Abstract: A seal assembly (60) for sealing first and second static parts (40A, 40B) with opposed slots (44A, 44B) together forming a pocket (46). The seal assembly (60) comprises a floor strip (70) positioned adjacent the pocket's floor (48) and a ceiling strip (80) positioned adjacent the pocket's ceiling (50). A connection (90) of the strips' central portions (72, 82) provides a flat hinge between cooperating hinge portions (76, 86). A first set of the hinge portions (76A-86A) converge for insertion into the first slot (44A) and a second set of hinge portions (76B-96B) converge for insertion into the second slot (44B). After such slot insertion and pocket installation, the converged hinge portions (76A-86A, 76B-86B) resiliently diverge within the pocket to seat the floor strip's end portions (74A, 74B) against the pocket's floor (48) and to seat the ceiling strip's end portions (84A, 84B) against the pocket's ceiling (50).

Abstract: A seal has first and second spring elements each having first and second surfaces along a bellows cross-section and extending between first and second edges. A spreader is secured to an endplate between the first edges of the first and second elements to capture first edge portions of the first and second elements.

Abstract: A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.

Abstract: In forming a bellows-like seal from a welded metallic band, improved mechanical properties may be obtained by welding the ends of a strip forming the band at an angle off-normal to the band rims (and seal axis). The angle may be a single angle (i.e., with a straight weld) or there may be multiple angles (e.g., with a serpentine or other convoluted weld). The weld may extend through the band normal to surfaces of the band or at an angle off-normal. The metallic band may comprise an oxide dispersion strengthened alloy.