Patents by Inventor Keith H. Ballenger

Keith H. Ballenger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactor filament assembly with enhanced misalignment tolerance
    Patent number: 10450649
    Abstract: A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge and/or the support chucks, so that the connections are insensitive at least to small variations in tilt angle of the vertical filaments and/or the horizontal bridge. The shaped elements can be incorporated into or separate and cooperative with the bridge and/or the chucks. Various embodiments are described.
    Type: Grant
    Filed: January 29, 2014
    Date of Patent: October 22, 2019
    Assignee: GTAT Corporation
    Inventors: Aaron D Rhodes, Keith H Ballenger
  • REACTOR FILAMENT ASSEMBLY WITH ENHANCED MISALIGNMENT TOLERANCE
    Publication number: 20150211111
    Abstract: A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge and/or the support chucks, so that the connections are insensitive at least to small variations in tilt angle of the vertical filaments and/or the horizontal bridge. The shaped elements can be incorporated into or separate and cooperative with the bridge and/or the chucks. Various embodiments are described.
    Type: Application
    Filed: January 29, 2014
    Publication date: July 30, 2015
    Applicant: GTAT CORPORATION
    Inventors: Aaron D. Rhodes, Keith H. Ballenger