Patents by Inventor Kenneth C. Dodge

Kenneth C. Dodge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate proximity drying using in-situ local heating of substrate
    Patent number: 8011116
    Abstract: A method is provided for removing a residual fluid remaining at a point of contact between a substrate support member and a back surface of a substrate being prepared by a proximity head. According to the method, the proximity head is applied onto the back surface of the substrate and the substrate support member being held by a carrier. The substrate support member is heated after the substrate support member passes the proximity head. The heating of the substrate support member is discontinued once the residual fluid has substantially evaporated.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: September 6, 2011
    Assignee: Lam Research Corporation
    Inventors: Katrina Mikhaylichenko, Kenneth C. Dodge, Mikhail Korolik, Michael Ravkin, John M. de Larios, Fritz C. Redeker
  • SUBSTRATE PROXIMITY DRYING USING IN-SITU LOCAL HEATING OF SUBSTRATE
    Publication number: 20100313443
    Abstract: A method is provided for removing a residual fluid remaining at a point of contact between a substrate support member and a back surface of a substrate being prepared by a proximity head. According to the method, the proximity head is applied onto the back surface of the substrate and the substrate support member being held by a carrier. The substrate support member is heated after the substrate support member passes the proximity head. The heating of the substrate support member is discontinued once the residual fluid has substantially evaporated.
    Type: Application
    Filed: August 20, 2010
    Publication date: December 16, 2010
    Inventors: Katrina Mikhaylichenko, Kenneth C. Dodge, Mikhail Korolik, Michael Ravkin, John M.de Larios, Fritz C. Redeker
  • Substrate proximity drying using in-situ local heating of substrate and substrate carrier point of contact, and methods, apparatus, and systems for implementing the same
    Patent number: 7806126
    Abstract: A substrate support for holding a substrate during fluid preparation is provided. The substrate support includes a support member defined from a resistive material. The support member is coupled to a first electrode and a second electrode to enable current heating of the resistive material of the support member. The support member is configured to support the substrate at a point. The current heating assists in evaporating fluid at the point during fluid preparation of the substrate.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: October 5, 2010
    Assignee: Lam Research Corporation
    Inventors: Katrina Mikhaylichenko, Kenneth C. Dodge, Mikhail Korolik, Michael Ravkin, John M. de Larios, Fritz C. Redeker