Patents by Inventor Kento Asoya

Kento Asoya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating agent for forming fine pattern
    Patent number: 9417532
    Abstract: A coating agent for forming a fine pattern capable of simultaneously achieving slimming and roughness reduction of a positive-type resist pattern without deteriorating the cross-sectional shape of the slimmed positive type resist pattern and a method of slimming treatment of a positive-type resist pattern using the above coating agent for forming a fine pattern. A coating agent comprising a nitrogen-containing compound with a specific structure and an organic solvent is used as the coating agent for forming fine pattern used for a positive-type resist pattern. The coating agent may include a basic nitrogen-containing compound and/or a water-soluble polymer or an alkali-soluble polymer.
    Type: Grant
    Filed: March 25, 2015
    Date of Patent: August 16, 2016
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Takumi Namiki, Tomoya Kumagai, Kento Asoya
  • COATING AGENT FOR FORMING FINE PATTERN
    Publication number: 20150277228
    Abstract: A coating agent for forming a fine pattern capable of simultaneously achieving slimming and roughness reduction of a positive-type resist pattern without deteriorating the cross-sectional shape of the slimmed positive type resist pattern and a method of slimming treatment of a positive-type resist pattern using the above coating agent for forming a fine pattern. A coating agent comprising a nitrogen-containing compound with a specific structure and an organic solvent is used as the coating agent for forming fine pattern used for a positive-type resist pattern. The coating agent may include a basic nitrogen-containing compound and/or a water-soluble polymer or an alkali-soluble polymer.
    Type: Application
    Filed: March 25, 2015
    Publication date: October 1, 2015
    Inventors: Takumi Namiki, Tomoya Kumagai, Kento Asoya