Patents by Inventor Keith T. Wong

Keith T. Wong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120195
    Abstract: A method includes forming a conductive material on a first dielectric layer, exposing the conductive material to aniline to produce a passivated surface of the conductive material, and after exposing the conductive material to aniline, forming a second dielectric layer on the first dielectric layer using a deposition process. The deposition process is a water-free and plasma-free deposition process, and the second dielectric layer does not form on the passivated surface of the conductive material.
    Type: Application
    Filed: October 6, 2022
    Publication date: April 11, 2024
    Inventors: Keith T. Wong, Srinivas D. Nemani, Ellie Y. Yieh, Andrew C. Kummel, Yunil Cho, James Huang
  • Publication number: 20240035152
    Abstract: Methods of depositing a molybdenum sulfide film with increased sulfur:molybdenum ratio are described. The methods include pre-cleaning a dielectric material with oxygen radicals prior to formation of a molybdenum sulfide film that has a lower oxygen content than would be formed without the pre-cleaning.
    Type: Application
    Filed: October 10, 2023
    Publication date: February 1, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Keith T. Wong, Hyojin Kim
  • Patent number: 11821079
    Abstract: Methods of depositing a molybdenum sulfide film with increased sulfur:molybdenum ratio are described. The methods include pre-cleaning a dielectric material with oxygen radicals prior to formation of a molybdenum sulfide film that has a lower oxygen content than would be formed without the pre-cleaning.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: November 21, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Keith T. Wong, HyoJin Kim
  • Publication number: 20230187204
    Abstract: Provided are methods for pre-cleaning a substrate. A substrate having tungsten oxide (WOx) thereon is soaked in tungsten fluoride (WF6), which reduces the tungsten oxide (WOx) to tungsten (W). Subsequently, the substrate is treated with hydrogen, e.g., plasma treatment or thermal treatment, to reduce the amount of fluorine present so that fluorine does not invade the underlying insulating layer.
    Type: Application
    Filed: June 20, 2022
    Publication date: June 15, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Xiaodong Wang, Kevin Kashefi, Rongjun Wang, Shi You, Keith T. Wong, Yuchen Liu, Ya-Hsi Hwang, Jean Lu
  • Patent number: 11626284
    Abstract: A method to form a 2-Dimensional transistor channel may include depositing an amorphous layer comprising a 2-dimensional material, implanting an implant species into the amorphous layer; and annealing the amorphous layer after the implanting. As such, the amorphous layer may form a doped crystalline layer.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: April 11, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Keith T. Wong, Hurshvardhan Srivastava, Srinivas D. Nemani, Johannes M. van Meer, Rajesh Prasad
  • Publication number: 20220139765
    Abstract: Exemplary deposition methods may include introducing a vapor of a metal alkoxide into a processing volume of a semiconductor processing chamber. A substrate defining a trench may be housed in the processing volume. The methods may include condensing the vapor into a liquid metal alkoxide within the trench on the substrate. The methods may include forming a plasma external to the processing volume of the semiconductor processing chamber. The methods may include introducing plasma-generated species into the processing volume. The methods may include exposing the liquid metal alkoxide in the trench to the plasma-generated species. The methods may also include forming a metal oxide film in the trench through a reaction between the liquid metal alkoxide and the plasma-generated species.
    Type: Application
    Filed: November 1, 2021
    Publication date: May 5, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Hurshvardhan Srivastava, Keith T. Wong
  • Publication number: 20220108886
    Abstract: A method to form a 2-Dimensional transistor channel may include depositing an amorphous layer comprising a 2-dimensional material, implanting an implant species into the amorphous layer; and annealing the amorphous layer after the implanting. As such, the amorphous layer may form a doped crystalline layer.
    Type: Application
    Filed: January 15, 2021
    Publication date: April 7, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Keith T. Wong, Hurshvardhan Srivastava, Srinivas D. Nemani, Johannes M. van Meer, Rajesh Prasad
  • Publication number: 20210087677
    Abstract: Methods of depositing a molybdenum sulfide film with increased sulfur:molybdenum ratio are described. The methods include pre-cleaning a dielectric material with oxygen radicals prior to formation of a molybdenum sulfide film that has a lower oxygen content than would be formed without the pre-cleaning.
    Type: Application
    Filed: September 22, 2020
    Publication date: March 25, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Keith T. Wong, HyoJin Kim
  • Publication number: 20190393029
    Abstract: Methods of depositing thin films of hafnium oxide possessing strong ferroelectric properties are described. A hafnium oxide monolayer is formed in a first process cycle comprising sequential exposure of a substrate to a hafnium precursor, purge gas, first oxidant and purge gas. A doped hafnium oxide monolayer is formed in a second process cycle comprising sequential exposure of the substrate to a hafnium precursor, purge gas, dopant precursor, purge gas, second oxidant and purge gas. Thin films of hafnium oxide are also described.
    Type: Application
    Filed: June 7, 2019
    Publication date: December 26, 2019
    Inventors: Golnaz Karbasian, Keith T. Wong
  • Publication number: 20100300563
    Abstract: Provided is a sequenced fluid control device that includes a pneumatic driver module, a fluid cartridge having at least one fluid chamber and at least one waste chamber, and at least one sample delivery element disposed to sealably contact the fluid cartridge forming a main chamber containing a sample, where the fluid cartridge is also disposed to sealably contact the pneumatic driver module. The pneumatic driver module injects gas into or withdraws gas from the fluid cartridge, where the gas directly contacts at least one fluid causing at least one fluid to flow through channels disposed to connect at least one fluid chamber to the sample delivery element and disposed to connect the sample delivery element to the at least one waste chamber or waste channel, where a sample on the sample delivery element is exposed to the at least one fluid.
    Type: Application
    Filed: May 27, 2010
    Publication date: December 2, 2010
    Inventors: John Ramunas, Juan G. Santiago, Helen M. Blau, Keith T. Wong, Viktor Shkolnikov, Karl Stahl, Khaesha Hall, Kevin Nam Truong, Jason L. Chua
  • Patent number: 7799501
    Abstract: Methods for making dispersions, which are of various rheologies, various pigment/binder ratios, various particle sizes, and possess less impurities or large particles are provided. These dispersions may be utilized to form layers of photoreceptors.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: September 21, 2010
    Assignee: Xerox Corporation
    Inventors: Lanhui Zhang, Lin Ma, Keith T. Wong
  • Publication number: 20080299484
    Abstract: Methods for making dispersions, which are of various rheologies, various pigment/binder ratios, various particle sizes, and possess less impurities or large particles are provided. These dispersions may be utilized to form layers of photoreceptors.
    Type: Application
    Filed: May 31, 2007
    Publication date: December 4, 2008
    Inventors: Lanhui Zhang, Lin Ma, Keith T. Wong