Patents by Inventor Kenneth P. Gross

Kenneth P. Gross has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040141177
    Abstract: A periodic structure is illuminated by polychromatic electromagnetic radiation. Radiation from the structure is collected and divided into two rays having different polarization states. The two rays are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a poly chromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam. Radiation that has passed through the element is detected when the plane of polarization is at the two or more positions so that one or more parameters of the periodic structure may be derived from the detected signals.
    Type: Application
    Filed: December 29, 2003
    Publication date: July 22, 2004
    Inventors: Guoheng Zhao, Kenneth P. Gross, Rodney Smedt, Mehrdad Nikoonahad
  • Publication number: 20040080741
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Application
    Filed: July 10, 2003
    Publication date: April 29, 2004
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Patent number: 6721052
    Abstract: A periodic structure is illuminated by polychromatic electromagnetic radiation. Radiation from the structure is collected and divided into two rays having different polarization states. The two rays are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a polychromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam. Radiation that has passed through the element is detected when the plane of polarization is at the two or more positions so that one or more parameters of the periodic structure may be derived from the detected signals.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: April 13, 2004
    Assignee: KLA-Technologies Corporation
    Inventors: Guoheng Zhao, Kenneth P. Gross, Rodney Smedt, Mehrdad Nikoonahad
  • Patent number: 6692129
    Abstract: The optical system includes a plurality of light modulators, one or more combining filters, and an optical relay system including a filter. Each light modulator modulates a corresponding incident light beam. The one or more combining filters superimpose the modulated light beams from each of the plurality of light modulators. The optical relay system filters the superimposed light and relays the filtered light to an image plane.
    Type: Grant
    Filed: September 5, 2002
    Date of Patent: February 17, 2004
    Assignee: Silicon Light Machines
    Inventors: Kenneth P. Gross, Paul Manhart, Richard A. Buchroeder
  • Patent number: 6606153
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: August 12, 2003
    Assignee: Kla-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Publication number: 20030103194
    Abstract: The optical system includes a plurality of light modulators, one or more combining filters, and an optical relay system including a filter. Each light modulator modulates a corresponding incident light beam. The one or more combining filters superimpose the modulated light beams from each of the plurality of light modulators. The optical relay system filters the superimposed light and relays the filtered light to an image plane.
    Type: Application
    Filed: September 5, 2002
    Publication date: June 5, 2003
    Inventors: Kenneth P. Gross, Paul Manhart, Richard A. Buchroeder
  • Publication number: 20020105646
    Abstract: A periodic structure is illuminated by polychromatic electromagnetic radiation. Radiation from the structure is collected and divided into two rays having different polarization states. The two rays are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a polychromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam. Radiation that has passed through the element is detected when the plane of polarization is at the two or more positions so that one or more parameters of the periodic structure may be derived from the detected signals.
    Type: Application
    Filed: December 20, 2000
    Publication date: August 8, 2002
    Inventors: Guoheng Zhao, Kenneth P. Gross, Rodney Smedt, Mehrdad Nikoonahad
  • Publication number: 20020051130
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Application
    Filed: July 10, 2001
    Publication date: May 2, 2002
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Patent number: 6271916
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Grant
    Filed: December 20, 1996
    Date of Patent: August 7, 2001
    Assignee: Kla-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Patent number: 5565979
    Abstract: An apparatus and method for inspecting a substrate, such as a semiconductor wafer, includes crossed cylindrical optical elements that form an elliptical beam that is caused to scan in parallel fashion at an oblique angle to the substrate. Preferably, the smaller dimension of the elliptical beam is perpendicular to the direction of the scan of the beam across the wafer. A reflector converts an angularly varying beam to a telecentrically scanning beam and also provides focusing only in the direction parallel to the telecentric scan. On the other hand, a cylinder lens has a focusing power only in the direction perpendicular to the telecentric scanning.
    Type: Grant
    Filed: November 4, 1994
    Date of Patent: October 15, 1996
    Assignee: Tencor Instruments
    Inventor: Kenneth P. Gross
  • Patent number: 5416594
    Abstract: An optical surface scanner for semiconductor wafers and like substrates having one channel with a detector receiving collected scattered light and another channel with a detector receiving reflected light. The scattered light signal is indicative of surface haze, particle count and size, while the reflected light signals are indicative of film thickness and/or surface properties as in the case of an opaque or absorbing layer. The latter signal may be used to correct the particle count and size determination and may also be used simultaneously for thin film measurement. The reflectivity or thin film measurement signals may be used to characterize a film layer controller to improve the accuracy of the deposited thickness of the layer.
    Type: Grant
    Filed: July 20, 1993
    Date of Patent: May 16, 1995
    Assignee: Tencor Instruments
    Inventors: Kenneth P. Gross, George J. Kren, Christopher F. Bevis
  • Patent number: 5189481
    Abstract: A surface inspection apparatus having multiple inspection stations to inspect a wafer for a number of characteristics. The wafer is placed on a chuck connected to a rack-and-pinion or equivalent system so that the wafer simultaneously rotates and translates under the fixed position of the inspection stations. A single light source may be used by all stations in turn. One station may be a particle detector with collection optics receiving a small select portion of the light scattered from the wafer surface. A second station may be a roughness detector with a collection system to direct a large portion of scattered light to a detector. A position sensitive detector may be used to determine the slope of the wafer surface at an inspection point when the wafer is not clamped to the chuck, giving a measure of surface deformation. These or other stations are positioned about either of two inspection points at which the beam from the light source may be directed.
    Type: Grant
    Filed: July 26, 1991
    Date of Patent: February 23, 1993
    Assignee: Tencor Instruments
    Inventors: Peter C. Jann, Kenneth P. Gross, Armand P. Neukermans
  • Patent number: 5083035
    Abstract: A particle imager and method for imaging particles on surfaces of substrates. A surface is raster scanned by a collimated light beam and particles on the surface are detected by the scattered light caused by the particles. During a scan path the intensity of the scattered light is measured forming intensity traces and location addresses for the detected particles. Data from each scan path is stored in memory. The imager is pre-calibrated with a test wafer having light scattering marker points spaced at known positions thereon. Scanning the test wafer, a clock measures time elapsed from a start position to each marker point. The corresponding elapsed times and known address locations are stored in memory for reference during data collection.
    Type: Grant
    Filed: July 17, 1990
    Date of Patent: January 21, 1992
    Assignee: Tencor Instruments
    Inventors: Jiri Pecen, Kenneth P. Gross, Brian Leslie, George Kren
  • Patent number: 4746215
    Abstract: The sample air inlet nozzle into a particle counter test cell is formed with an elongated, flattened tip to provide a thin, flat laminar flow jet which intersects a laser beam. A secondary tube surrounding the nozzle provides a sheath of air which helps maintain the jet shape.
    Type: Grant
    Filed: April 24, 1986
    Date of Patent: May 24, 1988
    Assignee: Pacific Scientific Company
    Inventor: Kenneth P. Gross