Abstract: There is provided a method of forming a predetermined film by alternately supplying a film-forming raw material gas and a reaction gas onto a workpiece by an atomic layer deposition (ALD), the method including: beginning an ALD-based film formation at a first temperature at which an adsorption of the film-forming raw material gas occurs; continuing the ALD-based film formation while increasing the first temperature; and completing the ALD-based film formation at a second temperature at which a decomposition of the film-forming raw material gas occurs.

Abstract: The present invention relates to an apparatus for measuring surface properties of a polishing pad which measures surface properties such as surface topography or surface condition of a polishing pad used for polishing a substrate such as a semiconductor wafer. The apparatus for measuring surface properties of a polishing pad includes a laser beam source configured to emit a laser beam, and a photodetector configured to detect scattered light that is reflected and scattered by the polishing pad, an optical Fourier transform being performed on the detected scattered light to produce an intensity distribution corresponding to a spatial wavelength spectrum based on surface topography of the polishing pad. The laser beam is applied to the polishing pad at such an incident angle that the laser beam does not reach a bottom portion of a pore formed in the surface of the polishing pad.

Abstract: A restriction control apparatus configured to perform restriction control of communication of a user apparatus in a mobile communication system includes an information obtaining unit configured to obtain, from a user information management apparatus in the mobile communication system, group identification information indicating a group to which the user apparatus belongs, and a restriction determination unit configured, when receiving a communication request from the user apparatus, to determine whether the group to which the user apparatus belongs is a control target or not based on the group identification information and group identification information of a control target determined by the restriction control apparatus.

Abstract: An object of the present invention is to provide a vehicle control apparatus capable of stabilizing a behavior of a vehicle when a regenerative braking force is generated. To achieve this object, a vehicle control apparatus according to one aspect of the present invention includes an electric motor configured to provide a regenerative braking force to left and right drive wheels that are one of front wheels and rear wheels, a friction braking device configured to provide a friction braking force to left and right trailer wheels that are the other of the front wheels and the rear wheels, and a behavior estimation unit configured to estimate a behavior of a vehicle. The vehicle control apparatus reduces the regenerative braking force and increases the friction braking force provided by the friction braking device, if the behavior estimation unit estimates a preset behavior when the regenerative braking force is generated.

Abstract: Provided is a control apparatus, a control method, and a control system for an electric vehicle that can prevent or reduce an unnecessary torque fluctuation on a wheel not targeted for slip control. A control apparatus for an electric vehicle limits a torque to be output to a non-target wheel according to a torque output to a target wheel after target wheel slip control is started, and updates a limit value of the torque to be output to the non-target wheel when a fluctuation range of the torque output to the target wheel falls within a predetermined range during the limitation.

Abstract: Virtual first logical volumes are provided to a host, a virtual second logical volume correlated with any one of the first logical volumes is created in a storage node in correlation with a storage control module disposed in the storage node, a correspondence relationship between the first and second logical volumes is managed as mapping information, a storage node which is an assigning distribution of an I/O request is specified on the basis of the mapping information in a case where the I/O request in which the first logical volume is designated as an I/O destination is given from the host, the I/O request is assigned to the storage control module of its own node in a case where the specified storage node is its own node, and the I/O request is assigned to another storage node in a case where the specified storage node is another storage node.

Abstract: There is provided a vertical heat treatment apparatus for forming a film by supplying a precursor gas to a plurality of substrates that are held in a substantially horizontal posture on a substrate holder with a predetermined interval in a vertical direction. The apparatus includes a processing container including an inner tube accommodating the substrate holder and an outer tube that is disposed outside the inner tube; and a gas nozzle that extends vertically along an inner peripheral surface of the inner tube and has a distal end that penetrates from an inside of the inner tube to an outside of the inner tube. A first gas hole for supplying the precursor gas to the inside of the inner tube and a second gas hole for supplying the precursor gas to the outside of the inner tube are formed on the gas nozzle.

Abstract: A method for manufacturing an integrated member and an integrated member manufactured by the method which can improve the joining strength and reduce the manufacturing cost. A method for manufacturing an integrated member by welding a first member formed of aluminum alloy material and a second member formed of ferrous-based material characterized in that the first member contains a predetermined amount of silicon and has a thickness larger than that of the second member. The second member can be pressed against the first member along the thickness direction, and by electrically energizing the pressed-in portion during the pressing period, electric resistance welding can be used. The pressing-in amount is set to a value larger than the thickness of the second member and less than that of the first member. The overlapping margin of the first and second members is set to a value of 0.5 mm or more.

Abstract: There is provided a method of forming a blocking silicon oxide film on a target surface on which a silicon oxide film and a silicon nitride film are exposed, including: placing a workpiece having the target surface on which the silicon oxide film and the silicon nitride film are exposed in a processing container under a depressurized atmosphere; forming a spacer polysilicon film to be a sacrificial film on the target surface on which the silicon oxide film and the silicon nitride film are exposed; and substituting the spacer polysilicon film with a substitution silicon oxide film by supplying thermal energy, oxygen radicals and hydrogen radicals onto the workpiece.

Abstract: A transmission device that includes a first shaft, a second shaft to which torque is transmitted from the first shaft via a torque transmitting mechanism, a tubular drive gear attached to the second shaft, and a driven gear that meshes with the drive gear, wherein the drive gear includes a plurality of outer teeth that are each meshed with a corresponding one of gear teeth of the driven gear and a fitting portion that is formed on an inner peripheral surface of the drive gear and that is fitted to the second shaft so that the drive gear rotates integrally with the second shaft.

Abstract: Virtual first logical volumes are provided to a host, a virtual second logical volume correlated with any one of the first logical volumes is created in a storage node in correlation with a storage control module disposed in the storage node, a correspondence relationship between the first and second logical volumes is managed as mapping information, a storage node which is an assigning distribution of an I/O request is specified on the basis of the mapping information in a case where the I/O request in which the first logical volume is designated as an I/O destination is given from the host, the I/O request is assigned to the storage control module of its own node in a case where the specified storage node is its own node, and the I/O request is assigned to another storage node in a case where the specified storage node is another storage node.

Abstract: The present invention relates to a compound or a pharmacologically acceptable salt thereof having excellent tissue non-specific alkaline phosphatase inhibitory activity. The present invention provides a compound represented by the formula (I): wherein R1 represents a hydrogen atom, an optionally substituted C1-6 alkyl group, or the like, R2 and R3 are the same or different and each represent a hydrogen atom, an optionally substituted C1-6 alkyl group, or the like, R4 and R5 are the same or different and each represent a hydrogen atom, an optionally substituted C1-6 alkyl group, or the like, R6 represents a hydrogen atom or the like, each R7 may be the same or different and may each represent an optionally substituted C1-6 alkoxy group or the like, X represents —CH?, —C(—R7)?, or —N?, and m represents 1 to 4, or a pharmacologically acceptable salt thereof.

Abstract: A body frame structure forming a side part of an automobile includes an outer panel, an inner panel that forms a closed space elongated in a first direction between the inner panel and the outer panel, a metal outer R/F disposed within the closed space, a resin R/F disposed within the closed space, and a foam disposed within the closed space. The closed space includes a three-layer structure including the outer R/F, the resin R/F, and the foam filling a space between the outer R/F and the resin R/F.

Abstract: An abnormality determination device according to one aspect of the present disclosure is an abnormality determination device that determines an abnormality of an inducer used for a pump, the abnormality determination device including a stress-response acquisition unit that acquires a stress response indicating a temporal change in stress applied to the inducer, an accumulated-fatigue-damage-degree calculation unit that calculates an accumulated fatigue-damage degree of the inducer based on the stress response, a lifetime-consumption-rate calculation unit that calculates a lifetime consumption rate that is a changing rate of the accumulated fatigue-damage degree with respect to time, and a determination unit that determines an abnormality of the inducer based on the accumulated fatigue-damage degree and the lifetime consumption rate, in which the inducer is used only for a predetermined use time per operation of the pump.

Abstract: The invention provides a mobile communication system, a network node, and a mobile communication method, which can cause user equipment of a particular type to attach to a dedicated network regardless of whether or not the user equipment supports a low access priority indicator (LAPI). An MME (60) acquires subscriber information on UE (10) from an HSS (70) based on an attachment request from the UE (10) forwarded by an eNB (50), the subscriber information including availability for the UE (10) to use the dedicated network, and sends the eNB (50) a selection instruction to select the dedicated network based on the acquired subscriber information. When the eNB (50) receives the selection instruction from the MME (60), the eNB (50) determines a dedicated MME (60D) constituting the dedicated network, and transmits the attachment request from the UE (10) to the determined dedicated MME (60D).

Abstract: A restriction control apparatus configured to perform restriction control of communication of a user apparatus in a mobile communication system includes an information obtaining unit configured to obtain, from a user information management apparatus in the mobile communication system, group identification information indicating a group to which the user apparatus belongs, and a restriction determination unit configured, when receiving a communication request from the user apparatus, to determine whether the group to which the user apparatus belongs is a control target or not based on the group identification information and group identification information of a control target determined by the restriction control apparatus.

Abstract: Provided is a driving force control device capable of stabilizing a vehicle behavior when a driving torque of a drive wheel is controlled. When slip suppression control is carried out to decrease a driving torque of a drive source that is connected to the drive wheel of a vehicle via a speed reduction mechanism and a drive shaft, and is configured to generate a torque for braking or driving the drive wheel, to thereby suppress a slip state of the drive wheel, the driving torque of the drive source is controlled so that a slip ratio of the drive wheel is in an area of the slip ratio smaller than a slip ratio corresponding to a peak value of a road surface friction coefficient in a characteristic of the road surface friction coefficient with respect to the slip ratio.

Abstract: Provided is a control device for an electric vehicle capable of stabilizing vehicle behavior when performing slip control of drive wheels. The control device for an electric vehicle according to the present invention is a control device for an electric vehicle to be used in an electric vehicle, the electric vehicle including: a motor which is connected to the drive wheels of the electric vehicle via a differential gear and a drive shaft, and which is configured to generate a braking or driving torque for each of the drive wheels; and a mechanical braking device capable of independently generating a braking force for each of the drive wheels.

Abstract: A backup control method includes receiving a plurality of pieces of data transmitted from a plurality of data storage devices, classifying the plurality of pieces of data into respective data groups in accordance with the plurality of data storage devices of transmission sources, generating first compressed data by compressing one or more pieces of data classified into a first data group, and transmitting the first compressed data to a backup device storing backups.

Abstract: An object of the present invention is to provide a control apparatus for an electric vehicle that can achieve an effect of eliminating or reducing a vibration regardless of a rotational direction of a wheel. According to one embodiment of the present invention, a first vibration damping control torque calculated by a first calculation method based on a signal of a wheel speed sensor when an electric vehicle moves forward, or a second vibration damping control torque calculated by a second calculation method different from the first calculation method when the electric vehicle moves backward is selectively output.