Patents by Inventor Kenneth M. Bogursky

Kenneth M. Bogursky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-resolution gas gauge proximity sensor
    Patent number: 7124624
    Abstract: An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
    Type: Grant
    Filed: August 8, 2005
    Date of Patent: October 24, 2006
    Assignee: ASML Holding N.V.
    Inventors: Boguslaw F. Gajdeczko, Kenneth M. Bogursky, Daniel N. Galburt, Willy M. Sander, Kevin J. Violette
  • High-resolution gas gauge proximity sensor
    Patent number: 7010958
    Abstract: An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor, and/or snubber made of porous material, and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: March 14, 2006
    Assignee: ASML Holding N.V.
    Inventors: Boguslaw F. Gajdeczko, Kenneth M. Bogursky, Daniel N. Galburt, Willy M. Sander, Kevin J. Violette
  • High-resolution gas gauge proximity sensor
    Publication number: 20040118183
    Abstract: An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
    Type: Application
    Filed: December 19, 2002
    Publication date: June 24, 2004
    Inventors: Boguslaw F. Gajdeczko, Kenneth M. Bogursky, Daniel N. Galburt, Willy M. Sander, Kevin J. Violette