Abstract: A charged particle beam apparatus includes a charged particle beam generating system for causing a charged particle source to generate a charged particle beam. A focusing system focuses the charged particle beam onto a sample. A deflecting system causes the focused charged particle beam to scan the surface of the sample. An evacuating system evacuates a space through which the charged particle beam passes. A detector detects information obtained by irradiating the charged particle beam onto the sample. An image display system displays as an image the status of distribution of the information over the sample surface based on a detection signal forwarded from the detector. The focusing system is entirely constituted by an electrostatic lens containing a plurality of lens electrodes, one of the lens electrodes being a final electrode located closest to the sample.

Abstract: A tool holder device including a first and a second member having respectively a projection and a bore which are engageable with each other. The second member has an annular groove which partially defines the bore and is coaxial with the bore. The projection has a through-hole in which are received two engaging members having respective inclined surfaces which are abuttable against with an inclined surface of the annular groove when the two engaging members are moved away from each other upon rotation of a threaded member which engages at least one of the two engaging members. The inclined surfaces of the engaging members and annular groove permit a tight fit between the projection and bore, for removable connection of the first and second members.