Abstract: For the purpose of achieving a further reduction in weight while maintaining strength and of reducing the manufacturing cost, the present invention provides a robot arm including: a long cylindrical arm body; and mounting interface portions that are fixed at both sides of the arm body and that are used to mount the robot arm to another member. At least sections of outer surfaces of the arm body and the mounting interface portions are formed of a resin. A first part that has one of the mounting interface portions and a section of the arm body and a second part that has the other one of the mounting interface portions and a section of the arm body are joined to each other.

Abstract: A robot arm includes a long cylindrical arm body and mounting interface portions fixed at both sides of the arm body and that are used to mount the robot arm to another member. At least sections of outer surfaces of the arm body and the mounting interface portions are formed of a resin. A first part that has one of the mounting interface portions and a section of the arm body and a second part that has the other one of the mounting interface portions and a section of the arm body are joined to each other.

Abstract: A robot that includes a base that is provided with a flat installation surface member that is disposed on an installation target surface and a columnar member that extends upward from the installation surface member; and a first arm, one end of which is supported so as to be rotatable about a first horizontal axis located above the columnar member of the base and that has a motion range below the first horizontal axis. The columnar member has a length that is equal to or longer than the length of the first arm and has a uniform transverse sectional area that is the same as the first arm.

Abstract: A rotary axis module includes: an input shaft connected to a drive motor; an output shaft, an output shaft flange connected to the output shaft; parallel gears coupled to the output shaft flange; at least two double gears; and a transfer gear that transmits the power of the drive motor to the double gears. The at least two double gears and the transfer gear are disposed so as to surround the output shaft.

Abstract: A robot including a base having a flat mounting surface section to be set on an installation surface by a fixing part, and also including a movable unit that is movable relative to the base. The base includes a tip-over prevention member that is disposed in a switchable manner between a state where the tip-over prevention member at least protrudes forward from the mounting surface section in a moving direction when a relocating process is performed and a state where the tip-over prevention member does not protrude forward from the mounting surface section.

Abstract: A connection structure in which a robot link member including a first wall, a second wall facing the first wall with an interval, and a connecting wall connecting the first wall and the second wall is connected with a member to be connected contacting a surface of the first wall of the link member, which does not face the second wall, the connection structure includes a bolt penetrating the first and second walls and including a head part contacting the second wall and a screw part screwed into the member to be connected, and a deformation preventing member sandwiched between the first and second walls by tightening the bolt to prevent or reduce deformation of the walls in a direction in which the walls become closer to each other.

Abstract: For the purpose of achieving a further reduction in weight while maintaining strength and of reducing the manufacturing cost, the present invention provides a robot arm including: a long cylindrical arm body; and mounting interface portions that are fixed at both sides of the arm body and that are used to mount the robot arm to another member. At least sections of outer surfaces of the arm body and the mounting interface portions are formed of a resin. A first part that has one of the mounting interface portions and a section of the arm body and a second part that has the other one of the mounting interface portions and a section of the arm body are joined to each other.

Abstract: A rotary axis module includes: an input shaft connected to a drive motor; an output shaft, an output shaft flange connected to the output shaft; parallel gears coupled to the output shaft flange; at least two double gears; and a transfer gear that transmits the power of the drive motor to the double gears. The at least two double gears and the transfer gear are disposed so as to surround the output shaft.

Abstract: A rotary axis module includes: an input shaft connected to a drive motor; an output shaft, an output shaft flange connected to the output shaft; parallel gears coupled to the output shaft flange; at least two double gears; and a transfer gear that transmits the power of the drive motor to the double gears. The at least two double gears and the transfer gear are disposed so as to surround the output shaft.

Abstract: Provided is a robot arm that is provided with mounting interface portions at both ends of a long resin arm body. Each of the mounting interface portions is provided with: a connecting section that is formed of resin and that is connected to the arm body; and a metal member that is embedded in the resin, which forms the connecting section, and that forms a mounting surface. The metal member is provided with a through-hole that penetrates therethrough in the plate-thickness direction and through which a mounting screw passes, and is embedded in the resin while exposing the mounting surface and a seating surface, for the mounting screw, around the through-hole, the seating surface being located at the opposite side from the mounting surface.

Abstract: A robot that includes a base that is provided with a flat installation surface member that is disposed on an installation target surface and a columnar member that extends upward from the installation surface member; and a first arm, one end of which is supported so as to be rotatable about a first horizontal axis located above the columnar member of the base and that has a motion range below the first horizontal axis. The columnar member has a length that is equal to or longer than the length of the first arm and has a uniform transverse sectional area that is the same as the first arm.

Abstract: A robot including a base having a flat mounting surface section to be set on an installation surface by a fixing part, and also including a movable unit that is movable relative to the base. The base includes a tip-over prevention member that is disposed in a switchable manner between a state where the tip-over prevention member at least protrudes forward from the mounting surface section in a moving direction when a relocating process is performed and a state where the tip-over prevention member does not protrude forward from the mounting surface section.

Abstract: Provided is a robot arm that is provided with mounting interface portions at both ends of a long resin arm body. Each of the mounting interface portions is provided with: a connecting section that is formed of resin and that is connected to the arm body; and a metal member that is embedded in the resin, which forms the connecting section, and that forms a mounting surface. The metal member is provided with a through-hole that penetrates therethrough in the plate-thickness direction and through which a mounting screw passes, and is embedded in the resin while exposing the mounting surface and a seating surface, for the mounting screw, around the through-hole, the seating surface being located at the opposite side from the mounting surface.

Abstract: A connection structure in which a robot link member including a first wall, a second wall facing the first wall with an interval, and a connecting wall connecting the first wall and the second wall is connected with a member to be connected contacting a surface of the first wall of the link member, which does not face the second wall, the connection structure includes a bolt penetrating the first and second walls and including a head part contacting the second wall and a screw part screwed into the member to be connected, and a deformation preventing member sandwiched between the first and second walls by tightening the bolt to prevent or reduce deformation of the walls in a direction in which the walls become closer to each other.

Abstract: A rotary axis module includes: an input shaft connected to a drive motor; an output shaft, an output shaft flange connected to the output shaft; parallel gears coupled to the output shaft flange; at least two double gears; and a transfer gear that transmits the power of the drive motor to the double gears. The at least two double gears and the transfer gear are disposed so as to surround the output shaft.

Abstract: It is an object of the present invention to provide a method for manufacturing a semiconductor device suppressing the occurrence of voids in an insulating film. A method for manufacturing a semiconductor device according to the present invention comprises the steps of: (1) forming an insulating film 11 composed of a thin silicon nitride film on a semiconductor substrate 1 having at least a necessary element and a recessed part 6 so as to cover the recessed part 6; (2) modifying the surface of the insulating film 11; and (3) forming a BPSG film 15 as an interlayer insulation film on the insulating film. The occurrence of voids in the interlayer insulation film 15 is suppressed by the process for modifying the surface.