Patents by Inventor Kendrick H. Chaney

Kendrick H. Chaney has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS
    Publication number: 20220282379
    Abstract: An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.
    Type: Application
    Filed: March 2, 2021
    Publication date: September 8, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Zohreh Razavi Hesabi, Cong Trinh, Kevin Griffin, Alexander V. Garachtchenko, Kenric Choi, Vipin Jose, Saloni Sawalkar, Maribel Maldonado-Garcia, Kendrick H. Chaney
  • METHODS OF ATOMIC LAYER DEPOSITION
    Publication number: 20220081769
    Abstract: Methods for depositing metal-containing films on a substrate are described. The substrate is exposed to a metal precursor and an in situ steam generated oxidant to form the metal-containing film (e.g., metal oxide). The exposures can be sequential or simultaneous. An atomic layer deposition method is described that includes a forming gas anneal operation as part of the deposition method.
    Type: Application
    Filed: September 14, 2020
    Publication date: March 17, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Kendrick H. Chaney, Tatsuya E. Sato