Patents by Inventor Kenneth Harry Purser
Kenneth Harry Purser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8089050Abstract: A ribbon-shaped ion beam is modified using multiple coil structures on a pair of opposed ferromagnetic bars. The coil structures comprise continuous windings which have predetermined variations along the length of the bar of turns per unit length. In an example, one coil structure may have uniform turns per unit length along the bar, so that energizing the coil structures forms a magnetic field component extending across the gap between the bars with a quadrupole intensity distribution. A second coil structure may have turns per unit length varying to produce a hexapole magnetic field intensity distribution. Further coil structures may be provided to produce octopole and decapole magnetic field distributions. The coil structures may be energized to produce magnetic fields parallel to the bars which vary along the length of the bars, to twist or flatten the ribbon-shaped beam.Type: GrantFiled: November 19, 2009Date of Patent: January 3, 2012Assignee: Twin Creeks Technologies, Inc.Inventors: Kenneth Harry Purser, William H. Park
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Patent number: 8058626Abstract: A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending in an x-direction along an x-axis. The x-direction magnetic field has a non-uniform intensity which is a desired function of x.Type: GrantFiled: February 10, 2010Date of Patent: November 15, 2011Assignee: Twin Creeks Technologies, Inc.Inventors: Kenneth Harry Purser, William H. Park
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Patent number: 8044374Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.Type: GrantFiled: June 30, 2009Date of Patent: October 25, 2011Assignee: Twin Creeks Technologies, Inc.Inventors: Geoffrey Ryding, Theodore H. Smick, Kenneth Harry Purser, Hilton Glavish, Joeph Daniel Gillespie
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Patent number: 7989784Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel. The beam is generated by an ion source providing an extracted ribbon beam having at least 100 mm major cross-sectional diameter. The ribbon beam may be passed through a 90° bending magnet which bends the beam in the plane of the ribbon. The magnet provides intensity correction across the ribbon to compensate for the dependency on the radial distance from the wheel axis of the speed at which parts of the wafers pass through the ribbon beam.Type: GrantFiled: June 30, 2009Date of Patent: August 2, 2011Assignee: Twin Creeks Technologies, Inc.Inventors: Hilton Glavish, Geoffrey Ryding, Theodore H. Smick, Kenneth Harry Purser
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Patent number: 7982197Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.Type: GrantFiled: June 30, 2009Date of Patent: July 19, 2011Assignee: Twin Creeks Technologies, Inc.Inventors: Theodore H. Smick, Geoffrey Ryding, Kenneth Harry Purser, Joseph Daniel Gillespie
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Publication number: 20110114851Abstract: A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending in an x-direction along an x-axis. The x-direction magnetic field has a non-uniform intensity which is a desired function of x.Type: ApplicationFiled: February 10, 2010Publication date: May 19, 2011Applicant: TWIN CREEKS TECHNOLOGIES, INC.Inventors: Kenneth Harry Purser, William H. Park, JR.
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Publication number: 20100327190Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel. The beam is generated by an ion source providing an extracted ribbon beam having at least 100 mm major cross-sectional diameter. The ribbon beam may be passed through a 90° bending magnet which bends the beam in the plane of the ribbon. The magnet provides intensity correction across the ribbon to compensate for the dependency on the radial distance from the wheel axis of the speed at which parts of the wafers pass through the ribbon beam.Type: ApplicationFiled: June 30, 2009Publication date: December 30, 2010Applicant: TWIN CREEKS TECHNOLOGIES, INC.Inventors: Hilton Glavish, Geoffrey Ryding, Theodore H. Smick, Kenneth Harry Purser
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Publication number: 20100327189Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. Detachable connections in the cooling fluid conduits in the vacuum chamber may comprise tandem seals with an intermediate chamber between them which can be vented outside the vacuum chamber, or independently vacuum pumped. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.Type: ApplicationFiled: June 30, 2009Publication date: December 30, 2010Applicant: TWIN CREEKS TECHNOLOGIES, INC.Inventors: Geoffrey Ryding, Theodore H. Smick, Kenneth Harry Purser, Joseph Daniel Gillespie
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Publication number: 20100327181Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.Type: ApplicationFiled: June 30, 2009Publication date: December 30, 2010Applicant: TWIN CREEKS TECHNOLOGIES, INC.Inventors: Geoffrey Ryding, Theodore H. Smick, Kenneth Harry Purser, Hilton Glavish, Joeph Daniel Gillespie