Patents by Inventor Kensaku ONISHI

Kensaku ONISHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus, storage device, and method of transporting substrate storing container
    Patent number: 9728434
    Abstract: In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.
    Type: Grant
    Filed: August 6, 2014
    Date of Patent: August 8, 2017
    Assignee: SCREEN Semiconductor Solutions Co., Ltd.
    Inventors: Yukihiko Inagaki, Kensaku Onishi, Jun Yamamoto
  • SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANSPORTING SUBSTRATE STORING CONTAINER
    Publication number: 20140341681
    Abstract: In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.
    Type: Application
    Filed: August 6, 2014
    Publication date: November 20, 2014
    Inventors: Yukihiko INAGAKI, Kensaku ONISHI, Jun YAMAMOTO
  • Substrate processing apparatus, storage device, and method of transporting substrate storing container
    Patent number: 8827621
    Abstract: In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.
    Type: Grant
    Filed: March 8, 2011
    Date of Patent: September 9, 2014
    Assignee: Sokudo Co., Ltd.
    Inventors: Yukihiko Inagaki, Kensaku Onishi, Jun Yamamoto
  • SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANSPORTING SUBSTRATE STORING CONTAINER
    Publication number: 20110222994
    Abstract: In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.
    Type: Application
    Filed: March 8, 2011
    Publication date: September 15, 2011
    Inventors: Yukihiko INAGAKI, Kensaku ONISHI, Jun YAMAMOTO