Patents by Inventor Kenjiro Haraki

Kenjiro Haraki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical heat treatment apparatus and method for operating the same
    Patent number: 8177550
    Abstract: A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts.
    Type: Grant
    Filed: October 17, 2005
    Date of Patent: May 15, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Kenjiro Haraki, Hiroyuki Yamamoto, Satoshi Uemura, Yuji Tsunoda, Yasushi Takeuchi, Hirofumi Kaneko
  • Vertical heat treatment apparatus and method for operating the same
    Publication number: 20090053665
    Abstract: A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts.
    Type: Application
    Filed: October 17, 2005
    Publication date: February 26, 2009
    Inventors: Kenjiro Haraki, Hiroyuki Yamamoto, Satoshi Uemura, Yuji Tsunoda, Yasushi Takeuchi, Hirofumi Kaneko