Abstract: A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).

Abstract: A curable photosensitive resin composition which can be cured at a relatively low temperature, has excellent developability and adhesion to a support, and a cured product that realizes low dielectric constant properties. A curable photosensitive resin composition containing a polyimide resin (A) which is a reaction product of monomer groups containing an aromatic tetracarboxylic anhydride (a1) and a diamine (a2) containing a dimer diamine, maleimides (B), and a polyfunctional polymerizable compound (C) having two or more ethylenic double bonds other than the component (A) and the component (B), a cured product, a photosensitive element, a resist pattern, a method of producing a resist pattern, a semiconductor device and an electronic device.

Abstract: A limited current type oxygen sensor comprises an oxygen ion conductive solid electrolyte, a detection element including a positive electrode and a negative electrode, and a heater element including a heater. The negative electrode is installed on one of the walls constituting a space communicating with a small hole for restricting the amount of oxygen to diffuse therethrough. The porous positive electrode and the heater are embedded in the oxygen ion conductive solid electrolyte layers.

Abstract: A limited current type oxygen sensor comprises a solid electrolyte element formed from material having high oxygen-ion conductivity such as yittria-stabilized zirconia. Electrodes are provided on the top surface and the bottom surface of the element and are formed by calcining a mixture of small ceramic particles that are relatively sinter-retardant as compared with oxygen-ion conducting ceramics, of 200 .ANG. in average particle size fine precious metal particles, and a binder. A cover is provided over the second electrode and the cover includes at least one diffusion orifice that permits ambient gas to diffuse toward the second electrode.