Patents by Inventor Kelin Kuhn

Kelin Kuhn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11996129
    Abstract: A semiconductor device includes ferromagnetic, magnetostrictive layer that exhibits a biaxial magnetic anisotropy and an underlying structure exhibits a spin Hall effect to provide a conversion between electrical energy and magnetic energy with more than two distinctive magnetic states, wherein the underlying structure includes a piezoelectric material structure and a spin Hall metal layer.
    Type: Grant
    Filed: June 12, 2017
    Date of Patent: May 28, 2024
    Assignees: Cornell University, The Curators of the University of Missouri, The Regents of the University of Michigan, Oregon State University
    Inventors: Darrell Schlom, Mostafizur Rahman, Kelin Kuhn, John Heron
  • Publication number: 20230186961
    Abstract: This patent document provides implementations and examples of circuits and devices based on low-energy consumption semiconductor structures exhibiting multi-valued states. In one aspect, a semiconductor device is configured to comprise: a multi-layer structure forming a magnetoelectric or multiferroic system to include a ferromagnetic, magnetostrictive layer that exhibits a biaxial magnetic anisotropy and an underlying metal structure exhibits a spin Hall effect to provide a conversion between electrical energy and magnetic energy with more than two distinctive magnetic states.
    Type: Application
    Filed: June 12, 2017
    Publication date: June 15, 2023
    Inventors: Darrell Schlom, Mostafizur Rahman, Kelin Kuhn, John Heron
  • Patent number: 10121861
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: November 6, 2018
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Seiyon Kim, Kelin Kuhn, Willy Rachmady, Jack Kavalieros
  • Patent number: 10115822
    Abstract: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods/structures may include forming a source/drain region in a substrate of a device, and forming an alloy in the source/drain region, wherein the alloy comprises a material that decreases a band gap between source/drain contacts and the source/drain regions to substantially zero. The embodiments herein reduce an external parasitic resistance of the device.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: October 30, 2018
    Assignee: Intel Corporation
    Inventors: Rafael Rios, Roza Kotlyar, Kelin Kuhn
  • Patent number: 9947805
    Abstract: Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
    Type: Grant
    Filed: May 10, 2016
    Date of Patent: April 17, 2018
    Assignee: Intel Corporation
    Inventors: Chytra Pawashe, Kevin Lin, Anurag Chaudhry, Raseong Kim, Seiyon Kim, Kelin Kuhn, Sasikanth Manipatruni, Rafael Rios, Ian A. Young
  • Patent number: 9825130
    Abstract: A nanowire device of the present description may include a highly doped underlayer formed between at least one nanowire transistor and the microelectronic substrate on which the nanowire transistors are formed, wherein the highly doped underlayer may reduce or substantially eliminate leakage and high gate capacitance which can occur at a bottom portion of a gate structure of the nanowire transistors. As the formation of the highly doped underlayer may result in gate inducted drain leakage at an interface between source structures and drain structures of the nanowire transistors, a thin layer of undoped or low doped material may be formed between the highly doped underlayer and the nanowire transistors.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: November 21, 2017
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Kelin Kuhn, Rafael Rios, Mark Armstrong
  • Patent number: 9614060
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one underlayer etch stop formed during the fabrication of at least one nanowire transistor in order to assist in protecting source structures and/or drain structures from damage that may result from fabrication processes. The underlayer etch stop may prevent damage to the source structures and/or drain the structures, when the material used in the fabrication of the source structures and/or the drain structures is susceptible to being etched by the processes used in the removal of the sacrificial materials, i.e. low selectively to the source structure and/or the drain structure materials, such that potential shorting between the transistor gate electrodes and contacts formed for the source structures and/or the drain structures may be prevented.
    Type: Grant
    Filed: June 6, 2016
    Date of Patent: April 4, 2017
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Daniel Aubertine, Kelin Kuhn, Anand Murthy
  • Publication number: 20160329438
    Abstract: Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
    Type: Application
    Filed: May 10, 2016
    Publication date: November 10, 2016
    Inventors: Chytra Pawashe, Kevin Lin, Anurag Chaudhry, Raseong Kim, Seiyon Kim, Kelin Kuhn, Sasikanth Manipatruni, Rafael Rios, Ian A. Young
  • Publication number: 20160284821
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one underlayer etch stop formed during the fabrication of at least one nanowire transistor in order to assist in protecting source structures and/or drain structures from damage that may result from fabrication processes. The underlayer etch stop may prevent damage to the source structures and/or drain the structures, when the material used in the fabrication of the source structures and/or the drain structures is susceptible to being etched by the processes used in the removal of the sacrificial materials, i.e. low selectively to the source structure and/or the drain structure materials, such that potential shorting between the transistor gate electrodes and contacts formed for the source structures and/or the drain structures may be prevented.
    Type: Application
    Filed: June 6, 2016
    Publication date: September 29, 2016
    Applicant: Intel Corporation
    Inventors: Seiyon Kim, Daniel Aubertine, Kelin Kuhn, Anand Murthy
  • Patent number: 9385221
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one underlayer etch stop formed during the fabrication of at least one nanowire transistor in order to assist in protecting source structures and/or drain structures from damage that may result from fabrication processes. The underlayer etch stop may prevent damage to the source structures and/or drain the structures, when the material used in the fabrication of the source structures and/or the drain structures is susceptible to being etched by the processes used in the removal of the sacrificial materials, i.e. low selectively to the source structure and/or the drain structure materials, such that potential shorting between the transistor gate electrodes and contacts formed for the source structures and/or the drain structures may be prevented.
    Type: Grant
    Filed: April 16, 2015
    Date of Patent: July 5, 2016
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Daniel Aubertine, Kelin Kuhn, Anand Murthy
  • Publication number: 20160181424
    Abstract: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods/structures may include forming a source/drain region in a substrate of a device, and forming an alloy in the source/drain region, wherein the alloy comprises a material that decreases a band gap between source/drain contacts and the source/drain regions to substantially zero. The embodiments herein reduce an external parasitic resistance of the device.
    Type: Application
    Filed: September 26, 2013
    Publication date: June 23, 2016
    Applicant: Intel Corporation
    Inventors: Rafael RIOS, Roza KOTLYAR, Kelin KUHN
  • Patent number: 9362074
    Abstract: Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: June 7, 2016
    Assignee: Intel Corporation
    Inventors: Chytra Pawashe, Kevin Lin, Anurag Chaudhry, Raseong Kim, Seiyon Kim, Kelin Kuhn, Sasikanth Manipatruni, Rafael Rios, Ian A. Young
  • Publication number: 20150221744
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one underlayer etch stop formed during the fabrication of at least one nanowire transistor in order to assist in protecting source structures and/or drain structures from damage that may result from fabrication processes. The underlayer etch stop may prevent damage to the source structures and/or drain the structures, when the material used in the fabrication of the source structures and/or the drain structures is susceptible to being etched by the processes used in the removal of the sacrificial materials, i.e. low selectively to the source structure and/or the drain structure materials, such that potential shorting between the transistor gate electrodes and contacts formed for the source structures and/or the drain structures may be prevented.
    Type: Application
    Filed: April 16, 2015
    Publication date: August 6, 2015
    Applicant: Intel Corporation
    Inventors: Seiyon Kim, Daniel Aubertine, Kelin Kuhn, Anand Murthy
  • Patent number: 9064944
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one underlayer etch stop formed during the fabrication of at least one nanowire transistor in order to assist in protecting source structures and/or drain structures from damage that may result from fabrication processes. The underlayer etch stop may prevent damage to the source structures and/or drain the structures, when the material used in the fabrication of the source structures and/or the drain structures is susceptible to being etched by the processes used in the removal of the sacrificial materials, i.e. low selectively to the source structure and/or the drain structure materials, such that potential shorting between the transistor gate electrodes and contacts formed for the source structures and/or the drain structures may be prevented.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: June 23, 2015
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Daniel Aubertine, Kelin Kuhn, Anand Murthy
  • Publication number: 20150129830
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor.
    Type: Application
    Filed: March 15, 2013
    Publication date: May 14, 2015
    Inventors: Seung Hoon Sung, Kelin Kuhn, Seiyon Kim, Jack Kavalieros, Willy Rachmady
  • Publication number: 20140264280
    Abstract: A nanowire device of the present description may be produced with the incorporation of at least one underlayer etch stop formed during the fabrication of at least one nanowire transistor in order to assist in protecting source structures and/or drain structures from damage that may result from fabrication processes. The underlayer etch stop may prevent damage to the source structures andor drain the structures, when the material used in the fabrication of the source structures andor the drain structures is susceptible to being etched by the processes used in the removal of the sacrificial materials, i.e. low selectively to the source structure and/or the drain structure materials, such that potential shorting between the transistor gate electrodes and contacts formed for the source structures andor the drain structures may be prevented.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Inventors: Seiyon Kim, Daniel Aubertine, Kelin Kuhn, Anand Murthy
  • Publication number: 20140262707
    Abstract: Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Inventors: Chytra Pawashe, Kevin Lin, Anurag Chaudhry, Raseong Kim, Seiyon Kim, Kelin Kuhn, Sasikanth Manipatruni, Rafael Rios, Ian A. Young
  • Publication number: 20140264253
    Abstract: A nanowire device of the present description may include a highly doped underlayer formed between at least one nanowire transistor and the microelectronic substrate on which the nanowire transistors are formed, wherein the highly doped underlayer may reduce or substantially eliminate leakage and high gate capacitance which can occur at a bottom portion of a gate structure of the nanowire transistors. As the formation of the highly doped underlayer may result in gate inducted drain leakage at an interface between source structures and drain structures of the nanowire transistors, a thin layer of undoped or low doped material may be formed between the highly doped underlayer and the nanowire transistors.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 18, 2014
    Inventors: Seiyon Kim, Kelin Kuhn, Rafael Rios, Mark Armstrong
  • Patent number: 8487348
    Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
    Type: Grant
    Filed: August 17, 2012
    Date of Patent: July 16, 2013
    Assignee: Intel Corporation
    Inventors: Stephen M. Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
  • Publication number: 20120305990
    Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
    Type: Application
    Filed: August 17, 2012
    Publication date: December 6, 2012
    Inventors: Stephen M Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn