Patents by Inventor Kenji Fukushima
Kenji Fukushima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Polymer, Chemically Amplified Positive Resist Composition, Resist Patterning Process, And Mask Blank
Publication number: 20240134280Abstract: A polymer containing a structural unit including an aromatic hydroxy group bonded to a main chain, where the aromatic hydroxy group is protected by an acid-labile group represented by the following formula (ALU-1) and is deprotected by action of an acid to become alkali-soluble. This provides: a polymer that makes it possible to form a resist film with which it is possible to form a pattern having extremely high isolated space resolution, small LER, and excellent rectangularity, effects of development loading and residue defects being suppressed, and the pattern having etching resistance and suppressed pattern collapse in the produced resist pattern; a chemically amplified positive resist composition containing the polymer; a resist patterning process using the chemically amplified positive resist composition; and a mask blank including the chemically amplified positive resist composition.Type: ApplicationFiled: September 20, 2023Publication date: April 25, 2024Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Masahiro FUKUSHIMA, Satoshi WATANABE, Kenji FUNATSU, Keiichi MASUNAGA, Masaaki KOTAKE, Yuta MATSUZAWA -
Publication number: 20240136205Abstract: A substrate processing apparatus includes: a processing container; a substrate holder that horizontally holds the substrate inside the processing container; a liquid supplier that supplying a processing liquid to a lower surface of the substrate; a cover that discharges a gas toward an upper surface of the substrate; a gas supplier that supplies the gas to the cover; a heater that heats the gas; and a controller. The controller performs a control to: maintain a temperature of the heater at a second set temperature while the processing liquid is supplied to the lower surface; maintain the temperature of the heater at the first set temperature during a standby operation; and increase an output of the heater during the standby operation and raise the temperature of the heater from the first set temperature to the second set temperature until a subsequent substrate is loaded in the standby operation.Type: ApplicationFiled: October 17, 2023Publication date: April 25, 2024Inventor: Kenji FUKUSHIMA
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Publication number: 20240118613Abstract: A chemically amplified positive resist composition is provided comprising a polymer comprising units containing a phenolic hydroxy group and units containing a phenolic hydroxy group protected with an acid labile group, in which a carbon atom neighboring the carbon atom to which the phenolic hydroxy group protected with an acid labile group is attached is substituted with a specific group. A resist pattern with a high resolution, reduced LER, rectangularity, minimized influence of develop loading, and few development residue defects can be formed.Type: ApplicationFiled: August 29, 2023Publication date: April 11, 2024Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Keiichi Masunaga, Satoshi Watanabe, Masaaki Kotake, Kenji Funatsu, Masahiro Fukushima, Yuta Matsuzawa
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Publication number: 20240103364Abstract: An onium salt having formula (1) is provided. A chemically amplified resist composition comprising the onium salt as a PAG has advantages including solvent solubility and improved lithography properties such as high sensitivity, high contrast, EL, and LWR when processed by photolithography using high-energy radiation.Type: ApplicationFiled: August 3, 2023Publication date: March 28, 2024Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Masahiro Fukushima, Tomomi Watanabe, Kenji Yamada
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Publication number: 20240094635Abstract: A chemically amplified positive resist composition comprising (A) a base polymer, (B) a photoacid generator, and (C) a quencher is provided. The base polymer (A) contains a polymer comprising phenolic hydroxy group-containing units, aromatic ring-containing units, and units containing a phenolic hydroxy group protected with an acid labile group. The photoacid generator (B) and the quencher (C) are present in a weight ratio (B)/(C) of less than 3/1. The resist composition exhibits a very high isolated-space resolution and forms a pattern with reduced LER, rectangularity, minimized influences of develop loading and residue defects.Type: ApplicationFiled: August 2, 2023Publication date: March 21, 2024Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Keiichi Masunaga, Satoshi Watanabe, Kenji Funatsu, Masahiro Fukushima, Masaaki Kotake, Yuta Matsuzawa
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Patent number: 11858344Abstract: A vehicle includes a differential gear that transmits rotation of a propeller shaft to an axle. A differential lock switches the differential gear between a locked state and an unlocked state. A clutch is provided in a power transmission path between a prime mover and wheels of the vehicle. A controller controls an engaging force of the clutch during a moving start of the vehicle in accordance with which of the locked state and the unlocked state is selected by the differential gear.Type: GrantFiled: October 15, 2020Date of Patent: January 2, 2024Assignee: YAMAHA HATSUDOKI KABUSHIKI KAISHAInventor: Kenji Fukushima
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Patent number: 11781663Abstract: [Solution] A pilot check valve includes a first body that has input and output ports, a main path 13 that is in communication these ports, and a check valve element that allows a flow of a pressure fluid from the input port toward the output port. The valve element blocks or allows a flow toward the input port side by supply or discharge of a pilot fluid and has a residual pressure exhaust path connected between the main path and an exhaust hole, a seal member that is provided in the exhaust path, and a push rod that moves the check valve element to a position where a flow of a pressure fluid toward the input port side in the main path is allowed and moves the seal member to a position where a flow toward the exhaust hole is allowed.Type: GrantFiled: October 20, 2022Date of Patent: October 10, 2023Assignee: SMC CORPORATIONInventor: Kenji Fukushima
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Publication number: 20230132067Abstract: [Solution] A pilot check valve includes a first body that has input and output ports, a main path 13 that is in communication these ports, and a check valve element that allows a flow of a pressure fluid from the input port toward the output port. The valve element blocks or allows a flow toward the input port side by supply or discharge of a pilot fluid and has a residual pressure exhaust path connected between the main path and an exhaust hole, a seal member that is provided in the exhaust path, and a push rod that moves the check valve element to a position where a flow of a pressure fluid toward the input port side in the main path is allowed and moves the seal member to a position where a flow toward the exhaust hole is allowed.Type: ApplicationFiled: October 20, 2022Publication date: April 27, 2023Applicant: SMC CORPORATIONInventor: Kenji FUKUSHIMA
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Patent number: 11529581Abstract: A negative pressure-side flow path having a negative pressure-side filter and a positive pressure-side flow path having a positive pressure-side filter are connected in parallel between a first port and a second port, and a shuttle valve is installed between the negative pressure-side flow path and the positive pressure-side flow path, and the first port, thus when a negative pressure is supplied to the first port, the first port is caused to communicate with the second port through the negative pressure-side flow path, and when a positive pressure is supplied to the first port, the first port is caused to communicate with the second port through the positive pressure-side flow path.Type: GrantFiled: July 20, 2020Date of Patent: December 20, 2022Assignee: SMC CORPORATIONInventors: Mitsuhiro Kurihara, Kenji Fukushima
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Patent number: 11339806Abstract: A flow controller that changes the flow rate of air exhausted from an air cylinder in mid-stroke includes a first switching valve displaced from a first position to a second position under the effect of pilot air, and causing one port of the air cylinder to communicate with a first channel at the first position, exhausting air exhausted from the one port of the air cylinder while reducing the flow rate of the air using a first regulating valve at the second position. Since the pilot air is taken into the first switching valve from a second channel in a system different from the system of the first channel, a second regulating valve can be adjusted without being affected by the degree of opening of the first regulating valve.Type: GrantFiled: November 28, 2019Date of Patent: May 24, 2022Assignee: SMC CORPORATIONInventors: Akiho Nishimura, Hirosuke Yamada, Kenji Fukushima
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Publication number: 20220049720Abstract: A flow controller that changes the flow rate of air exhausted from an air cylinder in mid-stroke includes a first switching valve displaced from a first position to a second position under the effect of pilot air, and causing one port of the air cylinder to communicate with a first channel at the first position, exhausting air exhausted from the one port of the air cylinder while reducing the flow rate of the air using a first regulating valve at the second position. Since the pilot air is taken into the first switching valve from a second channel in a system different from the system of the first channel, a second regulating valve can be adjusted without being affected by the degree of opening of the first regulating valve.Type: ApplicationFiled: November 28, 2019Publication date: February 17, 2022Applicant: SMC CORPORATIONInventors: Akiho NISHIMURA, Hirosuke YAMADA, Kenji FUKUSHIMA
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Patent number: 11247292Abstract: Provided are a method and an apparatus for resistance spot welding in which preliminary current application is executed and then main welding is executed in accordance with master patterns of various parameters obtained during the preliminary current application. The main welding is executed under welding conditions of the master patterns, and whether a welding abnormality has occurred and whether the welding abnormality is likely to occur are determined. When the welding abnormality is likely to occur, the welding conditions for the main welding are corrected so as to prevent the welding abnormality. When the welding abnormality is unlikely to occur, the welding conditions for the main welding are corrected so as to match the master patterns.Type: GrantFiled: March 6, 2019Date of Patent: February 15, 2022Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Koji Nomura, Shuhei Ogura, Atsushi Kawakita, Naoya Kato, Toru Hioki, Kenji Fukushima, Shun Kato, Takashi Goto
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Publication number: 20210023496Abstract: A negative pressure-side flow path having a negative pressure-side filter and a positive pressure-side flow path having a positive pressure-side filter are connected in parallel between a first port and a second port, and a shuttle valve is installed between the negative pressure-side flow path and the positive pressure-side flow path, and the first port, thus when a negative pressure is supplied to the first port, the first port is caused to communicate with the second port through the negative pressure-side flow path, and when a positive pressure is supplied to the first port, the first port is caused to communicate with the second port through the positive pressure-side flow path.Type: ApplicationFiled: July 20, 2020Publication date: January 28, 2021Applicant: SMC CORPORATIONInventors: Mitsuhiro KURIHARA, Kenji FUKUSHIMA
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Publication number: 20210023942Abstract: A vehicle includes a differential gear that transmits rotation of a propeller shaft to an axle. A differential lock switches the differential gear between a locked state and an unlocked state. A clutch is provided in a power transmission path between a prime mover and wheels of the vehicle. A controller controls an engaging force of the clutch during a moving start of the vehicle in accordance with which of the locked state and the unlocked state is selected by the differential gear.Type: ApplicationFiled: October 15, 2020Publication date: January 28, 2021Inventor: Kenji FUKUSHIMA
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Patent number: 10850612Abstract: A vehicle includes a differential gear that transmits rotation of a propeller shaft to an axle. A differential lock switches the differential gear between a locked state and an unlocked state. A clutch is provided in a power transmission path between a prime mover and wheels of the vehicle. A controller controls an engaging force of the clutch during a moving start of the vehicle in accordance with which of the locked state and the unlocked state is selected by the differential gear.Type: GrantFiled: July 28, 2017Date of Patent: December 1, 2020Assignee: YAMAHA HATSUDOKI KABUSHIKI KAISHAInventor: Kenji Fukushima
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Publication number: 20190275606Abstract: Provided are a method and an apparatus for resistance spot welding in which preliminary current application is executed and then main welding is executed in accordance with master patterns of various parameters obtained during the preliminary current application. The main welding is executed under welding conditions of the master patterns, and whether a welding abnormality has occurred and whether the welding abnormality is likely to occur are determined. When the welding abnormality is likely to occur, the welding conditions for the main welding are corrected so as to prevent the welding abnormality. When the welding abnormality is unlikely to occur, the welding conditions for the main welding are corrected so as to match the master patterns.Type: ApplicationFiled: March 6, 2019Publication date: September 12, 2019Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Koji NOMURA, Shuhei OGURA, Atsushi KAWAKITA, Naoya KATO, Toru HIOKI, Kenji FUKUSHIMA, Shun KATO, Takashi GOTO
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Patent number: 10307888Abstract: A superabrasive wheel having a superabrasive grain layer having superabrasive grains fixed by a binder, a ratio of an area occupied by the superabrasive grains in the superabrasive grain layer being 20% to 70%.Type: GrantFiled: September 8, 2016Date of Patent: June 4, 2019Assignee: A.L.M.T. Corp.Inventors: Masanori Hoshika, Hikaru Yamazaki, Hirohisa Koterasawa, Kenji Fukushima
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Publication number: 20180050688Abstract: A vehicle includes a differential gear that transmits rotation of a propeller shaft to an axle. A differential lock switches the differential gear between a locked state and an unlocked state. A clutch is provided in a power transmission path between a prime mover and wheels of the vehicle. A controller controls an engaging force of the clutch during a moving start of the vehicle in accordance with which of the locked state and the unlocked state is selected by the differential gear.Type: ApplicationFiled: July 28, 2017Publication date: February 22, 2018Inventor: Kenji FUKUSHIMA
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Publication number: 20180043506Abstract: A superabrasive wheel having a superabrasive grain layer having superabrasive grains fixed by a binder, a ratio of an area occupied by the superabrasive grains in the superabrasive grain layer being 20% to 70%.Type: ApplicationFiled: September 8, 2016Publication date: February 15, 2018Inventors: Masanori Hoshika, Hikaru Yamazaki, Hirohisa Koterasawa, Kenji Fukushima
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Patent number: 9664302Abstract: A flow rate control device includes a needle valve mounted within a body section and is configured such that the needle valve is advanced and retracted within the body section by the rotation of a handle, thereby adjusting the flow rate of fluid flowing between a first port and a second port. The handle is surrounded by a cover to prevent a change in the adjusted flow rate.Type: GrantFiled: February 14, 2014Date of Patent: May 30, 2017Assignee: SMC CORPORATIONInventor: Kenji Fukushima