Abstract: A method of adjusting heat uniformity on a wafer mounting surface of a wafer mount having a ceramic base including the wafer mounting surface which can heat a wafer through energization and a cooling plate includes: a) preparing the wafer mount including the cooling plate including: a base including a flow path of a coolant; and a lid detachable from the base; b) measuring a temperature distribution with the lid being attached on the base while heating through the energization and cooling; c) detaching the lid and locally adjusting a shape of the flow path when the temperature distribution does not satisfy a predetermined criterion; and d) remeasuring the temperature distribution after adjusting the shape of the flow path, with the lid being attached on the base while heating through the energization and cooling, wherein the steps c) and d) are repeated until the remeasured temperature distribution satisfies the criterion.

Abstract: A wafer placement apparatus includes a ceramic plate having an upper surface as a wafer placement surface and in which an electrode is embedded; and a cooling plate provided on a lower surface, opposite a wafer placement surface, of a ceramic plate and in which a refrigerant passage is provided, wherein a refrigerant passage includes a first passage forming a single continuous line and extending parallel to a wafer placement surface, and a second passage forming a single continuous line and extending along a first passage, an outlet of a second passage being positioned near an inlet of a first passage, an inlet of a second passage being positioned near an outlet of a first passage.

Abstract: Embodiments of the present invention include a filter element for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst and a co-catalyst. The embodiments of the present invention also includes a system for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst and a co-catalyst; and a method using the system.

Abstract: A wafer placement apparatus includes a ceramic plate having an upper surface as a wafer placement surface and in which an electrode is embedded; and a cooling plate provided on a lower surface, opposite a wafer placement surface, of a ceramic plate and in which a refrigerant passage is provided, wherein a refrigerant passage includes a first passage forming a single continuous line and extending parallel to a wafer placement surface, and a second passage forming a single continuous line and extending along a first passage, an outlet of a second passage being positioned near an inlet of a first passage, an inlet of a second passage being positioned near an outlet of a first passage.

Abstract: Embodiments of the present invention include a filter element for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst and a co-catalyst. The embodiments of the present invention also includes a system for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst and a co-catalyst; and a method using the system.

Abstract: Embodiments of the present invention include a filter element for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst. The embodiments of the present invention also includes a system for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst; and a method using the system.

Abstract: A powder coating apparatus for attaching powder to a film includes a forwarding roll which forwards the film; a take-up roll which is arranged on the downstream side of a conveyance direction of the film with respect to the forwarding roll and which takes up the film; a film-forming nozzle which is arranged between the forwarding roll and the take-up roll in the conveyance direction so as to be opposed to the film and which jets the powder; a first casing or a second casing which accommodates the forwarding roll and the take-up roll; an apparatus casing which accommodates the film-forming nozzle, the first casing, and the second casing; and a pressure adjustment unit configured to set an internal pressure of the first casing and the second casing to be higher than an internal pressure of the apparatus casing.

Abstract: In an embodiment, there is provided a photocatalyst element comprising: a porous resin base material that comprises interconnecting pores, and a three-dimensional network skeleton forming the pores; and a photocatalyst which is supported on a surface of the three-dimensional network skeleton of the porous resin base material and/or contained in the three-dimensional network skeleton of the porous resin base material. The photocatalyst element has excellent antimicrobial effects.

Abstract: A method for producing a metal oxide-polymer laminate, including preparing a polymer layer, and forming a metal oxide layer on a surface of the polymer layer by an aerosol deposition method so that at least a portion of the metal oxide layer is embedded in the polymer layer in a thickness direction thereof.

Abstract: A method for producing a metal oxide-polymer laminate, including preparing a polymer layer, and forming a metal oxide layer on a surface of the polymer layer by an aerosol deposition method so that at least a portion of the metal oxide layer is embedded in the polymer layer in a thickness direction thereof.

Abstract: There is provided a photocatalyst sheet comprising a base material and a photocatalyst layer containing at least a photocatalyst, wherein the photocatalyst layer is firmly adhered to the base material. In an embodiment, there is provided a photocatalyst sheet comprising a base material; and a photocatalyst layer that contains at least a photocatalyst, and is formed on at least one surface of the base material through an aerosol deposition method. This photocatalyst sheet has an excellent photocatalytic activity and an excellent adhesion.

Abstract: The lithium metal secondary battery includes a negative electrode active material layer containing lithium metal, a positive electrode active material layer, and a separator disposed between the negative electrode active material layer and the positive electrode active material layer. The separator is porous and contains ion conducting inorganic oxide, and an electrolyte is present in the separator and in the positive electrode active material layer.

Abstract: A powder coating apparatus for attaching powder to a film includes a forwarding roll which forwards the film; a take-up roll which is arranged on the downstream side of a conveyance direction of the film with respect to the forwarding roll and which takes up the film; a film-forming nozzle which is arranged between the forwarding roll and the take-up roll in the conveyance direction so as to be opposed to the film and which jets the powder; a first casing or a second casing which accommodates the forwarding roll and the take-up roll; an apparatus casing which accommodates the film-forming nozzle, the first casing, and the second casing; and a pressure adjustment unit configured to set an internal pressure of the first casing and the second casing to be higher than an internal pressure of the apparatus casing.

Abstract: In an embodiment, there is provided a photocatalyst element comprising: a porous resin base material that comprises interconnecting pores, and a three-dimensional network skeleton forming the pores; and a photocatalyst which is supported on a surface of the three-dimensional network skeleton of the porous resin base material and/or contained in the three-dimensional network skeleton of the porous resin base material. The photocatalyst element has excellent antimicrobial effects.

Abstract: A metal oxide-polymer laminate includes a polymer layer, and a metal oxide layer laminated on a surface of the polymer layer and formed by an aerosol deposition method. At least a portion of the metal oxide layer is embedded in the polymer layer in a thickness direction thereof.

Abstract: There is provided a photocatalyst sheet comprising a base material and a photocatalyst layer containing at least a photocatalyst, wherein the photocatalyst layer is firmly adhered to the base material. In an embodiment, there is provided a photocatalyst sheet comprising a base material; and a photocatalyst layer that contains at least a photocatalyst, and is formed on at least one surface of the base material through an aerosol deposition method. This photocatalyst sheet has an excellent photocatalytic activity and an excellent adhesion.

Abstract: Embodiments of the present invention include a filter element for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst. The embodiments of the present invention also includes a system for decomposing contaminants including a substrate, and a photocatalytic composition comprising at least a photocatalyst; and a method using the system.

Abstract: A metal oxide-polymer laminate includes a polymer layer, and a metal oxide layer laminated on a surface of the polymer layer and formed by an aerosol deposition method. At least a portion of the metal oxide layer is embedded in the polymer layer in a thickness direction thereof.

Abstract: A solar heat collector includes a heat collecting board, a solar radiation absorbing layer provided at one surface in a thickness direction of the heat collecting board, and a low emissivity and low solar reflectance layer provided at one surface in the thickness direction of the solar radiation absorbing layer.