Abstract: A remote plasma source (RPS) for generating etchants leverages symmetrical hallow cathode cavities to increase etchant rates. The RPS includes an upper electrode with a first hollow cavity configured to induce a hollow cathode effect within the first hollow cavity, a lower electrode with a second hollow cavity configured to induce a hollow cathode effect within the second hollow cavity, wherein the first hollow cavity and the second hollow cavity are symmetrical, a first gap positioned between and electrically separating the upper electrode and the lower electrode, and an annular dielectric cover in direct contact with the lower electrode in the first gap and forms a second gap between an uppermost surface of the annular dielectric cover and a lowermost surface of the upper electrode. The annular dielectric cover fills approximately 50% to approximately 95% of a height of the first gap.

Abstract: A remote plasma source (RPS) for generating etchants leverages symmetrical hallow cathode cavities to increase etchant rates. The RPS includes an upper electrode with a first hollow cavity configured to induce a hollow cathode effect within the first hollow cavity, a lower electrode with a second hollow cavity configured to induce a hollow cathode effect within the second hollow cavity, wherein the first hollow cavity and the second hollow cavity are symmetrical, a first gap positioned between and electrically separating the upper electrode and the lower electrode, and an annular dielectric cover in direct contact with the lower electrode in the first gap and forms a second gap between an uppermost surface of the annular dielectric cover and a lowermost surface of the upper electrode. The annular dielectric cover fills approximately 50% to approximately 95% of a height of the first gap.

Abstract: The present invention approaches the filling efficiency problem from the perspective of the block receptor sites independent of any modification to existing manufacturing equipment or general block geometry. The present invention teaches the use of receptor site openings consisting of various shapes to increase the filling efficiency by improving the ease with which a right-side-up block can deposit into a receptor site opening while preventing improperly oriented blocks from completely entering the block receptor site and enhancing the ease with which incorrectly seated and upside down blocks can be removed from the receptor site.

Abstract: Apparatuses and methods for improved fluidic self assembly (FSA). An apparatus performing an improved FSA method can include one or more of a block deposition and clearing section, a drying section, a lamination section and an inspection section. In a specific embodiment, each of these sections are connected in series but distinctly separate. The deposition and clearing section can additionally include dispenser nozzles, rolling pins, and a cross-flow jet pump nozzle, as well as other components.

Abstract: A guiding feature used to assist deposition of a functional block into a recessed region formed in a substrate. A template is used to create the guiding feature on a substrate. The template comprises a first feature configured to create a corresponding recessed region in a substrate and a second feature configured to form a guiding line on the substrate. The guiding line is continuous for a section of the substrate and located proximate to the recessed region. The guiding line configured to guide a functional block toward the recessed region during a fluidic self-assembly deposition process. The substrate can include an array, divided into rows and columns, of the recessed regions to receive a plurality of functional blocks and the template includes more than one of the first features configured to create such array of recessed regions in the substrate.

Abstract: A Radio Frequency Identification (RFID) tag. The RFID tag comprises a flexible substrate and an integrated circuit embedded within the flexible substrate. The top surface of the integrated circuit is coplanar with the flexible substrate. At least one conductive element is formed on the flexible substrate. The conductive element is electrically connected to the integrated circuit. The conductive element serves as an antenna for the RFID tag.

Abstract: Methods for fabricating an assembly having functional blocks coupling to a substrate. The method includes providing the substrate with receptor sites wherein each of the receptor sites is designed to couple to one of the functional blocks. Electrodes are coupled to the substrate. The electrodes cover the receptor sites such that portions of the receptor sites are coated with the electrodes. Applying a voltage source to the electrodes using a first electrical circuit such that each electrode has a voltage different from another electrode. The electrodes form an electric field. The functional blocks having electronic devices and being in a slurry solution are dispensed over the substrate. Each functional block is fabricated out of materials having a high dielectric constant such that said functional blocks are attracted to the higher field strength regions and are guided to the receptor sites.

Abstract: A method for assembling a device. The method comprises placing a functional element in a first opening formed in a template substrate and transferring the functional element to a device substrate having a second opening formed therein wherein the functional element is held within the second opening and against an adhesive film coupled to the device substrate.