Abstract: A method for manufacturing a solid-state image pickup device is provided. In this method, a pixel isolation member is formed in a semiconductor substrate including pixels, and the thickness of the substrate is reduced by CMP. For forming the pixel isolation member, a first pixel isolation member is formed by implanting impurity ions in a region of the substrate so that the pixels are disposed between portions of the region when viewed from a surface of the substrate. A second isolation member is also formed by forming a trench in a region of the substrate different from the first pixel isolation member so that the pixels are disposed between portions of the region, and then filling the trench with an electroconductive material harder to polish by CMP than the substrate. The CMP is performed on the rear side of the substrate using the second pixel isolation member as a stopper.

Abstract: A film forming method includes the steps of forming a F-doped carbon film by using a source gas containing C and F, and modifying the F-doped carbon film by radicals, the source gas having a F/C ratio larger than 1 smaller than 2, the F/C ratio being defined as a ratio of a number of F atoms to a number of C atoms in a source gas molecule.

Abstract: A film forming method includes the steps of forming a F-doped carbon film by using a source gas containing C and F, and modifying the F-doped carbon film by radicals, the source gas having a F/C ratio larger than 1 and smaller than 2, the F/C ratio being defined as a ratio of a number of F atoms to a number of C atoms in a source gas molecule.

Abstract: A dielectric film (91) made of CF is deposited on a substrate. A protective layer comprising an SiCN film (93) is formed on the dielectric film (91). A film (94) serving as a hardmask made of SiCO is deposited on the protective layer by a plasma containing active species of silicon, carbon, and oxygen. When the protective layer is formed, an SiC film (92) is deposited on the dielectric film (91) by a plasma containing active species of silicon and carbon, and thereafter the SiCN film (93) is deposited on the SiC film (92) by a plasma containing active species of silicon, carbon, and nitrogen.

Abstract: The present invention provides a method for positively acquiring projection data for reconstructing a CT image at a slice position outside the linear movement range. When performing “projection data acquisition” with “rotating” and “linearly moving” the X-ray tube and the multidetector, a holding time is provided in which only the “rotation” is performed without “linear movement” at the starting point and the end point of the linear movement. By adjusting the holding time, the projection data in the view angle range required for image reconstruction of a CT at the slice position outside the linear movement range can be positively acquired, when the rotating velocity is slower or when the linear movement velocity is faster.

Abstract: An X-ray CT apparatus enables decreasing the degradation of image quality and reducing futile exposure to X-ray in a helical shuttle scan. The X-ray CT apparatus comprises: a gantry rotating device having an X-ray generator for generating the X-ray and an X-ray detector for detecting the generated X-ray and transmitted through a subject; a gantry controller for performing the helical shuttle scan by reciprocally moving the gantry rotating device and the cradle; a scan condition setting device for setting the scan condition of the helical shuttle scan in a predetermined range in the direction of body axis of the subject; an X-ray projection data acquisition device for acquiring the X-ray projection data; a scan controller for controlling the scan as specified in the scan condition; and a image reconstruction device for performing the image reconstruction processing based on the X-ray projection data.

Abstract: An X-ray CT apparatus enables decreasing the degradation of image quality and reducing futile exposure to X-ray in a helical shuttle scan. The X-ray CT apparatus comprises: a gantry rotating device having an X-ray generator for generating the X-ray and an X-ray detector for detecting the generated X-ray and transmitted through a subject; a gantry controller for performing the helical shuttle scan by reciprocally moving the gantry rotating device and the cradle; a scan condition setting device for setting the scan condition of the helical shuttle scan in a predetermined range in the direction of body axis of the subject; an X-ray projection data acquisition device for acquiring the X-ray projection data; a scan controller for controlling the scan as specified in the scan condition; and a image reconstruction device for performing the image reconstruction processing based on the X-ray projection data.

Abstract: A dielectric film (91) made of CF is deposited on a substrate. A protective layer comprising an SiCN film (93) is formed on the dielectric film (91). A film (94) serving as a hardmask made of SiCO is deposited on the protective layer by a plasma containing active species of silicon, carbon, and oxygen. When the protective layer is formed, an SiC film (92) is deposited on the dielectric film (91) by a plasma containing active species of silicon and carbon, and thereafter the SiCN film (93) is deposited on the SiC film (92) by a plasma containing active species of silicon, carbon, and nitrogen.

Abstract: The present invention provides a method for positively acquiring projection data for reconstructing a CT image at a slice position outside the linear movement range. When performing “projection data acquisition” with “rotating” and “linearly moving” the X-ray tube and the multidetector, a holding time is provided in which only the “rotation” is performed without “linear movement” at the starting point and the end point of the linear movement. By adjusting the holding time, the projection data in the view angle range required for image reconstruction of a CT at the slice position outside the linear movement range can be positively acquired, when the rotating velocity is slower or when the linear movement velocity is faster.

Abstract: A fluorine-containing carbon film excellent in heat stability is formed by using C5F8 gas having a moisture content of 60×10?9 volume ratio or below. A purifier 2 packed with particles having hydrophilic or reducing surface layers is placed in a gas supply line connecting a process gas source 1 for supplying C5F8 gas and a film deposition unit 3 for depositing a fluorine-containing carbon film on a substrate by using a plasma produced by ionizing C5F8 gas. C5F8 gas is passed through the purifier 2 to remove moisture from the C5F8 gas. The C5F8 gas supplied to the film deposition unit 3 to deposit a fluorine-containing carbon film has a moisture content on the order of 20×10?9 volume ratio. A fluorine-containing carbon film thus deposited contains a very small amount of moisture.

Abstract: A plasma-assisted deposition system for carrying out a plasma-assisted deposition method has a processing vessel defining a vacuum chamber and having an open upper end, a dielectric member covering the open upper end of the processing vessel, and a flat antenna member placed on the upper surface of the dielectric member. A coaxial waveguide has one end connected to the upper surface of the flat antenna member and the other end connected to a microwave generator. The flat antenna member is provided with many slots of a length corresponding to half the wavelength of a microwave arranged on concentric circles. For example, a circularly polarized microwave is radiated from the slots into a processing space to produce a source gas plasma. Electron temperature in the plasma in terms of mean square velocity is 3 eV or below and the electron density in the plasma is 5×1011 electrons per cubic centimeter or above. The plasma is used for depositing a fluorine-containing carbon film.

Abstract: A film forming method comprise the steps of forming a F-doped carbon film by using a source gas containing C and F, and modifying the F-doped carbon film by radicals, the source gas having a F/C ratio, defined as a ratio of a number of F atoms to a number of C atoms in the source gas molecule, wherein the F/C ratio is larger than 1 but smaller than 2.

Abstract: An object of the present invention is to concurrently perform the horizontal movements of a cradle and a table in a desirable manner and to desirably prevent interference of the table with a gantry. A microprocessor controls and interlocks a horizontal cradle movement mechanism and a horizontal table movement mechanism. The microprocessor concurrently performs the horizontal movements of the cradle and table. If an operator tries to vary a table height or a tilt angle, the microprocessor performs arithmetic operations to check if the table will interfere with the gantry at a current scan-time position, at which the table should be located during scanning, in the varied state. If the interference is predicted, the table is pulled out of the bore of the gantry until it reaches a position at which the table will not interfere with the gantry.

Abstract: To provide a fuel pump control device allowing a fuel pump having a small capacity to feed a sufficient amount of fuel to an internal combustion engine. During running of a vehicle at a low speed (for example, less than 2,0 km/hr), pulsed drive voltages are intermittently supplied to a fuel pump in accordance with each opening/closing of a thyristor on the basis of ignition pulses of the engine. In this way, the fuel pump repeats discharge operation at a relatively long cycle in synchronization with the pulsed drive voltages. During running of the vehicle at a high speed, a drive voltage is continuously supplied (that is, a DC voltage is supplied) from a power supply line to the fuel pump, whereby the fuel pump repeats discharge operation at a cycle with a short self-excitation state.

Abstract: To provide a fuel pump control device allowing a fuel pump having a small capacity to feed a sufficient amount of fuel to an internal combustion engine. During running of a vehicle at a low speed (for example, less than 2.0 km/hr), pulsed drive voltages are intermittently supplied to a fuel pump in accordance with each opening/closing of a thyristor on the basis of ignition pulses of the engine. In this way, the fuel pump repeats discharge operation at a relatively long cycle in synchronization with the pulsed drive voltages. During running of the vehicle at a high speed, a drive voltage is continuously supplied (that is, a DC voltage is supplied) from a power supply line to the fuel pump, whereby the fuel pump repeats discharge operation at a cycle with a short self-excitation state.

Abstract: To provide a fuel pump control device allowing a fuel pump having a small capacity to feed a sufficient amount of fuel to an internal combustion engine. During running of a vehicle at a low speed (for example, less than 2,0 km/hr), pulsed drive voltages are intermittently supplied to a fuel pump in accordance with each opening/closing of a thyristor on the basis of ignition pulses of the engine. In this way, the fuel pump repeats discharge operation at a relatively long cycle in synchronization with the pulsed drive voltages. During running of the vehicle at a high speed, a drive voltage is continuously supplied (that is, a DC voltage is supplied) from a power supply line to the fuel pump, whereby the fuel pump repeats discharge operation at a cycle with a short self-excitation state.

Abstract: An air cleaner for use in combination with a fuel system of an engine, includes an air cleaning element housed within a casing. Air introduced from an air inlet, defined in the casing, follows an air flow path from the air inlet passing through the air cleaning element. The air flow path includes a direction change of approximately ninety degrees. This direction change transpires over a curved guide surface formed in the casing to reduce the likelihood of vortexes which reduce the air ram pressure. The curved guide surface may include a detachable panel. Also, the panel may include an air path to an air branch chamber. When two air inlets are used, it is advantageous to include a partitioning wall separating the two air flow paths prior to the air cleaning element.

Abstract: A fuel carbureted in a float chamber of a carburetor is prevented from entering through an air vent path into an air intake path during low velocity running of a vehicle. An outer vent path and an inner vent path are provided on the upstream side of an air vent path which communicates with a float chamber of a carburetor of an engine for a vehicle. The paths are alternatively selected by a solenoid valve. An opening of the inner vent path is opened in the intake duct, and an opening of the outer vent path is opened at a position sufficiently spaced away from the front face air intake. During low velocity running, the solenoid valve is selectively operated so that the outer vent path is in communication with the carburetor. During high velocity running, however, the inner vent path is in communication with the carburetor.