, and m is an integer of 1 or more).

Abstract: Lubricating oils for rolling of steel plates, which are composed of synthetic ester compounds obtainable from tri- or higher-valent alcohols having tertiary nitrogen such as isocyanuric derivatives or ethylene oxide addition products of ethylenediamine and fatty acids, possess well-balanced rolling lubricating properties and mill cleanability at a high level.

Abstract: A lubricating oil exhibiting superior specific features particularly for metal plastic processing is provided, which lubricating oil comprises at least one member selected from the group consisting of compounds expressed by the formulas I, II, III, IV or V: ##STR1## wherein R.sub.1 is alkyl, alkenyl, hydroxyalkyl, hydroxyalkenyl or phenyl and R.sub.2 and R.sub.3 each are CH.sub.2 OCOR.sub.1, CH.sub.2 OH or H wherein R.sub.1 is above; ##STR2## wherein R'.sub.1 and R'.sub.2 each are alkyl, alkenyl, hydroxyalkyl, hydroxyalkenyl or phenyl, n is an integer of 1-3 and X is alkyl, alkenyl or phenyl.

Abstract: Cooling water containing an .alpha.-amino acid suitable for cooling steel strips during their continuous annealing and after their overageing treatment. As the .alpha.-amino acid, aliphatic amino acids, aromatic amino acids, heterocyclic amino acids and their hydrochlorides and acetates are used.

Abstract: A steel stock such as hot-rolled pickled steel plate, cold-rolled steel plate, cast iron or the like is subjected to antirust treatment with an aqueous solution or an emulsion consisting mainly of a 1-hydroxybenzotriazole compound represented by the general formula: ##STR1## where X and Y represent hydrogen atoms and hydroxy, alkyl, carboxyl, nitro and sulfonic groups, and further containing one or more of aliphatic dicarboxylic acids added thereto, and having a pH within the range of 7-10.

Abstract: A method for surface treatment of an electrolytic tin plate, comprising treating a tin-plated steel sheet with an aqueous solution containing at least one selected from the group consisting of pyrazole derivatives and colloidal substances, drying and reflowing the tin-plated steel sheet.