Patents by Inventor Ken Mun Loo

Ken Mun Loo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCH
    Publication number: 20090000641
    Abstract: In one aspect, a method of cleaning an electronic device manufacturing process chamber part is provided, including a) spraying the part with an acid; b) spraying the part with DI water; and c) treating the part with potassium hydroxide. Other aspects are provided.
    Type: Application
    Filed: June 26, 2008
    Publication date: January 1, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Liyuan Bao, Ken Mun Loo, Samantha S.H. Tan