Abstract: The invention is to provide a semiconductor manufacturing apparatus system and a semiconductor device manufacturing method for reducing particles having an adverse effect in a manufacturing step of a semiconductor device.

Abstract: While an illumination optical system is irradiating the surface of a contaminated standard wafer with illumination light, this illumination light is scanned over the surface of the contaminated standard wafer, then detectors of a detection optical system each detect the light scattered from the surface of the contaminated standard wafer, next a predefined reference value in addition to detection results on the scattered light is used to calculate a compensation parameter “Comp” for detection sensitivity correction of photomultiplier tubes of the detectors, and the compensation parameter “Comp” is separated into a time-varying deterioration parameter “P”, an optical characteristics parameter “Opt”, and a sensor characteristics parameter “Lr”, and correspondingly managed. This makes is easy to calibrate the detection sensitivity.

Abstract: While an illumination optical system 2 is irradiating the surface of a contaminated standard wafer 110 with illumination light, this illumination light is scanned over the surface of the contaminated standard wafer 110, then detectors 31 to 34 of a detection optical system 3 each detect the light scattered from the surface of the contaminated standard wafer 110, next a predefined reference value in addition to detection results on the scattered light is used to calculate a compensation parameter “Comp” for detection sensitivity correction of photomultiplier tubes 331 to 334 of the detectors 31 to 34, and the compensation parameter “Comp” is separated into a time-varying deterioration parameter “P”, an optical characteristics parameter “Opt”, and a sensor characteristics parameter “Lr”, and correspondingly managed. This makes it easy to calibrate the detection sensitivity.

Abstract: A surface inspection apparatus comprises a radiation mechanism for radiating a light beam to the surface of an object having an edge of a non-flat surface (for example, a rounded edge) or an edge of an inclined surface, a scanning mechanism for moving the object relative to a radiation position of the light beam for scanning, and a detector for detecting light scattered from the object, and further includes the following characteristic. The scanning mechanism, when the light beam for scanning is radiated to the edge of the object, is configured to move the object in the direction that increases an incident angle of the light beam with a normal to the surface of the edge as the objection moves relative to a radiation position of the light beam.

Abstract: An electronic game apparatus effects a right shift or a left shift of an entire display of multiple randomly arranged numerals or symbols, and exchange of specified displayed digits of numerals or symbols. The electronic game apparatus can arrange and shift the rows of numerals or symbols displayed on the display means into a prescribed order.

Abstract: Disclosed is a check calculator as a preferred embodiment of the present invention, which is characterized in that;It displays the amount of the check drawn on a payee and the deposit balance after the check has been drawn on a payee, then instructs either writing or reading of the number of the check drawn on a payee in response to specific operations of the keys provided, more particularly, when drawing a check on a payee, in responding to the reading operation of the reading key, the check calculator reads out the number of the check to be drawn next on a payee and also reads the deposit balance after the check has been drawn on a payee.

Abstract: The present invention discloses a shopping calculator into the budget memory of which, when shopping, a previously decided budget value is entered for storage by means of a budget key, and each time a purchase is made the cost of the purchase is entered into budget memory by means of DATA ENTRY keys and subtracted from the value in the budget memory, and when the remainder is below a preset value or when the budget value is exceeded, a warning is be given.In addition, another embodiment of the present invitation discloses a shopping calculator having a multiple symbol display unit, a means for carrying out comparative shopping calculations by which the prices and weights of at least two Commodities may be compared to determine which of the two is the better bargain, and a means by which the input values for the abovementioned comparative shopping calculations may be displayed, in order, in the abovementioned symbol display units.

Abstract: A game calculating apparatus includes a key unit consisting of a plurality of keys, a plurality of the display positions, and a complete game function processor operatively coupled to a random access memory and read only memory. A first symbol is variably displayed in each of said display positions either randomly or at specific cycle intervals during the game mode. To stop the movement of each said desired symbol a selected specific key must be actuated. The processor then determines the degree of exact matching of the signal representing the stopped first symbols and another signal representing a second set of symbols previously stored in the memory.