Abstract: A surface geometry measuring apparatus which relies upon triangulation to measure the distance to an object from a sensor head comprising projection optics and observation optics, wherein the projection optics has a drive mechanism capable of adjusting the laser beam projecting position or the baseline length, the distance to the object is calculated by measuring the baseline length at the time when the point at which a spot of the laser light projected to the object forms a focused image on the observation plane in the observation optics has come to the center of the observation plane, the surface geometry measuring apparatus has a mechanism for causing the sensor head or observation optics to move or turn from side to side and a mechanism for causing the sensor head to turn up and down such that the moving or turning from side to side and the turning up and down allow the point of measurement on the object to be scanned with the laser beam two-dimensionally to measure the surface geometry of the object.

Abstract: A ring-shaped metal gasket with the cross-section thereof being substantially rectangular shaped, with the ratio (t/w) of the thickness t of the ring portion to the width w thereof being in the range of 0.5 to 4, having a Vickers hardness in the range of 50 to 120; a vacuum flange for a metal gasket, including a sealing groove for receiving a metal gasket at the surface of the flange, the width of a cross section of the groove gradually decreasing in the direction of the depth thereof, an outer side wall section of the sealing groove being substantially perpendicular to the flange surface, and an inner side wall section of the sealing groove being inclined with respect to the flange surface, with a difference in level being provided so that the flange surface positioned to the inside of the sealing groove is lower than the flange surface positioned to the outside of the sealing groove, and a vacuum seal structure including the above gasket and flange are disclosed.

Abstract: A lubricating grease exhibits good lubricating performance in a hot and high-vacuum environment, and contains an alkyl substituted tetraphenylether as a base oil having incorporated therein bentonite as a thickener and at least one solid lubricant selected from the group consisting of molybdenum disulfide and tungsten disulfide.

Abstract: A pair of flanges are fixed to a pipe end of a port of a plasma vacuum vessel and another pipe end to be connected thereto. These flanges each have a ring-shaped knife edge. A copper gasket is interposed between the respective knife edges of the two flanges. A predetermined number of bolts are tightened to fix the flanges to each other. As a result, the knife edges bite into the copper gasket, and a linear sealing load from the knife edges acts on the gasket, thereby sealing and isolating the space inside the port from the outside. The number n of bolts are given by3(B+28)/65-0.ltoreq.n.ltoreq.3(B+28)/65+0.02B,and the flange thickness t is given by ##EQU1## where B is the diameter of a circle passing through the respective central axes of the n number of bolts. Thus, the bolt number and the flange thickness are reduced without lowering the sealing performance.

Abstract: A process for preparing a titanium carbide film characterized by vaporizing metallic titanium from a metallic titanium vaporizing source placed in an atmosphere containing a dilute acetylene gas and depositing titanium carbide onto the surface of base set up facing said source.