Abstract: The invention is applied to an ultrasound inspection apparatus including an array probe such that wetting is substantially limited to an inspection surface of the work. The ultrasound inspection apparatus includes: a work holder that holds a work with an inspection surface thereof facing downward; an array probe that probes the work with an ultrasonic wave; a water tank in which the array probe is immersed in water; an arm that holds the array probe such that the array probe faces an underside of the inspection surface of the work; X-axial direction scanning means that horizontally scans the work, with a liquid surface coming into contact with the inspection surface of the work due to surface tension of a liquid stored in the water tank; and Y-axial direction scanning means that horizontally scans the array probe.

Abstract: To easily form an ultrasonic probe and an ultrasonic inspection apparatus capable of sending ultrasonic waves having frequencies equal to or more than 200 MHz. In view of this, an ultrasonic probe includes a stacked piezoelectric element configuring an ultrasonic probe includes a stacked piezoelectric element in which a stacked piezoelectric film disposed between a lower electrode and an upper electrode. The stacked piezoelectric film includes a ZnO film that has spontaneous polarization in a direction substantially perpendicular to the film surface and a SLAIN film that is different from the ZnO and that has spontaneous polarization in the opposite direction to the ZnO, the SLAIN film being directly formed on the ZnO film.

Abstract: The invention is applied to an ultrasound inspection apparatus including an array probe such that wetting is substantially limited to an inspection surface of the work. The ultrasound inspection apparatus includes: a work holder that holds a work with an inspection surface thereof facing downward; an array probe that probes the work with an ultrasonic wave; a water tank in which the array probe is immersed in water; an arm that holds the array probe such that the array probe faces an underside of the inspection surface of the work; X-axial direction scanning means that horizontally scans the work, with a liquid surface coming into contact with the inspection surface of the work due to surface tension of a liquid stored in the water tank; and Y-axial direction scanning means that horizontally scans the array probe.