Abstract: A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.

Abstract: Provided is a gas supply system for supplying hydrogen to a vehicle, the vehicle including: a tank loaded with a hydrogen storage alloy, storing and releasing hydrogen; and a thermal medium distribution unit attached to the tank and configured such that a thermal medium for heating or cooling the hydrogen storage alloy is distributable from outside, includes: a reservoir reserving hydrogen at a pressure of 0.2 MPa or greater and less than 3.0 MPa; a hydrogen flow path connectable to the vehicle for supplying hydrogen from the reservoir to the tank; a cooling medium reservoir reserving the thermal medium for cooling; and a thermal medium flow path connectable to the vehicle for distributing the thermal medium to the thermal medium distribution unit in the vehicle, in which the hydrogen flow path and the thermal medium flow path are combined at least at an end portion connectable to the vehicle.

Abstract: A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.

Abstract: Provided are formation method and device for slug flow capable of suitably forming a stable slug flow. The formation method for slug flow includes a step of preparing a microreactor (1) that forms a fine flow passage (11), and includes a wall surface having a hydrophilic property, a hydrophilic liquid supply step of supplying the fine flow passage (11) with only a hydrophilic liquid out of the hydrophilic liquid and a hydrophobic liquid, and a step of supplying the fine flow passage (11) with the hydrophilic liquid and the hydrophobic liquid after executing the hydrophilic liquid supply step, thereby forming a slug flow in which cells formed of the hydrophilic liquid and cells formed of the hydrophobic liquid are alternately arranged in a fine-flow-passage length direction of the fine flow passage (11) in the fine flow passage (11).

Abstract: Provided is a gas supply system for supplying hydrogen to a vehicle, the vehicle including: a tank loaded with a hydrogen storage alloy, storing and releasing hydrogen; and a thermal medium distribution unit attached to the tank and configured such that a thermal medium for heating or cooling the hydrogen storage alloy is distributable from outside, includes: a reservoir reserving hydrogen at a pressure of 0.2 MPa or greater and less than 3.0 MPa; a hydrogen flow path connectable to the vehicle for supplying hydrogen from the reservoir to the tank; a cooling medium reservoir reserving the thermal medium for cooling; and a thermal medium flow path connectable to the vehicle for distributing the thermal medium to the thermal medium distribution unit in the vehicle, in which the hydrogen flow path and the thermal medium flow path are combined at least at an end portion connectable to the vehicle.