Abstract: The present invention provides a radar apparatus, which can diagnose failure at low cost with high accuracy, and a failure diagnosis method thereof. An antenna serves as both a transmit antenna and a receive antenna. A transmit and receive select switch switches the transmission and reception of the antenna. A control unit measures a power value based on an output signal of a receive wave received by the antennas, and judges that the transmit and receive select switch fails when this power value exceeds a threshold.

Abstract: A dielectric ceramic composition containing at least 0.15 to 2.5 mol of a Mg compound in terms of MgO, 0 to 1.6 mol of a Ba compound in terms of BaCO3, 0.1 to 3.0 mol of a Ln (Ln includes two or three kinds of elements selected from Er, Dy, and Ho with Er being essential) compound in terms of Ln2O3, 0.01 to 0.4 mol of a Mn compound in terms of MnO4/3, 0.01 to 0.26 mol of a V compound in terms of V2O5, 0.3 to 3.5 mol of a Si compound in terms of SiO2, and 0.01 to 2.5 mol of an Al compound in terms of Al2O3 to 100 mol of barium titanate adjusted for a Ba/Ti molar ratio of 0.997 to 1.007.

Abstract: A target detection system using an EHF radar and the image processing is disclosed, in which the processing time is shortened by mutually complementing the disadvantages of the EHF radar and the image processing thereby to improve the reliability. The system comprises a radar, an image acquisition unit and an image processing ECU. The microcomputer of the ECU specifies an image recognition area based on the power output from the radar, and carries out the image processing only within the specified recognition area for the image obtained from the image acquisition unit. By performing the image processing only for the area where a target is detected by the radar, the time required for image processing is shortened on the one hand and the erroneous detection of letters on the road surface or the like is eliminated.

Abstract: A method of inspecting patterns to detect a defect of the patterns by using information of a scattered diagram of brightness of said first and second images.

Abstract: Disclosed is a metal portion-containing article having a porous metal portion, in which the porous metal portion contains a substance that emits light by irradiation with an electromagnetic wave. The metal portion-containing article of the present invention cannot be altered or falsified easily, and can be identified.

Abstract: A method of manufacturing a multilayer ceramic capacitor includes the steps of: preparing a mixture of a raw material powder mainly composed of barium titanate particles; forming the mixture and a binder into a green sheet; alternately layering the green sheet and an internal electrode to obtain a laminated body; and sintering the laminated body. The step of preparing the mixture includes the steps of: introducing the raw material powder and the dispersion medium into a mixing container, and stirring them with balls serving as a mixing medium, to obtain a slurry containing a raw material powder mixture; and drying the slurry. The mixing medium has a diameter that is equal to or less than 400 times the mean particle size of the barium titanate particles of the raw material. The present invention provides a multilayer ceramic capacitor having good DC bias characteristics by suppressing the variation in crystal particles.

Abstract: It is an object of the present invention to provide an appearance inspection apparatus capable of analyzing a difference in detection characteristics of detection signals obtained by a plurality of detectors, and capable of flexibly meeting various inspection purposes without changing a circuit or software.

Abstract: An image size changing section obtains a size changed image by changing the size of one of two original images captured by a pair of cameras. If an edge of an object has many oblique components, the edge is difficult to detect as a vertical edge but, when the image is horizontally reduced, an oblique edge becomes close to a vertical edge. For this reason, feature end points are extracted with reliability by a feature extracting section and, thereby, an object is recognized and the distance to the object is determined reliably.

Abstract: A method of inspecting defects of a plurality of patterns that are formed on a substrate to have naturally the same shape. According to this method, in order to detect very small defects of the patterns with high sensitivity without being affected by irregular brightness due to the thickness difference between the patterns formed on a semiconductor wafer, a first pattern being inspected is detected to produce a first image of the first pattern, the first image is stored, a second pattern being inspected is detected to produce a second image of said second pattern, the stored first image and the second image are matched in brightness, and the brightness-matched first and second images are compared with each other so that the patterns can be inspected.

Abstract: An image size changing section obtains a size-changed image by changing the size of one of two original images captured by a pair of cameras. If an edge of an object has many oblique components, the edge is difficult to detect as a vertical edge but, when the image is horizontally reduced, an oblique edge becomes close to a vertical edge. For this reason, a feature end points are extracted with reliability by a feature extracting section and, thereby, an object is recognized and the distance to the object is determined reliably.

Abstract: An antenna system is effectively formed in a limited space, to make a configuration of the antenna system a simple mechanism. In a monopulse radar apparatus, an antenna unit includes an array antenna (a wide-beam array antenna) formed by a part of antenna elements that are constituent elements of the antenna unit (an area K1), and a plurality of narrow-beam array antennas formed as array antennas having a narrower beam width than the array antenna. A monopulse process is performed based on an output of a predetermined pair of array antennas (areas K2 and K3) from among the array antennas formed as the narrow-beam array antennas.

Abstract: The present invention provides a radar apparatus, which can diagnose failure at low cost with high accuracy, and a failure diagnosis method thereof. An antenna serves as both a transmit antenna and a receive antenna. A transmit and receive select switch switches the transmission and reception of the antenna. A control unit measures a power value based on an output signal of a receive wave received by the antennas, and judges that the transmit and receive select switch fails when this power value exceeds a threshold.

Abstract: In order to provide the method and the device for distance measurement by pulse radar that securely eliminates the false echo from the distance over the detectable limit determined by the pulse generation cycle, the pulse radar comprises the pulse signal sending unit that generates the pulse signals with different cycles at OSC 9a˜9c, switches to the predetermined intervals by OSC switch 10, and sends the pulse signal to targets, the reflected signal receiving unit that receives the reflected signals and stores the data in the RAM 25, the reflected signal data acquisition unit that obtains the data of each reflected signal, and the reflected signal identification unit that compares the intensity of the reflected signals obtained at the same lag time point during a certain time period after sending the pulse signal for reference and identifies the reflected signals of the sent pulse signal for reference.

Abstract: A method and apparatus for sensing by a linear image sensor a two-dimensional image of an object to be sensed includes detecting a position of the object by a position sensor having a first resolution, picking up an image of the object being projected in a direction (V-scan direction) generally perpendicular to an internal scan (H-scan) direction of the linear image sensor in synchronism with relative movement between the object and the linear image sensor, periodically switching a pixel size along the V-scan direction between a plurality of predefined pixel sizes during the relative movement between the object and the linear image sensor in accordance with information of the relative movement detected by the position sensor, and producing from an output of the linear image sensor a two-dimensional image of the projected image having a second resolution of the object to be sensed. The second resolution is a higher resolution than the first resolution.

Abstract: A method of inspecting a specimen, including: emitting a light from a lamp of a light source; illuminating a specimen on which plural patterns are formed with the light emitted from the light source and, passed through an objective lens; forming an optical image of the specimen by collecting light reflected from the specimen by the illuminating and passed through the objective lens and a image forming lens; detecting the optical image with a TDI image sensor; and processing a signal outputted from the TDI image sensor and detecting a defect of a pattern among the plural patterns formed on the specimen, wherein the image detected by the TDI image sensor is formed with light having a wavelength selected from the wavelengths of the light emitted from the light source.

Abstract: An information processor having a plurality of operating modes differing in power consumption and capable of changing the operating mode according to the amount of processing has periodic switching detection means of performing detection as to whether the information processor is periodically switching from a low-power-consumption operating mode in which the power consumption is lower to a high-power-consumption operating mode in which the power consumption is higher in the plurality of operating modes, and operating mode changing means of changing the operating modes between which the information processor switches to a combination of the operating modes such that the difference between the power consumptions is reduced relative to that at the time of switching between the low-power-consumption operating mode and the high-power-consumption operating mode if the switching cycle detected by the periodic switching detection means is shorter than a set cycle determined in advance.

Abstract: A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution.

Abstract: An information processor having a plurality of operating modes differing in power consumption and capable of changing the operating mode according to the amount of processing has periodic switching detection means of performing detection as to whether the information processor is periodically switching from a low-power-consumption operating mode in which the power consumption is lower to a high-power-consumption operating mode in which the power consumption is higher in the plurality of operating modes, and operating mode changing means of changing the operating modes between which the information processor switches to a combination of the operating modes such that the difference between the power consumptions is reduced relative to that at the time of switching between the low-power-consumption operating mode and the high-power-consumption operating mode if the switching cycle detected by the periodic switching detection means is shorter than a set cycle determined in advance.

Abstract: A defect inspecting apparatus is disclosed that can detect finer defects with high resolution optical images of those defects, and which makes the difference in contrast greater between fine line patterns of a semiconductor device. The defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom.

Abstract: A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.