Abstract: A method of loading a pallet that begins by showing a plan view of the pallet on a display screen. The direction and patterns of articles to be placed on the pallet are shown in the plan view. The pattern of articles is then moved to a selected position in the plan view of the display screen. The layout of articles is determined by changing the direction of the pattern to a selected direction. Using this method, positioning of goods on a pallet is done on the basis of the pallet and previously loaded articles. Once the pattern of articles has been determined, the given tier of the pallet is generated.

Abstract: A method for forming a CVD film, comprising the steps of loading at least one object to be processed into a processing chamber and positioning the object on a support base in the processing chamber, after positioning the object in the processing chamber, introducing a process gas from a corresponding gas supply source via a corresponding gas introducing pipe into the processing chamber and forming a film by a chemical vapor deposition method on the object in the processing chamber, after forming the film on the object, unloading the object from the processing chamber, after unloading the object from the processing chamber, dry-cleaning an inside of the processing chamber, and after dry-cleaning the inside of the processing chamber, introducing an inert gas via a corresponding gas introducing pipe into the chamber to purge those particles deposited as a residue in the gas introducing pipe and inside of the chamber.