Abstract: An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.

Abstract: For the purpose of automated evaluation of white uniformity, the apparatus comprises a color television camera for picking up an image of white color displayed on the color cathode-ray tube, a circuit for separating color signals from the output signal of the color television camera, A/D converters for converting the analog color signals into digital color signals, memories for storing the digital color signals, and a computer for analyzing the contents of the memories. A nonuniform color portion is extracted from the color distribution of the display on the cathode-ray tube, and quantities of various features of the nonuniform color portion, for example, the hue, saturation and area of the nonuniform color portion and the degree of change in the saturation at the marginal edge contour of the nonuniform color portion are calculated by the computer to provide parameters used for evaluation of the white uniformity.