Patents by Inventor Ken O'Neill

Ken O'Neill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer system for semiconductor processing equipment
    Patent number: 6293749
    Abstract: A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A robotic arm end effector engaging only the lower surface of the outer edge of the wafer permits hot wafer pick-up and unloading by the inner susceptor section. Several end effectors are disclosed that minimize non-uniform thermal effect on the substrate.
    Type: Grant
    Filed: November 17, 1998
    Date of Patent: September 25, 2001
    Assignee: ASM America, Inc.
    Inventors: Ivo Raaijmakers, Loren R. Jacobs, Michael W. Halpin, James A. Alexander, Ken O'Neill, Dennis L. Goodwin
  • Substrate transfer system for semiconductor processing equipment
    Patent number: 6068441
    Abstract: A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A fork type robotic arm end effector permits wafer pick up and unloading by the inner susceptor section.
    Type: Grant
    Filed: November 21, 1997
    Date of Patent: May 30, 2000
    Assignee: ASM America, Inc.
    Inventors: Ivo Raaijmakers, Loren Jacobs, Mike Halpin, Jim Alexander, Ken O'Neill, Dennis Lee Goodwin