Abstract: A remote plasma source (RPS) for generating etchants leverages symmetrical hallow cathode cavities to increase etchant rates. The RPS includes an upper electrode with a first hollow cavity configured to induce a hollow cathode effect within the first hollow cavity, a lower electrode with a second hollow cavity configured to induce a hollow cathode effect within the second hollow cavity, wherein the first hollow cavity and the second hollow cavity are symmetrical, a first gap positioned between and electrically separating the upper electrode and the lower electrode, and an annular dielectric cover in direct contact with the lower electrode in the first gap and forms a second gap between an uppermost surface of the annular dielectric cover and a lowermost surface of the upper electrode. The annular dielectric cover fills approximately 50% to approximately 95% of a height of the first gap.

Abstract: A two-dimensional (2D) chemical shift correlated MR spectroscopic (COSY) sequence integrated into a new volume localization technique (90°-180°-90°) for whole body MR Spectroscopy. Using the product operator formalism, a theoretical calculation of the volume localization as well as the coherence transfer efficiencies in 2D MRS is presented. A combination of different MRI transmit/receive rf coils is used. The cross peak intensities excited by the proposed 2D sequence are asymmetric with respect to the diagonal peaks. Localized COSY spectra of cerebral frontal and occipital gray/white matter regions in fifteen healthy controls are presented.

Abstract: A liner for the plasma chamber of a plasma tool is described wherein the liner is composed substantially entirely of pure ceramic. A method for preparing such a liner is also described.

Abstract: A two-dimensional (2D) chemical shift correlated MR spectroscopic (COSY) sequence integrated into a new volume localization technique (90°-180°-90°) for whole body MR Spectroscopy. Using the product operator formalism, a theoretical calculation of the volume localization as well as the coherence transfer efficiencies in 2D MRS is presented. A combination of different MRI transmit/receive rf coils is used. The cross peak intensities excited by the proposed 2D sequence are asymmetric with respect to the diagonal peaks. Localized COSY spectra of cerebral frontal and occipital gray/white matter regions in fifteen healthy controls are presented.