Patents by Inventor Keisuke Nagatsuka

Keisuke Nagatsuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing apparatus
    Patent number: 7674336
    Abstract: A thermal processing apparatus according to the present invention comprises a processing container having an opening part at a lower end thereof. The processing container can contain an object to be processed therein. The opening part can be opened and closed by a lid. A flange is provided at a periphery of the opening part. A gas-introducing part for introducing a gas into the processing container is provided in the flange. The object to be processed contained in the processing container is heated by a heating mechanism.
    Type: Grant
    Filed: October 18, 2004
    Date of Patent: March 9, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Manabu Honma, Yukio Ohizumi, Keisuke Nagatsuka
  • Processing apparatus
    Publication number: 20070075086
    Abstract: A thermal processing apparatus according to the present invention comprises a processing container having an opening part at a lower end thereof. The processing container can contain an object to be processed therein. The opening part can be opened and closed by a lid. A flange is provided at a periphery of the opening part. A gas-introducing part for introducing a gas into the processing container is provided in the flange. The object to be processed contained in the processing container is heated by a heating mechanism. arrangement room.
    Type: Application
    Filed: October 18, 2004
    Publication date: April 5, 2007
    Inventors: Manabu Honma, Yukio Ohizumi, Keisuke Nagatsuka