Patents by Inventor Kenneth E. Baumel

Kenneth E. Baumel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for thermally isolating a heat chamber
    Patent number: 7208047
    Abstract: An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: April 24, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Emanuel Beer, Kenneth E. Baumel
  • Apparatus and method for thermally isolating a heat chamber
    Publication number: 20040123953
    Abstract: An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.
    Type: Application
    Filed: December 15, 2003
    Publication date: July 1, 2004
    Inventors: Emanuel Beer, Kenneth E. Baumel
  • Apparatus and method for thermally isolating a heat chamber
    Publication number: 20020195201
    Abstract: An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for receiving the substrate and a thermally isolating interface. The thermally isolating interface reduces heat transfer from the first chamber to the second chamber and allows for transfer of the substrate between the apparatus and the second chamber. The thermally isolating interface includes a hole having dimensions such that the substrate is transferrable through the thermally isolating interface.
    Type: Application
    Filed: June 25, 2001
    Publication date: December 26, 2002
    Inventors: Emanuel Beer, Kenneth E. Baumel