Patents by Inventor Kenneth Wilhelmsson

Kenneth Wilhelmsson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece
    Patent number: 6819490
    Abstract: The present invention relates to a device for homogenizing the spatial intensity distribution of a spatially coherent radiation beam. The device includes a grating arranged in the propagation path of a spatially coherent radiation beam for diffracting the coherent beam and thus decreasing the coherence length of a diffracted radiation beam in a direction orthogonal to the propagation direction of the radiation beam relative to the width of the radiation beam in the orthogonal direction; and a radiation splitting and directing arrangement arranged in the propagation path of the diffracted radiation beam for splitting the diffracted radiation beam into spatially separated portions and for superimposing the spatially separated portions to form a radiation beam having a homogenized spatial intensity distribution.
    Type: Grant
    Filed: September 10, 2002
    Date of Patent: November 16, 2004
    Assignee: Micronic Laser Systems AB
    Inventors: Torbjörn Sandström, Anna-Karin Holmér, Kenneth Wilhelmsson
  • Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece
    Publication number: 20030071204
    Abstract: The present invention relates to a device for homogenizing the spatial intensity distribution of a spatially coherent radiation beam. The device includes a grating arranged in the propagation path of said spatially coherent radiation beam for diffracting said coherent beam and thus decreasing the coherence length of a diffracted radiation beam in a direction orthogonal to the propagation direction of the radiation beam relative to the width of the radiation beam in said orthogonal direction; and a radiation splitting and directing arrangement arranged in the propagation path of said diffracted radiation beam for splitting said diffracted radiation beam into spatially separated portions and for superimposing said spatially separated portions to thereby form a radiation beam having a homogenized spatial intensity distribution.
    Type: Application
    Filed: September 10, 2002
    Publication date: April 17, 2003
    Inventors: Torbjorn Sandstrom, Anna-Karin Holmer, Kenneth Wilhelmsson