Patents by Inventor Keisuke Gotoh
Keisuke Gotoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8829627Abstract: A dynamic quantity sensor device includes: first and second dynamic quantity sensors having first and second dynamic quantity detecting units; and first and second substrates, which are bonded to each other to provide first and second spaces. The first and second units are air-tightly accommodated in the first and second spaces, respectively. A SOI layer of the first substrate is divided into multiple semiconductor regions by trenches. First and second parts of the semiconductor regions provide the first and second units, respectively. The second part includes: a second movable semiconductor region having a second movable electrode, which is provided by a sacrifice etching of the embedded oxide film; and a second fixed semiconductor region having a second fixed electrode. The second sensor detects the second dynamic quantity by measuring a capacitance between the second movable and fixed electrodes, which is changeable in accordance with the second dynamic quantity.Type: GrantFiled: May 24, 2012Date of Patent: September 9, 2014Assignee: DENSO CORPORATIONInventors: Tetsuo Fujii, Keisuke Gotoh, Kenichi Ao
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Patent number: 8759926Abstract: In a semiconductor physical quantity sensor, a pattern portion including a wiring pattern as a wiring is formed on a surface of a first semiconductor substrate. A support substrate having a surface made of an electrically insulating material is prepared. The first semiconductor substrate is joined to the support substrate by bonding the pattern portion to the surface of the support substrate. Further, a sensor structure is formed in the first semiconductor substrate. The sensor structure is electrically connected to the wiring pattern. A cap is bonded to the first semiconductor substrate such that the sensor structure is hermetically sealed.Type: GrantFiled: February 24, 2011Date of Patent: June 24, 2014Assignee: DENSO CORPORATIONInventors: Tetsuo Fujii, Keisuke Gotoh
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Patent number: 8749019Abstract: A region-divided substrate includes: a substrate having a first surface and a second surface opposite to the first surface and having a plurality of partial regions, which are divided by a plurality of trenches, wherein each trench penetrates the substrate from the first surface to the second surface; a conductive layer having an electrical conductivity higher than the substrate and disposed on a sidewall of one of the plurality of partial regions from the first surface to the second surface; and an insulator embedded in each trench.Type: GrantFiled: March 2, 2012Date of Patent: June 10, 2014Assignee: DENSO CORPORATIONInventors: Tetsuo Fujii, Keisuke Gotoh, Masaya Tanaka
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Patent number: 8621928Abstract: A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.Type: GrantFiled: February 21, 2013Date of Patent: January 7, 2014Assignee: DENSO CORPORATIONInventor: Keisuke Gotoh
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Patent number: 8567248Abstract: A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the moveable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the accelereation detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.Type: GrantFiled: May 18, 2010Date of Patent: October 29, 2013Assignee: DENSO CORPORATIONInventor: Keisuke Gotoh
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Patent number: 8455973Abstract: A region divided substrate includes a substrate, a plurality of trenches, a conductive layer, and an insulating member. The substrate has a first surface and a second surface opposed to each other. The trenches penetrate the substrate from the first surface to the second surface and divide the substrate into a plurality of partial regions. The conductive layer is disposed on a sidewall of each of the trenches from a portion adjacent to the first surface to a portion adjacent to the second surface. The conductive layer has an electric conductivity higher than an electric conductivity of the substrate. The insulating member fills each of the trenches through the conductive layer.Type: GrantFiled: October 12, 2010Date of Patent: June 4, 2013Assignee: DENSO CORPORATIONInventors: Tetsuo Fujii, Masaya Tanaka, Keisuke Gotoh
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Publication number: 20120299127Abstract: A dynamic quantity sensor device includes: first and second dynamic quantity sensors having first and second dynamic quantity detecting units; and first and second substrates, which are bonded to each other to provide first and second spaces. The first and second units are air-tightly accommodated in the first and second spaces, respectively. A SOI layer of the first substrate is divided into multiple semiconductor regions by trenches. First and second parts of the semiconductor regions provide the first and second units, respectively. The second part includes: a second movable semiconductor region having a second movable electrode, which is provided by a sacrifice etching of the embedded oxide film; and a second fixed semiconductor region having a second fixed electrode. The second sensor detects the second dynamic quantity by measuring a capacitance between the second movable and fixed electrodes, which is changeable in accordance with the second dynamic quantity.Type: ApplicationFiled: May 24, 2012Publication date: November 29, 2012Applicant: DENSO CORPORATIONInventors: Tetsuo FUJII, Keisuke GOTOH, Kenichi AO
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Patent number: 8310248Abstract: A capacitive sensor device includes first and second sensor capacitors coupled in series, a clock signal generating part, an operational amplifier, a feedback capacitor, a compensating capacitor, and a compensating signal generating part. The clock signal generating part generates a first clock signal and the second clock signal applied to the first and second sensor capacitors, respectively. The compensating signal generating part generates a compensating signal applied to the compensating capacitor. The first clock signal and the second clock signal have the same frequency and the same amplitude and have phases being opposite each other. The compensating signal has a frequency same as the first clock signal and the second clock signal, has a phase same as one of the first clock signal and the second clock signal, and has an amplitude that is adjustable.Type: GrantFiled: February 2, 2010Date of Patent: November 13, 2012Assignee: DENSO CORPORATIONInventors: Keisuke Gotoh, Kentaro Mizuno, Norikazu Ohta
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Publication number: 20120223410Abstract: A region-divided substrate includes: a substrate having a first surface and a second surface opposite to the first surface and having a plurality of partial regions, which are divided by a plurality of trenches, wherein each trench penetrates the substrate from the first surface to the second surface; a conductive layer having an electrical conductivity higher than the substrate and disposed on a sidewall of one of the plurality of partial regions from the first surface to the second surface; and an insulator embedded in each trench.Type: ApplicationFiled: March 2, 2012Publication date: September 6, 2012Applicant: DENSO CORPORATIONInventors: Tetsuo FUJII, Keisuke Gotoh, Masaya Tanaka
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Publication number: 20110227174Abstract: In a semiconductor physical quantity sensor, a pattern portion including a wiring pattern as a wiring is formed on a surface of a first semiconductor substrate. A support substrate having a surface made of an electrically insulating material is prepared. The first semiconductor substrate is joined to the support substrate by bonding the pattern portion to the surface of the support substrate. Further, a sensor structure is formed in the first semiconductor substrate. The sensor structure is electrically connected to the wiring pattern. A cap is bonded to the first semiconductor substrate such that the sensor structure is hermetically sealed.Type: ApplicationFiled: February 24, 2011Publication date: September 22, 2011Applicant: DENSO CORPORATIONInventors: Tetsuo FUJII, Keisuke Gotoh
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Publication number: 20110133295Abstract: A region divided substrate includes a substrate, a plurality of trenches, a conductive layer, and an insulating member. The substrate has a first surface and a second surface opposed to each other. The trenches penetrate the substrate from the first surface to the second surface and divide the substrate into a plurality of partial regions. The conductive layer is disposed on a sidewall of each of the trenches from a portion adjacent to the first surface to a portion adjacent to the second surface. The conductive layer has an electric conductivity higher than an electric conductivity of the substrate. The insulating member fills each of the trenches through the conductive layer.Type: ApplicationFiled: October 12, 2010Publication date: June 9, 2011Applicant: DENSO CORPORATIONInventors: Tetsuo Fujii, Masaya Tanaka, Keisuke Gotoh
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Publication number: 20100300203Abstract: A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.Type: ApplicationFiled: May 18, 2010Publication date: December 2, 2010Applicant: DENSO CORPORATIONInventor: Keisuke GOTOH
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Publication number: 20100219848Abstract: A capacitive sensor device includes first and second sensor capacitors coupled in series, a clock signal generating part, an operational amplifier, a feedback capacitor, a compensating capacitor, and a compensating signal generating part. The clock signal generating part generates a first clock signal and the second clock signal applied to the first and second sensor capacitors, respectively. The compensating signal generating part generates a compensating signal applied to the compensating capacitor. The first clock signal and the second clock signal have the same frequency and the same amplitude and have phases being opposite each other. The compensating signal has a frequency same as the first clock signal and the second clock signal, has a phase same as one of the first clock signal and the second clock signal, and has an amplitude that is adjustable.Type: ApplicationFiled: February 2, 2010Publication date: September 2, 2010Applicant: DENSO CORPORATIONInventors: Keisuke Gotoh, Kentaro Mizuno, Norikazu Ohta